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Akiyoshi Hattori

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Publication

Featured researches published by Akiyoshi Hattori.

Archive | 2007

Electrostatic chuck with heater and manufacturing method thereof

Ikuhisa Morioka; Kazuhiro Nobori; Tetsuya Kawajiri; Akiyoshi Hattori

Archive | 2004

Bonding member and electrostatic chuck

Tomoyuki Fujii; Yutaka Mori; Akiyoshi Hattori

Archive | 2004

JOINT STRUCTURE OF CERAMICS

Tomoyuki Fujii; Akiyoshi Hattori; 亮誉 服部; 知之 藤井

Archive | 2003

JOINT MEMBER AND ELECTROSTATIC CHUCK

Tomoyuki Fujii; Akiyoshi Hattori; Yutaka Mori; 亮誉 服部; 知之 藤井

Archive | 2007

Electrostatic chuck with heater

Kazuhiro Nobori; Tetsuya Kawajiri; Akiyoshi Hattori

Archive | 2006

Electrostatic chuck with heater and its manufacturing method

和宏 ▲のぼり▼; Akiyoshi Hattori; Tetsuya Kawajiri; Ikuhisa Morioka; Kazuhiro Nobori; 哲也 川尻; 亮誉 服部; 育久 森岡

Archive | 2004

Joined structures of ceramics

Tomoyuki Fujii; Akiyoshi Hattori

Archive | 2007

Electrostatic chuck, and manufacturing method of electrostatic chuck

Akiyoshi Hattori; 亮誉 服部

Archive | 2007

Electrostatic chuck heater

Yutaka Mori; Akiyoshi Hattori; Takeru Torigoe

Archive | 2004

Aluminum nitride substrate and method of manufacturing the same

Akiyoshi Hattori; 亮誉 服部

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Collaboration

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Tomoyuki Fujii

Applied Materials

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