Alexandra Nafari

MEMS Sensor for In Situ TEM Atomic Force Microscopy

Here, we present a MEMS atomic force microscope sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nanonewton range and thus mechanical characterization of nanosized structures. The main design challenges of the system and sensor are to reach a high sensitivity and to make a compact design that allows the sensor to be fitted in the narrow dimensions of the pole gap inside the TEM. In order to miniaturize the sensing device, an integrated detection with piezoresistive elements arranged in a full Wheatstone bridge was used. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We also present in situ TEM force measurements on nanotubes, which demonstrate the ability to measure spring constants of nanoscale systems.

Combining Scanning Probe Microscopy and Transmission Electron Microscopy

This chapter is a review of an in situ method where a scanning probe microscope (SPM) has been combined with a transmission electron microscope (TEM). By inserting a miniaturized SPM inside a TEM, a large set of open problems can be addressed and, perhaps more importantly, one may start to think about experiments in a new kind of laboratory, an in situ TEM probing laboratory, where the TEM is transformed from a microscope for still images to a real-time local probing tool. In this method, called TEMSPM, the TEM is used for imaging and analysis of a sample and SPM tip, while the SPM is used for probing of electrical and mechanical properties or for local manipulation of the sample. This chapter covers both instrumental and applicational aspects of TEMSPM.

Calibration methods of force sensors in the micro-Newton range

A micromachined capacitive force sensor operating in the micro-Newton range has been calibrated using both dynamic and static methods. Both calibrations are non-destructive, accurate and traceable to Systeme International (SI) fundamental units. The dynamic calibration is a differential mass loading resonant method where the resonance frequency with and without an added mass is measured. This gives enough information to compute the spring constant. In this paper, we evaluate the resonant mass loading method for more complex MEMS devices. Analytical calculations and finite element analysis have been performed to investigate the dynamic properties of the sensor, e.g. modal interference. The frequency response was measured with the third harmonic method where the third harmonic of the current through the sensor was measured. To detect and analyse the resonance mode of the structure during excitation, a scanning laser Doppler vibrometer was used. Two designs of a capacitive nanoindenter force sensor with flexure-type springs have been evaluated using these methods. The quality of the resonant calibration method has been tested using static mass loading in combination with transmission electron microscopy imaging of the sensor displacement. This shows that the resonant method can be extended to calibrate more complex structures than plain cantilevers. Both calibration methods used are traceable to SI fundamental units as they are based on masses weighed on a calibrated scale. The masses used do not need to be fixed or glued in any way, making the calibration non-destructive.

Novel Method for Controlled Wetting of Materials in the Environmental Scanning Electron Microscope

Environmental scanning electron microscopy has been extensively used for studying the wetting properties of different materials. For some types of investigation, however, the traditional ways of conducting in situ dynamic wetting experiments do not offer sufficient control over the wetting process. Here, we present a novel method for controlled wetting of materials in the environmental scanning electron microscope (ESEM). It offers improved control of the point of interaction between the water and the specimen and renders it more accessible for imaging. It also enables the study of water transport through a material by direct imaging. The method is based on the use of a piezo-driven nanomanipulator to bring a specimen in contact with a water reservoir in the ESEM chamber. The water reservoir is established by local condensation on a Peltier-cooled surface. A fixture was designed to make the experimental setup compatible with the standard Peltier cooling stage of the microscope. The developed technique was successfully applied to individual cellulose fibers, and the absorption and transport of water by individual cellulose fibers were imaged.

MEMS sensor for in situ TEM Atomic Force Microscopy

Here we present a MEMS atomic force microscope (AFM) sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nN range. The main design challenges of the sensor are a high sensitivity and the narrow dimensions of the pole gap inside the TEM. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We present in situ TEM force measurements on nanotubes, which demonstrates the ability to measure spring constants of nanoscale systems.

MEMS sensor for in situ TEM-nanoindentation with simultaneous force and current measurements

A capacitive force sensor for in situ transmission electron microscope (TEM)-nanoindentation with simultaneous force and current measurement has been developed. The sensor was fabricated using bulk micro machining methods such as deep reactive ion etch, thermal oxidation, metal deposition and anodic bonding. Two different geometries of the sensor were designed to allow in situ TEM electromechanical experiments in the most common TEM instruments. Electrical probing is enabled by an on-chip insulator, electrically separating the indenter tip and the capacitor used for force measurements. The sensor was designed for the force range of 0 to 4.5 mN. Finally, we demonstrate for the first time in situ TEM-nanoindentation with simultaneous force and current measurements.

Wireless Platform for Monitoring of Physiological Parameters of Cattle

Monitoring of cattle and their physiological parameters are understood to be important for maximization of milk production, prevention of health problems, nutrition planning etc. Wireless and continuous monitoring of cattle may be one possibility to assess their physiological parameters. Two aspects were investigated in this work: First trials based on state of the art research were conducted concerning monitoring of cows and heartbeat and oxygen saturation were recorded. In the second part commercially available wireless motes are discussed and tested for suitability in animal monitoring, which also includes a transmission distance experiment. Distances between several hundred meters and several km were achieved.

Monitoring the osmotic response of single yeast cells through force measurement in the environmental scanning electron microscope

We present a measurement system that combines an environmental scanning electron microscope (ESEM) and an atomic force microscope (AFM). This combination enables studies of static and dynamic mechanical properties of hydrated specimens, such as individual living cells. The integrated AFM sensor provides direct and continuous force measurement based on piezoresistive force transduction, allowing the recording of events in the millisecond range. The in situ ESEM-AFM setup was used to study Pichia pastoris wild-type yeast cells. For the first time, a quantified measure of the osmotic response of an individual yeast cell inside an ESEM is presented. With this technique, cell size changes due to humidity variations can be monitored with nanometre accuracy. In addition, mechanical properties were extracted from load–displacement curves. A Youngs modulus of 13–15 MPa was obtained for the P. pastoris yeast cells. The developed method is highly interesting as a complementary tool for the screening of drugs directed towards cellular water transport activity and provides new possibilities of studying mechanosensitive regulation of aquaporins.

Boron impurity at the Si/SiO2 interface in SOI wafers and consequences for piezoresistive MEMS devices

Boron impurity at the Si/SiO_{2} interface in SOI wafers and consequences for piezoresistive MEMS devices