Aleksander Owczarz

Single wafer processor with a frame

Multi-station semiconductor processor with volatilization

Centrifugal wafer carrier cleaning apparatus

Semiconductor processor apparatus with dynamic wafer vapor treatment and particulate volatilization

Rinser dryer system

Semiconductor processor with extendible receiver for handling multiple discrete wafers without wafer carriers.

Single wafer processor apparatus

Semiconductor processor wafer holder

Single wafer processor with a bowl

Wafer holder with flexibly mounted gripping fingers