Akiko Murata
Panasonic
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Publication
Featured researches published by Akiko Murata.
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control | 2007
Eiji Fujii; Ryoichi Takayama; Kouji Nomura; Akiko Murata; Taku Hirasawa; Atsushi Tomozawa; Satoru Fujii; Takeshi Kamada; Hideo Torii
Preparation of (001) oriented Pb(Zr,Ti)O3 (PZT) thin films and their applications to a sensor and actuators were investigated. The (001) oriented PZT thin films were epitaxicially grown on (100)Pt/(100)MgO single crystal substrates by rf-magnetron sputtering. The PZT thin films on (100)Pt/(100)MgO buffer layer/glass substrates and (11 l)Pt/Ti/Si substrates also had high (001) orientation. All of these thin films showed the excellent piezoelectric properties without a poling treatment. These PZT thin films were applied to the angular rate sensor with a toning fork for a car navigation system, the dual-stage actuator for positioning a magnetic head of high-density hard disk drive (HDD) and the actuator for a inkjet printer head.
international symposium on applications of ferroelectrics | 2007
Eiji Fujii; Ryoichi Takayama; Kouji Nomura; Akiko Murata; Taku Hirasawa; Atsushi Tomozawa; Satoru Fujii; Takeshi Kamada; Hideo Torii
Preparation of (001)-oriented Pb(Zr,Ti)O3 (PZT) thin films and their applications to a sensor and actuators were investigated. These thin films, which have a composition close to the morphotropic phase boundary, were epitaxially grown on (100)MgO single-crystal substrates by RF magnetron sputtering. These (001)-oriented PZT thin films could be obtained on various kinds of substrates, such as glass and Si, by introducing (100)-oriented MgO buffer layers. In addition, the (001)-oriented PZT thin films could be obtained on Si substrates without buffer layers by optimizing the sputtering conditions. All of these thin films showed excellent piezoelectric properties without the need for poling treatment. The PZT thin films on the MgO substrates had a high piezoelectric coefficient, d31, of -100 pm/V, and an extremely low relative dielectric constant, epsivr, of 240. The PZT thin films on Si substrate had a very high d31 of -150 pm/V and an epsivr = 700. These PZT thin films were applied to an angular rate sensor with a tuning fork in a car navigation system, to a dual-stage actuator for positioning the magnetic head of a high-density hard disk drive, and to an actuator for an inkjet printer head for industrial on-demand printers.
Archive | 2003
Hideo Torii; Eiji Fujii; Atsushi Tomozawa; Akiko Murata; Ryoichi Takayama; Taku Hirasawa
Archive | 2002
Eiji Fujii; Hideo Torii; Ryoichi Takayama; Atsushi Tomozawa; Akiko Murata; Taku Hirasawa
Archive | 2009
Akiko Murata; Yuka Okada
Archive | 2002
Akiyuki Fujii; Akiko Murata; Ryoichi Takayama; Atsushi Tomosawa; Hideo Torii; 淳 友澤; 晶子 村田; 映志 藤井; 良一 高山; 秀雄 鳥井
Archive | 2003
Akiyuki Fujii; Hiroshi Hirasawa; Akiko Murata; Ryoichi Takayama; Atsushi Tomosawa; Hideo Torii; 友澤 淳; 平澤 拓; 村田 晶子; 藤井 映志; 高山 良一; 鳥井 秀雄
Archive | 2007
Norihisa Takahara; Takashi Ohta; Yuka Okada; Akiko Murata
Archive | 2003
Akiyuki Fujii; Satoru Fujii; Hiroshi Hirasawa; Takeshi Kamata; Akiko Murata; Atsushi Tomosawa; Hideo Torii; 淳 友澤; 拓 平澤; 晶子 村田; 映志 藤井; 覚 藤井; 健 鎌田; 秀雄 鳥井
Archive | 2004
Akiyuki Fujii; Hiroshi Hirasawa; Akiko Murata; Ryoichi Takayama; Atsushi Tomosawa; Hideo Torii; 友澤 淳; 平澤 拓; 村田 晶子; 藤井 映志; 高山 良一; 鳥井 秀雄
