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Andreas Zauner

Air Liquide

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Publication

Featured researches published by Andreas Zauner.

Archive | 2010

Dihalide germanium(II) precursors for germanium-containing film depositions

Julien Gatineau; Andreas Zauner; Hana Ishii

Archive | 2009

METHOD FOR FORMING A TITANIUM-CONTAINING LAYER ON A SUBSTRATE USING AN ATOMIC LAYER DEPOSITION (ALD) PROCESS

Satoko Gatineau; Christian Dussarrat; Christophe Lachaud; Nicolas Blasco; Audrey Pinchart; Ziyun Wang; Jean-Marc Girard; Andreas Zauner

Archive | 2013

TANTALUM-ORGANIC COMPOUNDS AND THEIR USE FOR THIN FILMS DEPOSITION

Anthony Correia-Anagleto; Vanina Lahootun; Andreas Zauner

Archive | 2009

Niobium and vanadium organometallic precursors for thin film deposition

Nicolas Blasco; Anthony Correia-Anacleto; Audrey Pinchart; Andreas Zauner

Archive | 2010

Metal compounds for deposition of chalcogenide films at low temperature

Nicolas Blasco; Julien Gatineau; Jean-Marc Girard; Vanina Lahootun; Shingo Okubo; Andreas Zauner

Archive | 2009

Method of forming a tantalum-containing layer on a substrate

Nicolas Blasco; Anthony Correia-Anacleto; Audrey Pinchart; Andreas Zauner; Ziyun Wang

Archive | 2014

Novel dithiocarbamate niobium organic precursors and their use for vapor phase deposition of niobium containing films

Anacleto Antony Correia; Christophe Lachaud; Audrey Pinchart; Andreas Zauner

Archive | 2014

Niobium organic precursors and their use for vapor phase deposition of niobium containing films

Anacleto Antony Correia; Christophe Lachaud; Audrey Pinchart; Andreas Zauner

Archive | 2014

Tantalum organic precursors and their use for vapor phase deposition of tantalum containing films

Anacleto Antony Correia; Christophe Lachaud; Audrey Pinchart; Andreas Zauner

Archive | 2013

Niobium-Komplexe und deren Verwendung in einem Verfahren zur Herstellung einer Niobium-enthaltenden Schicht auf einem Substrat

Christophe Lachaud; Anacleto Antony Correia; Vanina Lahootun; Andreas Zauner

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Collaboration

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Audrey Pinchart

Air Liquide

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Christophe Lachaud

Air Liquide

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Nicolas Blasco

Air Liquide

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Vanina Lahootun

Air Liquide

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Anacleto Antony Correia

Air Liquide

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Anthony Correia-Anacleto

Air Liquide

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Jean-Marc Girard

Air Liquide

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Julien Gatineau

Air Liquide

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Ziyun Wang

Air Liquide

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Christian Dussarrat

Air Liquide

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