Andreas Seifert

Completely integrated, thermo-pneumatically tunable microlens

An integrated tunable microlens, whose focal length may be varied over a range of 3 to 15 mm with total power consumption below 250 mW, is presented. Using thermo-pneumatic actuation, this adaptive optical microsystem is completely integrated and requires no external pressure controllers for operation. The lens system consists of a liquid-filled cavity bounded by a distensible polydimethyl-siloxane membrane and a separate thermal cavity with actuation and sensing elements, all fabricated using silicon, glass and polymers. Due to the physical separation of thermal actuators and lens body, temperature gradients in the lens optical aperture were below 4 °C in the vertical and 0.2 °C in the lateral directions. Optical characterization showed that the cutoff frequency of the optical transfer function, using a reference contrast of 0.2, varied from 30 lines/mm to 65 lines/mm over the tuning range, and a change in the numerical aperture from 0.067 to 0.333. Stable control of the focal length over a long time period using a simple electronic stabilization circuit was demonstrated.

Fiber optic tunable probe for endoscopic optical coherence tomography

A novel miniaturized fiber optic tunable endoscopic probe based on a pneumatically actuated micro-lens is presented. The probe has a diameter of ∼4 mm and is integrated into a time-domain optical coherence tomography (OCT) system. The integration of the tunable lens with the OCT system leads to a uniformly high lateral resolution and high contrast of the OCT images over the entire scan depth. In addition, the tunable probe can be considered as a platform for integrating multiple microsystems, including particularly scanning micro-mirrors, in a single high-performance endoscopic OCT system.

Scanning and Tunable Micro-Optics for Endoscopic Optical Coherence Tomography

The design, fabrication, and integration of micro-optical components for beam focus and steering are demonstrated in an endoscopic optical coherence tomography (OCT) system. The relevant components, a membrane-based microfluidic tunable microlens and an electrostatic 2-D scanning micromirror, are fabricated using silicon and polymer-based microelectromechanical system technologies. All components are assembled inside a 4.5 μm diameter probe. The design of the optical system, including substantiation of the need for focal length tunability, is presented, along with performance data of an OCT system using these components. A lateral resolution of about 13 μm is achieved, an improvement over fixed-focal length probes. Due to the miniaturization of the measurement head achievable using this optical microsystem, use in conventional endoscopes is possible.

Stretchable optoelectronic circuits embedded in a polymer network.

Stretchable optoelectronic circuits, incorporating chip-level LEDs and photodiodes in a silicone membrane, are demonstrated. Due to its highly miniaturized design and tissue-like mechanical properties, such an optical circuit can be conformally applied to the epidermis and be used for measurement of photoplethysmograms. This level of optical functionality in a stretchable substrate is potentially of great interest for personal health monitoring.

Tunable hyperchromatic lens system for confocal hyperspectral sensing

A new approach for confocal hyperspectral sensing based on the combination of a diffractive optical element and a tunable membrane fluidic lens is demonstrated. This highly compact lens system is designed to maximize the longitudinal chromatic aberration and select a narrow spectral band by spatial filtering. Changing the curvature of the fluidic lens allows the selected band to be scanned over the whole given spectrum. A hybrid prototype with an integrated electro-magnetic micro-actuator has been realized to demonstrate the functionality of the system. Experimental results show that the spectrum transmitted by the system can be tuned over the entire visible wavelength range, from 450 to 900 nm with a narrow and almost constant linewidth of less than 15 nm. Typical response time for scanning the spectrum by 310 nm is less than 40 ms and the lens system shows a highly linear relationship with the driving current.

An implantable optical blood pressure sensor based on pulse transit time

An implantable sensor system for long-term monitoring of blood pressure is realized by taking advantage of the correlation between pulse transit time and blood pressure. The highly integrated implantable sensor module, fabricated using MEMS technologies, uses 8 light emitting diodes (LEDs) and a photodetector on chip level. The sensor is applied to large blood vessels, such as the carotid or femoral arteries, and allows extravascular measurement of highly-resolved photoplethysmograms. In addition, spectrophotometric approaches allow measurement of hemoglobin derivatives. For the calibration of blood pressure measurements, the sensor system has been successfully implemented in animal models.

Highly compact imaging using Bessel beams generated by ultraminiaturized multi-micro-axicon systems

Employing Bessel beams in imaging takes advantage of their self-reconstructing properties to achieve small focal points while maintaining a large depth of focus. Bessel beams are efficiently generated using axicons, and their utility in scanning imaging systems, such as optical coherence tomography (OCT), has been demonstrated. As these systems are miniaturized to allow, for example, endoscopic implementations, micro-axicons are required to assure the maintenance of a large depth of focus. We demonstrate here the design, fabrication, and application of molded micro-axicons for use in silicon-based micro-optical benches. It is shown that arrangements of multiple convex and concave axicons may be implemented to optimize the depth of focus in a miniaturized OCT system, using a telescopic optical arrangement of considerably shorter optical system length than that achievable with classical micro-optics.

Polymer/Silicon Hard Magnetic Micromirrors

Extremely compact hard magnetic micromirrors are realized using a combination of silicon and polymer microelectromechanical systems technologies. Due to their hard magnetic properties, the mirrors may achieve high deflection angles with the application of very low magnetic fields, a few microteslas, which may be generated by means of miniaturized microcoils. Since no electrical wiring is required for the mirrors, they may be mounted on rotating platforms and thus used for complete circumferential scanning, as required, for example, in optical endoscopic diagnostics.

Chromatic aberration control for tunable all-silicone membrane microlenses

Tunable multi-chamber microfluidic membrane microlenses with achromaticity over a given focal length range are demonstrated. In analogy to a fixed-focus achromatic doublet lens, the multi-lens system is based on a stack of microfluidic cavities filled with optically optimized liquids with precisely defined refractive index and Abbe number, and these are independently pneumatically actuated. The membranes separating the cavities form the refractive optical surfaces, and the curvatures as a function of pressure are calculated using a mechanical model for deformation of flexible plates. The results are combined with optical ray tracing simulations of the multi-lens system to yield chromatic aberration behavior, which is verified experimentally. A focal length tuning range of 5-40 mm and reduction in chromatic aberration of over 30% is demonstrated, limited by the availability of optical fluids.

In vivo monitoring of glial scar proliferation on chronically implanted neural electrodes by fiber optical coherence tomography.

In neural prosthetics and stereotactic neurosurgery, intracortical electrodes are often utilized for delivering therapeutic electrical pulses, and recording neural electrophysiological signals. Unfortunately, neuroinflammation impairs the neuron-electrode-interface by developing a compact glial encapsulation around the implants in long term. At present, analyzing this immune reaction is only feasible with post-mortem histology; currently no means for specific in vivo monitoring exist and most applicable imaging modalities can not provide information in deep brain regions. Optical coherence tomography (OCT) is a well established imaging modality for in vivo studies, providing cellular resolution and up to 1.2 mm imaging depth in brain tissue. A fiber based spectral domain OCT was shown to be capable of minimally invasive brain imaging. In the present study, we propose to use a fiber based spectral domain OCT to monitor the progression of the tissues immune response through scar encapsulation progress in a rat animal model. A fine fiber catheter was implanted in rat brain together with a flexible polyimide microelectrode in sight both of which acts as a foreign body and induces the brain tissue immune reaction. OCT signals were collected from animals up to 12 weeks after implantation and thus gliotic scarring in vivo monitored for that time. Preliminary data showed a significant enhancement of the OCT backscattering signal during the first 3 weeks after implantation, and increased attenuation factor of the sampled tissue due to the glial scar formation.