Alfredo M. Morales

Sample concentration and impedance detection on a microfluidic polymer chip

We present an on-chip microfluidic sample concentrator and detection triggering system for microparticles based on a combination of insulator-based dielectrophoresis (iDEP) and electrical impedance measurement. This platform operates by first using iDEP to selectively concentrate microparticles of interest based on their electrical and physiological characteristics in a primary fluidic channel; the concentrated microparticles are then directed into a side channel configured for particle detection using electrical impedance measurements with embedded electrodes. This is the first study showing iDEP concentration with subsequent sample diversion down an analysis channel and is the first to demonstrate iDEP in the presence of pressure driven flow. Experimental results demonstrating the capabilities of this platform were obtained using polystyrene microspheres and Bacillus subtilis spores. The feasibility of selective iDEP trapping and impedance detection of these particles was demonstrated. The system is intended for use as a front-end unit that can be easily paired with multiple biodetection/bioidentification systems. This platform is envisioned to act as a decision-making component to determine if confirmatory downstream identification assays are required. Without a front end component that triggers downstream analysis only when necessary, bio-identification systems (based on current analytical technologies such as PCR and immunoassays) may incur prohibitively high costs to operate due to continuous consumption of expensive reagents.

Low-distortion, high-strength bonding of thermoplastic microfluidic devices employing case-II diffusion-mediated permeant activation

We demonstrate a new method for joining thermoplastic surfaces to produce microfluidic devices. The method takes advantage of the sharply defined permeation boundary of case-II diffusion to generate dimensionally controlled, activated bonding layers at the surfaces being joined. The technique is capable of producing bonds that exhibit cohesive failure, while preserving the fidelity of fine features in the bonding interface. This approach is uniquely suited to production of layered microfluidic structures, as it allows the bond-forming interface between plastic parts to be precisely manipulated at micrometre length scales. Distortions in microfluidic device channels are limited to the size scale of the permeant-swollen layer; 6 microm deep channels are routinely produced with no detectable cross-sectional distortions. Conventional thermal diffusion bonding of identical parts yields less strongly bonded microfluidic structures with increasingly severe dimensional compressions as bonding temperatures approach the thermoplastic glass-transition temperature: a preliminary rheological analysis is consistent with the observed compressions. The bond-enhancing procedure is easily integrated in standard process flows, uses inexpensive reagents, and requires no specialized equipment.

LIGA: metals, plastics, and ceramics

LIGA, an acronym from the German words for Lithography, Electroforming, and Molding, is being evaluated worldwide as a method to produce microparts from engineering materials. Much of the work to date in LIGA has focused on producing metal microparts, with nickel as the most common material of choice. There is a growing interest in producing plastic parts replicated from LIGA metal masters due largely to microanalytical instrumentation and medical applications. These plastic replicates are generally made by either hot embossing or injection molding. Ceramic replication, of particular interest for high temperature applications or to produce piezoelectric or magnetic microparts, is also emerging as an area of interest. In this paper, a model of the LIGA exposure and development processes is presented along with the result of numerical optimization of mask design and process cost. The baseline processes for a cost- effective method to produce metal microparts are discussed, along with replication methods and result for plastics and ceramics.

Enhanced photocurrent efficiency of a carbon nanotube p?n junction electromagnetically coupled to a photonic structure

We present photocurrent power-enhancement calculations of a carbon nanotube p?n junction electromagnetically coupled to a highly efficient photonic structure. Particular attention is paid to a GaAs photonic structure specifically modified to increase the intensity of infrared light onto the nanotube region for effective energy conversion. Using finite-difference time-domain calculations, we compute a significant increase in electric field intensity in the nanotube region which enables an estimation of power efficiency. These results demonstrate the potential of using a photonic structure to couple large-scale infrared sources with carbon nanotubes while still retaining all the unique optoelectronic properties found at the nanoscale.

Microstructure and mechanical properties of nickel microparts electroformed in replicated LIGA molds

A novel process for the rapid replication of electroforming plastic micromolds has been developed and is now being used to produce plated nickel test specimens. The process combines hot embossing or injection molding with metallic microscreens to produce sacrificial electroforming molds with conducting bases and insulating sidewalls. The replicated micromolds differ from standard LIGA molds in that the holes in the microscreen act as insulating defects in the electroforming base. The effects of such defects on the materials properties of electroformed microparts will be discussed and it will be shown that when the surface irregularities corresponding to the microscreen holes are removed, mechanical properties are experimentally indistinguishable from those found in conventionally processed LIGA specimens.

Micromolding and sintering of nanoparticle preforms into microparts

A new replication technology that produces, high aspect ratio ceramic or metal microparts by micromolding and sintering nanoparticle preforms is presented. In this LIGA replication technique, an epoxy based nanoparticle slurry is cast into sacrificial plastic micromolds produced by injection molding. The epoxy is allowed to cure and, if desired, excess epoxy is polished off to produce individual micropart preforms. The micromold is then dissolved in methylene chloride and the micropart preforms are sintered in either air (oxide ceramics) or 4% hydrogen in argon (nickel). This presentation will discuss the effects of the epoxy formulation, the microcasting procedure, and the sintering schedule on the materials properties of the final sintered microparts. It will be shown that this replication technique produces ceramic or metal microparts with micron size features and mechanical properties comparable to those of macroscopic materials.

