Akiyuki Minami | Researchain

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Publication

Featured researches published by Akiyuki Minami.

Archive | 1998

Alignment marks of semiconductor substrate and manufacturing method thereof

Satoshi Machida; Akiyuki Minami

Archive | 2002

Resist mask for measuring the accuracy of overlaid layers

Akiyuki Minami; Satoshi Machida

Archive | 2002

Method of manufacturing alignment mark

Satoshi Machida; Akiyuki Minami

Archive | 1999

Resist mark having measurement marks for measuring the accuracy of overlay of a photomask disposed on semiconductor wafer and method for manufacturing semiconductor wafer having it

Akiyuki Minami; Satoshi Machida

Archive | 2008

Semiconductor non-volatile memory cell, method of producing the same, semiconductor non-volatile memory having the semiconductor non-volatile memory cell, and method of producing the same

Koji Takaya; Akiyuki Minami

Archive | 2003

Apparatus and method for exposure

Akiyuki Minami

Archive | 2002

Resist mask having measurement marks for measuring the accuracy of overlay of a photomask disposed on semiconductor wafer

Akiyuki Minami; Satoshi Machida

Archive | 2002

Method for manufacturing semiconductor wafer having resist mask with measurement marks for measuring the accuracy of overlay of a photomask

Akiyuki Minami; Satoshi Machida

Archive | 2006

Method for detecting alignment accuracy

Akiyuki Minami

Archive | 2008

Semiconductor non-volatile memory having semiconductor non-volatile memory cell with electric charge accumulation layer, and method of producing the same

Koji Takaya; Akiyuki Minami

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Collaboration

Dive into the Akiyuki Minami's collaboration.

Top Co-Authors

Satoshi Machida

Oki Electric Industry

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Top Co-Authors

Koji Takaya

Oki Electric Industry

View shared research outputs

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Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot

Dive into the research topics where Akiyuki Minami is active.

Publication

Featured researches published by Akiyuki Minami.

Alignment marks of semiconductor substrate and manufacturing method thereof

Resist mask for measuring the accuracy of overlaid layers

Method of manufacturing alignment mark

Resist mark having measurement marks for measuring the accuracy of overlay of a photomask disposed on semiconductor wafer and method for manufacturing semiconductor wafer having it

Semiconductor non-volatile memory cell, method of producing the same, semiconductor non-volatile memory having the semiconductor non-volatile memory cell, and method of producing the same

Apparatus and method for exposure

Resist mask having measurement marks for measuring the accuracy of overlay of a photomask disposed on semiconductor wafer

Method for manufacturing semiconductor wafer having resist mask with measurement marks for measuring the accuracy of overlay of a photomask

Method for detecting alignment accuracy

Semiconductor non-volatile memory having semiconductor non-volatile memory cell with electric charge accumulation layer, and method of producing the same

Collaboration

Dive into the Akiyuki Minami's collaboration.