Amir Arbabi

Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission

Metasurfaces are planar structures that locally modify the polarization, phase and amplitude of light in reflection or transmission, thus enabling lithographically patterned flat optical components with functionalities controlled by design. Transmissive metasurfaces are especially important, as most optical systems used in practice operate in transmission. Several types of transmissive metasurface have been realized, but with either low transmission efficiencies or limited control over polarization and phase. Here, we show a metasurface platform based on high-contrast dielectric elliptical nanoposts that provides complete control of polarization and phase with subwavelength spatial resolution and an experimentally measured efficiency ranging from 72% to 97%, depending on the exact design. Such complete control enables the realization of most free-space transmissive optical elements such as lenses, phase plates, wave plates, polarizers, beamsplitters, as well as polarization-switchable phase holograms and arbitrary vector beam generators using the same metamaterial platform.

Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays

Flat optical devices thinner than a wavelength promise to replace conventional free-space components for wavefront and polarization control. Transmissive flat lenses are particularly interesting for applications in imaging and on-chip optoelectronic integration. Several designs based on plasmonic metasurfaces, high-contrast transmitarrays and gratings have been recently implemented but have not provided a performance comparable to conventional curved lenses. Here we report polarization-insensitive, micron-thick, high-contrast transmitarray micro-lenses with focal spots as small as 0.57 λ. The measured focusing efficiency is up to 82%. A rigorous method for ultrathin lens design, and the trade-off between high efficiency and small spot size (or large numerical aperture) are discussed. The micro-lenses, composed of silicon nano-posts on glass, are fabricated in one lithographic step that could be performed with high-throughput photo or nanoimprint lithography, thus enabling widespread adoption.

Multiwavelength polarization-insensitive lenses based on dielectric metasurfaces with meta-molecules

Metasurfaces are nano-structured devices composed of arrays of subwavelength scatterers (or meta-atoms) that manipulate the wavefront, polarization, or intensity of light. Like other diffractive optical devices, metasurfaces suffer from significant chromatic aberrations that limit their bandwidth. Here, we present a method for designing multiwavelength metasurfaces using unit cells with multiple meta-atoms, or meta-molecules. Transmissive lenses with efficiencies as high as 72% and numerical apertures as high as 0.46 simultaneously operating at 915 nm and 1550 nm are demonstrated. With proper scaling, these devices can be used in applications where operation at distinct known wavelengths is required, like various fluorescence microscopy techniques.

Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations

Optical metasurfaces are two-dimensional arrays of nano-scatterers that modify optical wavefronts at subwavelength spatial resolution. They are poised to revolutionize optics by enabling complex low-cost systems where multiple metasurfaces are lithographically stacked and integrated with electronics. For imaging applications, metasurface stacks can perform sophisticated image corrections and can be directly integrated with image sensors. Here we demonstrate this concept with a miniature flat camera integrating a monolithic metasurface lens doublet corrected for monochromatic aberrations, and an image sensor. The doublet lens, which acts as a fisheye photographic objective, has a small f-number of 0.9, an angle-of-view larger than 60° × 60°, and operates at 850 nm wavelength with 70% focusing efficiency. The camera exhibits nearly diffraction-limited image quality, which indicates the potential of this technology in the development of optical systems for microscopy, photography, and computer vision.

Measurements of the refractive indices and thermo-optic coefficients of Si 3 N 4 and SiO x using microring resonances

We present a method for determining the core and cladding refractive indices of a microring resonator from its measured quasi-transverse electric and magnetic resonant modes. We use single wavelength reflective microrings to resolve the azimuthal order ambiguity of the measured resonances. We perform accurate electromagnetic simulations to model the dependence of the resonances on geometrical and material parameters. We linearize the model and use the singular value decomposition method to find the best fit parameters for the measured data. At 1550 nm, we determine n(Si(3)N(4))=1.977±0.003 for stoichiometric silicon nitride deposited using low-pressure chemical vapor deposition (LPCVD) technique and n(SiO(x))=1.428±0.011 for plasma-enhanced chemical vapor deposition (PECVD) oxide. By measuring the temperature sensitivities of microring resonant modes with different polarizations, we find the thermo-optic coefficient of the stoichiometric silicon nitride to be dn(Si(3)N(4))/dT=(2.45±0.09)×10(-5) (RIU/°C) and the PECVD oxide to be dn(SiO(x))/dT=(0.95±0.10)×10(-5) (RIU/°C).

