Andy Engel

Microstructuring of various materials using femtosecond laser pulses

Comprehensive results on femtosecond-laser microstructuring of silicon, tungsten carbide hard metal, fused silica and Pyrex glass using a Ti: Sapphire-Laser with regenerative amplifier are presented. Based on our studies of the ablation behaviour of those materials in dependence of the laser parameters three-dimensional microstructures have been produced and characterized by scanning electron microscopy. The quality of those microstructures that could be obtained for each material will be shown and discussed.Comprehensive results on femtosecond-laser microstructuring of silicon, tungsten carbide hard metal, fused silica and Pyrex glass using a Ti: Sapphire-Laser with regenerative amplifier are presented. Based on our studies of the ablation behaviour of those materials in dependence of the laser parameters three-dimensional microstructures have been produced and characterized by scanning electron microscopy. The quality of those microstructures that could be obtained for each material will be shown and discussed.

Using a camera feedback loop for phase retrieval in an iterative Fourier transform algorithm to calculate beam splitter phase gratings for parallel laser microstructuring (Conference Presentation)

We are going to present an iterative Fourier transformation algorithm (IFTA) based computation-method for Phase retrieval of beam splitter elements. The power distribution between the separate beamlets will be controlled via a camera feedback loop in order to create an output distribution which is more closely fitted to the desired distribution than by solely virtual computation. It is taken into account, that by doing so the computation time will rise. Furthermore, we will show some parallel micro structuring examples with femtosecond laser beams utilizing this algorithm. All experiments will be conducted with imaging close to the resolution limit.