Andre Aman Claudet

Design of a Silicon Micromachined Artifact for Hybrid Dimensional Measurement

We are developing calibration artifacts for mesoscale metrology (especially vision probing) by using silicon bulk micromachining. We evaluate these artifacts on both high accuracy coordinate measuring machines (CMMs) and on typical production vision-based measurement systems. This will improve the accuracy of vision-based measurement equipment used in production. Successful realization of these mesoscale artifacts will enhance both production metrology capabilities and reduce manufacturing costs.Copyright

Silicon Bulk Micromachined Hybrid Dimensional Artifact

A mesoscale dimensional artifact based on silicon bulk micromachining fabrication has been developed and manufactured with the intention of evaluating the artifact both on a high precision coordinate measuring machine (CMM) and video-probe based measuring systems. This hybrid artifact has features that can be located by both a touch probe and a video probe system with a k=2 uncertainty of 0.4 {micro}m, more than twice as good as a glass reference artifact. We also present evidence that this uncertainty could be lowered to as little as 50 nm (k=2). While video-probe based systems are commonly used to inspect mesoscale mechanical components, a video-probe systems certified accuracy is generally much worse than its repeatability. To solve this problem, an artifact has been developed which can be calibrated using a commercially available high-accuracy tactile system and then be used to calibrate typical production vision-based measurement systems. This allows for error mapping to a higher degree of accuracy than is possible with a glass reference artifact. Details of the designed features and manufacturing process of the hybrid dimensional artifact are given and a comparison of the designed features to the measured features of the manufactured artifact is presented and discussed. Measurement results from vision and touch probe systems are compared and evaluated to determine the capability of the manufactured artifact to serve as a calibration tool for video-probe systems. An uncertainty analysis for calibration of the artifact using a CMM is presented.