Aleksandar Vujanic

Principles of Torque Measurements for Rotating Microsystems

In this paper, the torque-rotational speed characteristics of rotating iicrosystems and the principles involved are examined. Furthermore, some devices on the market and some realisations in the scope of TMR-proiect “Handling and Assembly of Functionally Adapted Microcomponents, HAFAM” are presented.

New types of silicon torsion microspring and their characterization

A number of methods for torque measurements in the macro domain exist, but only some of them can be scaled down to micro dimensions. This paper describes one method for measuring very small moments which is based on the measurement of torque by using silicon micro springs. Three different designs of torsion micro springs have been produced. The experimentally measured results show the possibility of torque measurement in the sub-(mu) Nm range.

Low-Cost Visual Control for Handling and Assembly of Microsystems

An environment capable of on-line visual quality and motion control is presented. The resolution of the visual system is better than 3μm. The objects are held in a flexible paletting system and need not lie on predefined position. The data from the visual system may be sent to the motor control and can correct the position of the gripping system. The visual motion and quality control actively take a part in the control loop of the setup.

Development of a micromanipulation system for special applications in handling of microcomponents

A prototype system for handling, assembly and testing of microcomponents is described and demonstrated. The system is specially designed to fit inside the SEM chamber and operate under vacuum conditions but operation under an optical microscope, in atmospheric conditions, is also possible. The combination of servomotors and piezo-elements allow for a fast and precise positioning of the microparts at the submicron level.