Akiko Murata

Preparation of (001)-oriented Pb(Zr,Ti)O/sub 3/ thin films and their piezoelectric applications

Preparation of (001) oriented Pb(Zr,Ti)O3 (PZT) thin films and their applications to a sensor and actuators were investigated. The (001) oriented PZT thin films were epitaxicially grown on (100)Pt/(100)MgO single crystal substrates by rf-magnetron sputtering. The PZT thin films on (100)Pt/(100)MgO buffer layer/glass substrates and (11 l)Pt/Ti/Si substrates also had high (001) orientation. All of these thin films showed the excellent piezoelectric properties without a poling treatment. These PZT thin films were applied to the angular rate sensor with a toning fork for a car navigation system, the dual-stage actuator for positioning a magnetic head of high-density hard disk drive (HDD) and the actuator for a inkjet printer head.

Preparation of (001) oriented Pb(Zr,Ti)O 3 thin films and their piezoelectric applications

Preparation of (001)-oriented Pb(Zr,Ti)O3 (PZT) thin films and their applications to a sensor and actuators were investigated. These thin films, which have a composition close to the morphotropic phase boundary, were epitaxially grown on (100)MgO single-crystal substrates by RF magnetron sputtering. These (001)-oriented PZT thin films could be obtained on various kinds of substrates, such as glass and Si, by introducing (100)-oriented MgO buffer layers. In addition, the (001)-oriented PZT thin films could be obtained on Si substrates without buffer layers by optimizing the sputtering conditions. All of these thin films showed excellent piezoelectric properties without the need for poling treatment. The PZT thin films on the MgO substrates had a high piezoelectric coefficient, d31, of -100 pm/V, and an extremely low relative dielectric constant, epsivr, of 240. The PZT thin films on Si substrate had a very high d31 of -150 pm/V and an epsivr = 700. These PZT thin films were applied to an angular rate sensor with a tuning fork in a car navigation system, to a dual-stage actuator for positioning the magnetic head of a high-density hard disk drive, and to an actuator for an inkjet printer head for industrial on-demand printers.