Armin Leitel
Carl Zeiss AG
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Publication
Featured researches published by Armin Leitel.
Commercial Applications of Precision Manufacturing at the Sub-Micron Level | 1992
Volkmar Giggel; Armin Leitel
For high-resolution optical imaging systems used in photolithography, lenses with diameters up to 200 mm and surface accuracies of about 25 nm are required. To realize an economic production of such elements, a computer-controlled polishing following classical techniques has been developed. Applications in the laboratory and production spheres are presented for components made from Zerodur, optical glasses and calcium fluoride.
Archive | 2004
Armin Leitel; Ralf Dr. Waldhäusl; Peter Schreiber; Uwe D. Zeitner
Archive | 1996
Andreas Dipl Ing Fischer; Armin Leitel; Reiner Dr Ing Hofmann; Knut Hage
Archive | 1997
Andreas Dipl Ing Fischer; Reiner Dr Ing Hofmann; Armin Leitel
Archive | 2004
Armin Leitel; Eberhard Piehler
Archive | 2004
Erik Beckert; Christoph Dipl.-Ing. Damm; Gerhard Dr. Kalkowski; Armin Leitel
Archive | 1998
Andreas Dipl Ing Fischer; Armin Leitel; Reiner Dr Ing Hofmann
Archive | 2005
Armin Leitel; Mathias Schulz
Archive | 2005
Armin Leitel; Ralf Dr. Waldhäusl; Peter Dr. Schreiber; Uwe Detlef Zeitner
Archive | 1998
Bernhard Dipl Phys Retschke; Wolfgang Holota; Armin Leitel