Antti Lassila

Calibration of a commercial AFM: traceability for a coordinate system

Traceability of measurements and calibration of devices are needed also at the nanometre scale. Calibration of a commercial atomic force microscope (AFM) was studied as part of a dimensional nanometrology project at MIKES. The calibration procedure and results are presented here. The metrological properties of the AFM were characterized by several measurements. A method developed to calibrate the z scale by a laser interferometer during a normal measurement mode of an AFM is presented. x and y movements were studied with a laser interferometer and the scales were also calibrated using a calibration grid, which was calibrated at MIKES using a laser diffraction method. The advantages and disadvantages of the two methods are discussed. Orthogonalities of the axes were determined by calibration grids and an error separation method. Out-of-plane deviation was measured with a flatness standard. Uncertainty estimates for the coordinate system of the AFM scanner are presented.

Frequency stabilization of a diode-pumped Nd:Yag laser at 532 nm to iodine by using third-harmonic technique

A compact frequency standard was constructed by stabilizing the frequency of a diode-pumped Nd:YAG laser to the Doppler-free spectrum of iodine at 532 nm. The results show that by using standard third-harmonic locking technique good stability can be achieved in a relatively small, simple and inexpensive set-up.

An AC Josephson Voltage Standard for AC–DC Transfer-Standard Measurements

We describe the traceability chain of length measurements at Centre for Metrology and Accreditation (MIKES) from atomic clocks to the lasers of primary interferometers. Crucial part of the traceability chain, an optical frequency comb generator linking optical frequencies to atomic clocks, is described in detail. The frequency comb generator is used in frequency calibrations of iodine-stabilized lasers, which are operated in compliance with the recommendations of the practical realization of the definition of the meter. Measured absolute frequencies of iodine-stabilized lasers, time records of the measurements, and the respective Allan deviations demonstrate the solid performance of the MIKES laser frequency standards. The results are in good agreement with the recommended values, as well as with the independent characterizations of the measured lasers

A new optical method for high-accuracy determination of aperture area

We have developed a direct optical method for aperture area measurement, based on constant, known irradiance over the aperture. The method is described and results of test measurements are given, including wavelength dependence of the effective aperture area. Systematic uncertainty components are studied experimentally to reach a relative uncertainty of 10-4 for aperture sizes down to 3 mm in diameter. The most important advantages of the direct optical method are that it does not require any reference aperture, it can be applied to apertures of any shape, and the calibration setup is similar to the actual use of the apertures in filter radiometers.

Traceability of Laser Frequency Calibrations at MIKES

We describe the traceability chain of length measurements at Centre for Metrology and Accreditation (MIKES) from atomic clocks to the lasers of primary interferometers. Crucial part of the traceability chain, an optical frequency comb generator linking optical frequencies to atomic clocks, is described in detail. The frequency comb generator is used in frequency calibrations of iodine-stabilized lasers, which are operated in compliance with the recommendations of the Practical Realization of the Definition of the Meter. Measured absolute frequencies of iodine-stabilized lasers, time records of the measurements, and the respective Allan deviations demonstrate the solid performance of the MIKES laser frequency standards. The results are in good agreement with the recommended values, as well as with the independent characterizations of the measured lasers.

A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor

This paper describes methods for dynamic measurement and correction of laser interferometer periodic nonlinearity down to the picometre level. A capacitive sensor is used as an external reference for measuring and calculating the periodic interferometer nonlinearity correction function. The experimental interferometer setup is a heterodyne interferometer with symmetrical paths to detectors and time-interval-based phase detection. The periodic nonlinearity is represented as harmonic Fourier components. The time evolution of the nonlinearity function is tracked during measurement. The method is verified by spatial and temporal repeatability of the measured nonlinearity. Linearization repeatability in the 10 pm range is observed.

High-precision diode-laser-based temperature measurement for air refractive index compensation

We present a laser-based system to measure the refractive index of air over a long path length. In optical distance measurements, it is essential to know the refractive index of air with high accuracy. Commonly, the refractive index of air is calculated from the properties of the ambient air using either Ciddor or Edlén equations, where the dominant uncertainty component is in most cases the air temperature. The method developed in this work utilizes direct absorption spectroscopy of oxygen to measure the average temperature of air and of water vapor to measure relative humidity. The method allows measurement of temperature and humidity over the same beam path as in optical distance measurement, providing spatially well-matching data. Indoor and outdoor measurements demonstrate the effectiveness of the method. In particular, we demonstrate an effective compensation of the refractive index of air in an interferometric length measurement at a time-variant and spatially nonhomogeneous temperature over a long time period. Further, we were able to demonstrate 7 mK RMS noise over a 67 m path length using a 120 s sample time. To our knowledge, this is the best temperature precision reported for a spectroscopic temperature measurement.

Acoustic method for determination of the effective temperature and refractive index of air in accurate length interferometry

An acoustic method for the measurement of the effective tem- perature and refractive index of air for precision length interferometry is described. The method can be used to improve the accuracy of interfero- metric length measurements outside the best laboratory conditions and also in industrial conditions. The method is based on the measurement of speed of 50-kHz ultrasound over the same distance measured with a laser interferometer. The measured speed of ultrasound is used to define the effective temperature or the refractive index of air along the laser beam path using the equations presented. The measured speed of sound, Cramer equation, dispersion correction, and Edlen equations are used in the fitting of new equations for the effective air temperature and refractive index of air as a function of speed of 50-kHz ultrasound. The standard uncertainties of the effective temperature and the refractive index of air equations are 15 mK and 1.7310 28 , respectively. The un- certainties of the effective temperature and refractive index of air mea- sured with the test setup for distances of about 5 m are 25 mK and 2.6 310 28 , respectively.

Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological atomic force microscope

Gratings and step height standards are useful transfer standards for lateral and vertical length scale calibration of atomic force microscopes (AFMs). In order to have traceability to the SI-meter, the standards must have been calibrated prior to use. Metrological AFMs (MAFMs) with online laser interferometric position measurements are versatile instruments for the calibrations. The developed task-specific measurement strategies for step height and pitch calibrations with the Centre for Metrology and Accreditations (MIKESs) metrological AFM are described. The strategies were developed to give high accuracy and to reduce measurement time. Detailed uncertainty estimations for step height and grating pitch calibrations are also given. Standard uncertainties are 0.016 and 0.018 nm for 300 and 700 nm pitch standards, respectively, and 0.21 and 0.44 nm for 7 and 1000 nm step height standards.

Final report on EUROMET.L-S15.a (EUROMET Project 925): Intercomparison on step height standards and 1D gratings

Measurements have been made at five national metrology institutes (NMIs) in the subject field of dimensional measurement using scanning probe microscopy. Four of the participating NMIs are in Europe, the fifth is in the Asia-Pacific region. Each NMI made measurements of four step height standards and two 1D grating standards. These are typical artefact standards used for dimensional nanometrology. Each participant used a different atomic force microscope to perform the measurements. The report lists the results obtained by the individual participants, as well as an analysis of the results and their uncertainties, based on calculation of the weighted means and En values. The results are in good agreement with one another. Main text. To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/. The final report has been peer-reviewed and approved for publication by EURAMET, according to the provisions of the CIPM Mutual Recognition Arrangement (MRA).