The Fabrication of Stainless Steel Parts for MEMs

A micro-molding process was used to fabricate parts in the 0.1 to 10 mm size range from a stainless steel nano-powder. The two types of molds used were both produced from parts fabricated using the LIGA process so that they had precise dimensional tolerance and straight sidewalls. Rigid PMMA molds were made by injection molding and flexible silicone rubber molds were made by casting. Mold filling was accomplished by mixing the powder with epoxy to form a putty-like material that was then pressed into the mold cavities and allowed to cure. After pyrolysis of the epoxy, the parts were sintered in forming gas. The densification kinetics were measured in situ using a video system. Full densification was achieved after 1 hour at 1350°C. The microstructure of the sintered parts was examined using the SEM. The mechanical strength, hardness, dimensional tolerance and surface roughness of the sintered parts were also measured.

Injection molded microfluidic devices for biological sample separation and detection

We are developing a variety of microsystems for the separation and detection of biological samples. At the heart of these systems, inexpensive polymer microfluidic chips carry out sample preparation and analysis. Fabrication of polymer microfluidic chips involves the creation of a master in etched silicon or glass; plating of the master to produce a nickel stamp; large lot chip replication by injection molding; precision chip sealing; and chemical modification of channel surfaces. Separation chips rely on insulator-based dielectrophoresis for the separation of biological particles. Detection chips carry out capillary electrophoresis to detect fluorescent tags that identify specific biological samples. Since the performance and reliability of these microfluidic chips are very sensitive to fluidic impedance, electromagnetic flux, and zeta potential, the microchannel dimensions, shape, and surface chemistry have to be tightly controlled during chip fabrication and use. This paper will present an overview of chip design, fabrication, and testing. Dimensional metrology data, surface chemistry characterization, and chip performance data will be discussed in detail.

Fabrication and characterization of polymer microfluidic devices for bio-agent detection

Sandia and Lawrence Livermore National Laboratories are developing a briefcase-sized, broad-spectrum bioagent detection system. This autonomous instrument, the BioBriefcase, will monitor the environment and warn against bacterium, virus, and toxin based biological attacks. At the heart of this device, inexpensive polymer microfluidic chips will carry out sample preparation and analysis. Fabrication of polymer microfluidic chips involves the creation of a master in etched glass; plating of the master to produce a nickel stamp; large lot chip replication by injection molding; and thermal chip sealing. Since the performance and reliability of microfluidic chips are very sensitive to fluidic impedance and to electromagnetic fluxes, the microchannel dimensions and shape have to be tightly controlled during chip fabrication. In this talk, we will present an overview of chip design and fabrication. Metrology data collected at different fabrication steps and the dimensional deviations of the polymer chip from the original design will be discussed.

Design and fabrication of a meso-scale stirling engine and combustor.

Power sources capable of supplying tens of watts are needed for a wide variety of applications including portable electronics, sensors, micro aerial vehicles, and mini-robotics systems. The utility of these devices is often limited by the energy and power density capabilities of batteries. A small combustion engine using liquid hydrocarbon fuel could potentially increase both power and energy density by an order of magnitude or more. This report describes initial development work on a meso-scale external combustion engine based on the Stirling cycle. Although other engine designs perform better at macro-scales, we believe the Stirling engine cycle is better suited to small-scale applications. The ideal Stirling cycle requires efficient heat transfer. Consequently, unlike other thermodynamic cycles, the high heat transfer rates that are inherent with miniature devices are an advantage for the Stirling cycle. Furthermore, since the Stirling engine uses external combustion, the combustor and engine can be scaled and optimized semi-independently. Continuous combustion minimizes issues with flame initiation and propagation. It also allows consideration of a variety of techniques to promote combustion that would be difficult in a miniature internal combustion engine. The project included design and fabrication of both the engine and the combustor. Two engine designs were developed. The first used a cylindrical piston design fabricated with conventional machining processes. The second design, based on the Wankel rotor geometry, was fabricated by through-mold electroforming of nickel in SU8 and LIGA micromolds. These technologies provided the requisite precision and tight tolerances needed for efficient micro-engine operation. Electroformed nickel is ideal for micro-engine applications because of its high strength and ductility. A rotary geometry was chosen because its planar geometry was more compatible with the fabrication process. SU8 lithography provided rapid prototypes to verify the design. A final high precision engine was created via LIGA. The micro-combustor was based on an excess enthalpy concept. Development of a micro-combustor included both modeling and experiments. We developed a suite of simulation tools both in support of the design of the prototype combustors, and to investigate more fundamental aspects of combustion at small scales. Issues of heat management and integration with the micro-scale Stirling engine were pursued using CFD simulations. We found that by choice of the operating conditions and channel dimensions energy conversion occurs by catalysis-dominated or catalysis-then-homogeneous phase combustion. The purpose of the experimental effort in micro-combustion was to study the feasibility and explore the design parameters of excess enthalpy combustors. The efforts were guided by the necessity for a practical device that could be implemented in a miniature power generator, or as a stand-alone device used for heat generation. Several devices were fabricated and successfully tested using methane as the fuel.