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Akiyama Morito

National Institute of Advanced Industrial Science and Technology

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Publication

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Archive | 2008

Piezoelektrischer dünner Film, piezoelektrisches Material und Herstellungsverfahren für piezoelektrischen dünnen Film und piezoelektrisches Material, und piezoelektrischer Resonator, Schalterelement und physikalischer Fühler, die piezoelektrischen dünnen Film verwenden

Akiyama Morito; Kamohara Toshihiro; Ueno Naohiro; Kano Kazuhiko; Teshigahara Akihiko; Takeuchi Yukihiro; Kawahara Nobuaki

Archive | 2004

ALUMINUM NITRIDE THIN FILM AND PIEZOELECTRIC THIN-FILM RESONATOR

Nagao Keigo; Masui Eiji; Yamada Tetsuo; Akiyama Morito; Ueno Naohiro; Tateyama Hiroshi

Archive | 2017

GALLIUM NITRIDE STRUCTURE, PIEZOELECTRIC ELEMENT, METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT, AND RESONATOR USING PIEZOELECTRIC ELEMENT

Umeda Keiichi; Mizuno Takaaki; Aida Yasuhiro; Uehara Masato; Nagase Toshimi; Akiyama Morito

Archive | 2017

PIEZOELECTRIC FILM, METHOD FOR PRODUCING SAME, AND PIEZOELECTRIC COMPONENT USING PIEZOELECTRIC FILM

Mizuno Takaaki; Umeda Keiichi; Honda Atsushi; Aida Yasuhiro; Uehara Masato; Akiyama Morito; Nagase Toshimi; Yamada Hiroshi

Archive | 2017

Piezoelectric member that achieves high sound speed, acoustic wave apparatus, and piezoelectric member manufacturing method

Umeda Keiichi; Honda Atsushi; Tanaka Atsushi; Omura Masashi; Akiyama Morito

Archive | 2016

Aluminum nitride piezoelectric thin film, method for manufacturing aluminum nitride piezoelectric thin film, piezoelectric material, and piezoelectric component

Umeda Keiichi; Akiyama Morito; Nagase Toshimi; Nishikubo Keiko; Honda Atsushi

Archive | 2015

ALUMINUM NITRIDE PIEZOELECTRIC THIN FILM, PIEZOELECTRIC MATERIAL, PIEZOELECTRIC COMPONENT, AND METHOD FOR MANUFACTURING ALUMINUM NITRIDE PIEZOELECTRIC THIN FILM

Umeda Keiichi; Akiyama Morito; Nagase Toshimi; Nishikubo Keiko; Honda Atsushi

Archive | 2012

Verfahren zum Herstellen eines Scandiumaluminiumnitridfilms

Tabaru Tatsuo; Teshigahara Akihiko; Akiyama Morito; Kano Kazuhiko; Nishikubo Keiko

IEICE Technical Report; IEICE Tech. Rep. | 2010

Giant shear mode electromechanical coupling in c-axis tilted ScAlN films

Yanagitani Takahiko; Arakawa Kazuki; Suzuki Masashi; Kano Kazuhiko; Teshigahara Akihiko; Akiyama Morito

Archive | 2009

LAMINAT MIT WURTZRITKRISTALLSCHICHT UND HERSTELLUNGSVERFAHREN DAFÜR

Akiyama Morito; Ueno Naohiro; Tateyama Hiroshi; Kamohara Toshihiro

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Ueno Naohiro

National Institute of Advanced Industrial Science and Technology

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Umeda Keiichi

Murata Manufacturing

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Honda Atsushi

National Institute of Advanced Industrial Science and Technology

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Nagase Toshimi

National Institute of Advanced Industrial Science and Technology

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Kamohara Toshihiro

National Institute of Advanced Industrial Science and Technology

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Kano Kazuhiko

Denso

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Nishikubo Keiko

National Institute of Advanced Industrial Science and Technology

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Teshigahara Akihiko

National Institute of Advanced Industrial Science and Technology

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Aida Yasuhiro

Murata Manufacturing

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Kawahara Nobuaki

National Institute of Advanced Industrial Science and Technology

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