Antonio Iula

An accurate model for capacitive micromachined ultrasonic transducers

Modeling of capacitive micromachined ultrasonic transducers (cMUTs) is based on a two-port network with an electrical and a mechanical side. To obtain a distributed model, a solution of the differential equation of motion of the diaphragm for each element of the transducer has to be found. Previous works omit the mechanical load of the cavity behind the diaphragm, i.e., the effect of the gas inside. In this paper, we propose a distributed model for cMUTs that takes this effect into account. A closed-form solution of the mechanical impedance of the membranes has been obtained, including the effect of the restoring forces because of the stiffness of the membrane and because of the compression of the air in the cavity. Simulation results based on the presented model are compared with the experimental data for two types of cMUTs reported in the recent literature. It is demonstrated that the compression of the air has a significant effect on the fundamental frequency of the air transducer, with a deviation of about 22% from the prediction of a model that does not consider the interaction between the vibrating diaphragm and the air cushion.

Design, fabrication and characterization of a capacitive micromachined ultrasonic probe for medical imaging

In this paper we report the design, fabrication process, and characterization of a 64-elements capacitive micromachined ultrasonic transducer (cMUT), 3 MHz center frequency, 100% fractional bandwidth. Using this transducer, we developed a linear probe for application in medical echographic imaging. The probe was fully characterized and tested with a commercial echographic scanner to obtain first images from phantoms and in vivo human body. The results, which quickly follow similar results obtained by other researchers, clearly show the great potentiality of this new emerging technology. The cMUT probe works better than the standard piezoelectric probe as far as the axial resolution is concerned, but it suffers from low sensitivity. At present this can be a limit, especially for in depth operation. But we are strongly confident that significant improvements can be obtained in the very near future to overcome this limitation, with a better transducer design, the use of an acoustic lens, and using well matched, front-end electronics between the transducer and the echographic system.

A high-power traveling wave ultrasonic motor

In the present work, a traveling wave ultrasonic motor (TWUSM) is proposed. It is composed of an annular-shaped stator and two cone-shaped rotors that are pressed in contact to the borders of the inner surface of the stator. A rotating traveling wave has been generated in the stator by using as vibration generators two bolted Langevin transducers (BLT) opportunely shifted in space and in time. The vibrational behavior of the stator as well as the traveling wave generation has been simulated with the finite-element method (FEM) software. A prototype of the motor has been manufactured and experimentally characterized. It exhibits a static torque of about 0.8 N·m and a maximum angular speed of about 300 rpm. Possible variations of the present design aimed to increase output torque or minimize encumbrance are described and discussed.

Finite element three-dimensional analysis of the vibrational behaviour of the Langevin-type transducer

The vibrational behaviour of the Langevin transducer is usually analysed using 1D Mason model which is valid when the lateral dimensions of the transducer are smaller than a quarter wavelength at the fundamental longitudinal resonance. In this work a 3D finite element analysis of the Langevin transducers behaviour operating in the underwater sonar range of frequencies (30-140 kHz) is presented. Several samples with total length greater, comparable to, and smaller than the diameter of the transducer are analysed. For each sample, the resonance frequencies in the observed frequency range are computed and compared with those obtained experimentally from the measurements carried out using several in-house built prototypes. For the most important aspect ratios the resonance displacement distributions are presented and discussed. The results obtained permit to gain insight into the coupling phenomenon between thickness-extensional and radial modes and suggest that in practical applications transducers with diameters comparable to or greater than total length of the active stack can also be used. The trade-off between the efficiency and power handling ability for different designs is also discussed.

A model for the theoretical characterization of thin piezoceramic rings

This work describes a matrix model of the radial mode of a thin piezoceramic ring capable of predicting the dynamic behavior when the two main surfaces are stress free, while the lateral, inner, and outer are loaded by an external medium. The ring is modeled as a three-port system with two mechanical ports and one electrical port. With this approach it is easy to compute the resonance frequency spectrum, the radial displacement, and the electric impedance of a thin ring. Good agreement between the computed and the measured electric impedance is found. The resonance frequency spectrum is computed as a function of the inner-to-outer radius ratio G: when the inner radius vanishes, the resonances of the ring coincide with those of a disk, while, increasing G up to one, the first-mode frequencies decrease approaching the value obtained with a lumped mode model. The frequencies of the higher-order modes, on the other hand, increase to infinity, justifying the lumped mode approximation. The spatial distribution of the displacement in the radial direction is also computed; it has a Bessel function shape which, as expected, becomes linear by increasing the inner radius. Finally, the behavior of the effective coupling factor k/sub eff/ with G is examined. It is shown that, when G/spl rarr/1, k/sub eff/ approaches the material coupling factor k/sub 31/, while when G/spl rarr/0, k/sub eff/ is proportional to the planar coupling factor k/sub p/. Further it is shown that for G>0.6, the approximation of the ring to a lumped mode system is quite acceptable.

