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Allan D. Weed

Axcelis Technologies

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Publication

Featured researches published by Allan D. Weed.

Archive | 2003

Work-piece treatment system having load lock and buffer

Robert J. Mitchell; Allan D. Weed; Richard Gueler

Archive | 2007

Workpiece gripping device

Joseph Gillespie; Alexander H. Slocum; Allan D. Weed

Archive | 1998

Lateral stress relief mechanism for vacuum bellows

Alexander Frazier Rockport Pless; Gary Jay Rosen; Allan D. Weed; Ernest Everett Jr. Rockport Allen; Victor Maurice Glouchester Benveniste; Perry J. I. Justesen

Archive | 2008

Bin transporter system

Brian C. Weed; Steven D. Weed; Allan D. Weed

Archive | 2011

HEATED ANNULUS CHUCK

William Davis Lee; Gary M. Cook; Perry J. I. Justesen; Ashwin M. Purohit; Robert D. Rathmell; Allan D. Weed

Archive | 2003

Alignment structure and method for mating a wafer delivery device to a wafer treatment tool

Steven D. Weed; Allan D. Weed

Archive | 2018

Multiple diameter in-vacuum wafer handling

Allan D. Weed

Archive | 2004

Wafer treatment system having load lock and buffer

Robert J. Mitchell; Allan D. Weed; Richard Gueler

Archive | 2018

ADJUSTABLE CIRCUMFERENCE ELECTROSTATIC CLAMP

Allan D. Weed

Archive | 2011

HEATED ELECTROSTATIC CHUCK INCLUDING MECHANICAL CLAMP CAPABILITY AT HIGH TEMPERATURE

Perry J. I. Justesen; Allan D. Weed; William Davis Lee; Ashwin M. Purohit; Robert D. Rathmell; Gary M. Cook

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Collaboration

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Perry J. I. Justesen

Axcelis Technologies

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Richard Gueler

Axcelis Technologies

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Robert J. Mitchell

Axcelis Technologies

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Steven D. Weed

Axcelis Technologies

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Alexander Frazier Rockport Pless

Axcelis Technologies

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Ashwin M. Purohit

Axcelis Technologies

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Ernest Everett Jr. Rockport Allen

Axcelis Technologies

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Gary M. Cook

Axcelis Technologies

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Robert D. Rathmell

Axcelis Technologies

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William Davis Lee

Axcelis Technologies

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