Anthony Sayka
VLSI Technology
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Anthony Sayka.
Computer Integrated Manufacturing Systems | 1997
Danine Villarreal; Anthony Sayka
A collision avoidance technique is provided in an automated semiconductor wafer processing system, wherein a magnet or magnetic strip is incorporated into each boat or carrier used to hold and transport the semiconductor wafers during the IC fabrication process. Additionally, a magnetic field sensing device is incorporated into the robotic arm of the system for sensing the presence of magnetic fields generated by the magnet(s) incorporated into the boats and/or carriers. Using this system, it is possible for the automated system controller to determine whether an imminent collision is about to occur by monitoring changes in the detected magnetic field. In this way, collisions between one boat/carrier and a second boat/carrier may be anticipated and avoided without relying upon physical contact between the two objects in order to detect collision.
Archive | 1995
Anthony Sayka; Robert J. Rocks
Archive | 1992
Anthony Sayka; Mohammad A. Siddiqui
Archive | 1992
Allen Page; Anthony Sayka
Archive | 1993
Anthony Sayka
Archive | 1993
Anthony Sayka
Archive | 1992
Anthony Sayka; Stacy W. Hall; Judy U. Galloway; Pierre Leroux; Bryan D. Schmidt; Daniel D. Siems; Henry B. Taylor; Edward R. Vokoun
Archive | 1992
Anthony Sayka; Allen Page
Archive | 1994
Anthony Sayka; Patricia A. Vargas
Archive | 1992
Anthony Sayka