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Andreas Tillmann

AST

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Publication

Featured researches published by Andreas Tillmann.

Archive | 1995

Method and apparatus for wavevector selective pyrometry in rapid thermal processing systems

Zsolt Nenyei; Andreas Tillmann; Heinrich Walk

Archive | 1995

Modified reaction chamber and improved gas flushing method in rapid thermal processing apparatus

Zsolt Nenyei; Helmut Merkle; Andreas Tillmann

Archive | 1994

Verfahren und Vorrichtung für wellenvektorselektive Pyrometrie in Schnellheizsystemen

Zsolt Nenyei; Andreas Tillmann; Heinrich Walk

Journal of Electronic Materials | 1998

Transient thermal behavior in a new RTP chamber

Andreas Tillmann; U. Kreiser; P. Munzinger; S. Frigge; S. Buschbaum; P. Schmid; D. Loeffelmacher; M. Merkwitz; T. Theilig

Archive | 1994

Modified reaction chamber for rapid heating system

Zsolt Nenyei; Helmut Merkle; Andreas Tillmann

Journal of Electronic Materials | 1999

Temperature uniformity optimization for a Silicon implant anneal into GaAs using Opus simulation software

Zaid Farukhi; Helmut Francz; Steven Marcus; Andreas Tillmann; Juergen Niess; Martin Drechsler

Archive | 1994

A method for wavevector selective pyrometry in rapid heating systems

Zsolt Nenyei; Andreas Tillmann; Heinrich Walk

Archive | 1994

Reaction chamber of a rapid heating system for the Kurzzeittemperung of semiconductor wafers and methods for purging the reaction chamber

Zsolt Nenyei; Helmut Merkle; Andreas Tillmann

Archive | 1994

Reaktionskammer eines Schnellheizsystems für die Kurzzeittemperung von Halbleiterscheiben und Verfahren zum Spülen der Reaktionskammer Reaction chamber of a rapid heating system for the Kurzzeittemperung of semiconductor wafers and methods for purging of the reaction chamber

Zsolt Nenyei; Helmut Merkle; Andreas Tillmann

Archive | 1994

Verfahren für wellenvektorselektive Pyrometrie in Schnellheizsystemen Method for selective wave vector pyrometry in Quick heating systems

Zsolt Nenyei; Andreas Tillmann; Heinrich Walk

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Helmut Francz

Motorola

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Steven Marcus

Motorola

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