A new low voltage piezoelectric micromotor based on stator precessional motion

In this work a piezoelectric motor is described whose stator is composed of a cylindrical steel axle fitted at the center of a thin piezoelectric membrane. The rotor consists of a cylindrical permanent magnet, pressed in contact with the top surface of the axle, by means of magnetic forces. A travelling wave, at the natural flexural vibration of the thin piezoelectric membrane, is excited via the piezoelectric effect. The vertical displacement of the membrane is geometrically amplified by the central axle, obtaining a wide precessional motion of the axle. On this motion is based the transmission mechanism of the proposed motor. The motor is able to give a relatively high speed (/spl ap/3500 rpm) and torque (1.8/spl middot/10/sup -5/ N/spl middot/m) by using a commercial piezoelectric membrane (diameter 32 mm, thickness 0.2 mm), driven at relatively low voltage (18 V P-P). The very small thickness of the stator makes this motor suitable for microsystem applications. A simple analytical model of the transmission mechanism is discussed, and the predicted results are compared with experimental measurements, with a satisfactory agreement.

An approximated 3-D model of cylinder-shaped piezoceramic elements for transducer design

In this paper an approximated 3-D model of cylinder shaped piezoceramics is described. In the hypothesis of axial symmetry, the element vibration in the extensional and radial directions is described by two coupled differential wave equations. The model is obtained choosing, as solution of these equations, two orthogonal wave functions, each depending only on one axis, corresponding to the propagation direction. The mechanical boundary conditions are applied imposing continuity between the stresses and the external forces on the surfaces of the element in an integral way, while, as far as the electrical boundary condition is concerned, two possibilities are explored: to neglect the piezoelectric constant in the transverse direction and to impose an integral condition also for the electric field. Comparisons with experimental results show this last approach to give better results. The model predicts with sufficient accuracy only the first radial and the first thickness modes of the cylinder-shaped piezoceramic element of arbitrary aspect ratio; but, for these modes, it is able to compute all the relations between the input applied voltage and the output forces and velocities on every external surface. Because only these two modes are of relevance in the practical applications of piezoceramic elements as ultrasonic transducers, the model can be used as a simple and useful tool in transducer design and optimization. Experimental validations of the model are also shown in the work.

A piezoelectric motor using flexural vibration of a thin piezoelectric membrane

This paper describes a new implementation of a disk-type piezoelectric motor, whose stator is a commercial available piezomembrane composed of a nickel alloy disk to which a piezoceramic disk is bonded. The two disks are concentric, and the total thickness is very small. Ultrasonic motors are based on the concept of driving a rotor by mechanical vibration excited on a stator, via the piezoelectric effect. The rotor is in contact with the stator, and the driving force is the frictional force between rotor and stator. To transform the mechanical vibration of the stator in the rotor rotation, a traveling wave must be excited on the stator surface. The proposed motor can be regarded as a disk-type, single wavelength motor in which the traveling wave is due to the natural flexural vibration of the piezomembrane at low frequency. The behavior of the stator is analyzed both theoretically, by using the theory of isotropic and homogeneous vibrating plates, and by means of a commercial finite element computer code, finding a good agreement with the experimental results. The main features of the motor are very small thickness, appreciable torque, and high speed, obtained with low input power at low voltage; the intended application is to substitute the moving-coil in analogic instrumentation.

An approximated 3-D model of the Langevin transducer and its experimental validation

In this work, an approximated 3-D analytical model of the Langevin transducer is proposed. The model, improving the classical 1-D approach describing the thickness extensional mode, allows us to predict also the radial modes of both the piezoelectric ceramic disk and the loading masses; furthermore, it is able to describe the coupling between radial and thickness extensional modes. In order to validate the model, the computed frequency spectrum is compared with that obtained by measurements carried out on 13 manufactured samples of different thicknesses to diameter ratios. The comparison shows that the model predicts with quite good accuracy the resonance frequencies of the two lowest frequency modes, i.e., those of practical interest, all over the explored range. Finally, the coupling effect between thickness and radial modes on the frontal displacement is measured and discussed.

A new approach for the design of ultrasono-therapy transducers

In this paper we describe a new approach for the design of ultrasono-therapy transducers. Usually, in this kind of transducer, a /spl lambda//2 front plate is inserted only in order to ensure a good mechanical protection of the active crystal from the surrounding medium. However, with an accurate design, the plate can also be used to match the piezoelectric element to the load both in terms of gain and bandwidth. To this end we apply the technique normally used in acoustical imaging and nondestructive testing, and, by means of a distributed matrix model, we optimize the thickness and impedance of the plate in order to obtain a strong response and a large bandwidth at the working frequency. Using a front plate of thickness about /spl lambda//3, the model predicts better performances than the ones obtained with the classical design, also in terms of efficiency. An experimental comparison between a transducer realized according to the proposed design and a commercial half wave transducer shows better performances the former and therefore validates the new design criterion.