Detecting 20 nm Wide Defects in Large Area Nanopatterns Using Optical Interferometric Microscopy

Due to the diffraction limited resolution and the presence of speckle noise, visible laser light is generally thought to be impractical for finding deep subwavelength defects in patterned semiconductor wafers. Here, we report on a nondestructive low-noise interferometric imaging method capable of detecting nanoscale defects within a wide field of view using visible light. The method uses a common-path laser interferometer and a combination of digital image processing techniques to produce 70 μm by 27 μm panoramic phase and amplitude images of the test nanopattern. Significant noise reduction and high sensitivity are achieved, which enables successful detection of several different types of sparse defects with sizes on the order of 20 nm wide by 100 nm long by 110 nm tall.

Realization of a narrowband single wavelength microring mirror

We present a small footprint narrowband on-chip mirror made by integration of a distributed Bragg reflector (DBR) inside a microring resonator. The DBR covers half of the ring’s circumference and is only reflective at one of the ring resonances. Design, fabrication, and characterization of the proposed device are presented. A single reflection peak with maximum power reflectivity of 92.3% and full width at half maximum of 0.4 nm is demonstrated. The device has potential application as an in-line mirror for low-threshold, narrow linewidth single mode laser diodes.

Removing orientation-induced localization biases in single-molecule microscopy using a broadband metasurface mask

Nanoscale localization of single molecules is a crucial function in several advanced microscopy techniques, including single-molecule tracking and wide-field super-resolution imaging 1. To date, a central consideration of such techniques is how to optimize the precision of molecular localization. However, as these methods continue to push toward the nanometre size scale, an increasingly important concern is the localization accuracy. In particular, single fluorescent molecules emit with an anisotropic radiation pattern of an oscillating electric dipole, which can cause significant localization biases using common estimators 2-5. Here we present the theory and experimental demonstration of a solution to this problem based on azimuthal filtering in the Fourier plane of the microscope. We do so using a high efficiency dielectric metasurface polarization/phase device composed of nanoposts with sub-wavelength spacing 6. The method is demonstrated both on fluorophores embedded in a polymer matrix, and in dL5 protein complexes that bind Malachite green 7, 8.

Controlling the sign of chromatic dispersion in diffractive optics with dielectric metasurfaces

Diffraction gratings disperse light in a rainbow of colors with the opposite order than refractive prisms, a phenomenon known as negative dispersion [1, 2]. While refractive dispersion can be controlled via material refractive index, diffractive dispersion is fundamentally an interference effect dictated by geometry. Here we show that this fundamental property can be altered using dielectric metasurfaces [3-5], and we experimentally demonstrate diffractive gratings and focusing mirrors with positive, zero, and hyper negative dispersion. These optical elements are implemented using a reflective metasurface composed of dielectric nano-posts that provide simultaneous control over phase and its wavelength derivative. In addition, as a first practical application, we demonstrate a focusing mirror that exhibits a five fold reduction in chromatic dispersion, and thus an almost three times increase in operation bandwidth compared to a regular diffractive element. This concept challenges the generally accepted dispersive properties of diffractive optical devices and extends their applications and functionalities.

Multiwavelength metasurfaces through spatial multiplexing.

Metasurfaces are two-dimensional arrangements of optical scatterers rationally arranged to control optical wavefronts. Despite the significant advances made in wavefront engineering through metasurfaces, most of these devices are designed for and operate at a single wavelength. Here we show that spatial multiplexing schemes can be applied to increase the number of operation wavelengths. We use a high contrast dielectric transmittarray platform with amorphous silicon nano-posts to demonstrate polarization insensitive metasurface lenses with a numerical aperture of 0.46, that focus light at 915 and 1550 nm to the same focal distance. We investigate two different methods, one based on large scale segmentation and one on meta-atom interleaving, and compare their performances. An important feature of this method is its simple generalization to adding more wavelengths or new functionalities to a device. Therefore, it provides a relatively straightforward method for achieving multi-functional and multiwavelength metasurface devices.