Antonín Rek

Study of Carbon Films on Silicon Substrates

Carbon based films on silicon substrates have been studied by high resolution FE SEM equipped by an EDS analyzer. The first type are carbon nanotube (CNT) [1] films prepared on Si/SiO2 substrates with Ni or Fe layers by radiofrequency plasma chemical vapor deposition. Dependence of nanotube films properties on Ni and Fe thickness and deposition conditions have been studied. The second type of films discussed are microcrystalline and nanocrystalline diamond films grown on pre-treated Si substrates by microwave plasma chemical vapor deposition (MPCVD). The pre-treatment was varied and its effect on diamond films was studied.

High Resolution Imaging by Means of Backscattered Electrons in the Scanning Electron Microscope

This paper deals with imaging by means of backscattered electrons in the high resolution scanning electron microscopy. Possible backscattered electrons detection systems are outlined and one of the most efficient, the high take of angle single crystal scintillation detector, is described in detail. Its advantages and disadvantages are discussed and the comparison with the secondary electron detection modes is shown. The high resolution micrographs taken by the backscattered electron detector as well as by the secondary electron detectors are displayed.