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Dive into the research topics where Akihiro Takanashi is active.

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Featured researches published by Akihiro Takanashi.


Japanese Journal of Applied Physics | 1987

High Speed Laser Beam Scanning Using an Acousto-Optical Deflector (AOD)

Sumio Hosaka; Eiichi Seya; Tasuo Harada; Akihiro Takanashi

The cylindrical lensing effect in high-speed laser-beam scanning using an acousto-optical deflector AOD was theoretically and experimentally investigated. As a result, both a static and a dynamic cylindrical lensing effect was found during high-speed laser-beam scans. A compensation for a cylindrical lensing effect was proven to be very important for a realization of high-speed laser-beam scanning. Examples of this compensation are an improvement in the voltage-frequency converter and the use of a cylindrical lens behind the AOD. With such compensation, the focal position deviation from the nominal focal plane could be suppressed to remain within 4 µm when the laser beam was scanned over about 300 µm on the focal plane at a 10 m/s scanning speed and a 20 kHz ramp signal frequency.


Archive | 1982

Pattern forming apparatus

Akihiro Takanashi; Tatsuo Harada; Masamoto Akeyama; Yataro Kondo; Toshiei Kurosaki; Shinji Kuniyoshi; Sumio Hosaka; Yoshio Kawamura


Archive | 1983

Manufacturing device for semiconductor

Masamoto Akeyama; Tatsuo Harada; Sumio Hosaka; Yoshio Kawamura; Yataro Kondo; Shinji Kuniyoshi; Toshishige Kurosaki; Akihiro Takanashi


Archive | 1982

Immersion distance holding device

Sumio Hosaka; Yoshio Kawamura; Shinji Kuniyoshi; Toshishige Kurosaki; Akihiro Takanashi; Tsuneo Terasawa


Archive | 1995

Air-cooled electronic apparatus with condensation prevention

Tetsuya Tanaka; Toshio Hatada; Takayuki Atarashi; Junichi Kobayashi; Akihiro Takanashi; Takahiro Daikoku; Yutaka Watanabe; Shizuo Zushi


Archive | 1981

Laser beam scanning system

Sumio Hosaka; Tatsuo Harada; Akihiro Takanashi


Archive | 1981

Pattern detecting apparatus

Shinji Kuniyoshi; Akihiro Takanashi; Toshiei Kurosaki; Sumio Hosaka; Yoshio Kawamura; Tsuneo Terasawa


Archive | 1976

Optical exposure apparatus

Shigeo Moriyama; Tatsuo Harada; Yoshio Kawamura; Seiya Hashimoto; Akihiro Takanashi; Toshiei Kurosaki; Shinji Kuniyoshi; Sumio Hosaka


Archive | 1985

Projection-exposure equipment

Yoshio Kawamura; Toshishige Kurosaki; Kazuo Sato; Akihiro Takanashi; Shinji Tanaka; Tsuneo Terasawa


Archive | 1982

Pattern exposing apparatus

Akihiro Takanashi; Norikazu Hashimoto; Hisashi Maejima; Shuji Sugiyama

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Kazuo Sato

Hitachi Construction Machinery

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Shinzo Enomoto

Chiba Institute of Technology

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