Arne Leinse

Ultra-low-loss high-aspect-ratio Si3N4 waveguides

We characterize an approach to make ultra-low-loss waveguides using stable and reproducible stoichiometric Si3N4 deposited with low-pressure chemical vapor deposition. Using a high-aspect-ratio core geometry, record low losses of 8-9 dB/m for a 0.5 mm bend radius down to 3 dB/m for a 2 mm bend radius are measured with ring resonator and optical frequency domain reflectometry techniques. From a waveguide loss model that agrees well with experimental results, we project that 0.1 dB/m total propagation loss is achievable at a 7 mm bend radius with this approach.

Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding

We demonstrate a wafer-bonded silica-on-silicon planar waveguide platform with record low total propagation loss of (0.045 ± 0.04) dB/m near the free space wavelength of 1580 nm. Using coherent optical frequency domain reflectometry, we characterize the group index, fiber-to-chip coupling loss, critical bend radius, and propagation loss of these waveguides.

Silicon nitride microwave photonic circuits.

We present an overview of several microwave photonic processing functionalities based on combinations of Mach-Zehnder and ring resonator filters using the high index contrast silicon nitride (TriPleX™) waveguide technology. All functionalities are built using the same basic building blocks, namely straight waveguides, phase tuning elements and directional couplers. We recall previously shown measurements on high spurious free dynamic range microwave photonic (MWP) link, ultra-wideband pulse generation, instantaneous frequency measurements, Hilbert transformers, microwave polarization networks and demonstrate new measurements and functionalities on a 16 channel optical beamforming network and modulation format transformer as well as an outlook on future microwave photonic platform integration, which will lead to a significantly reduced footprint and thereby enables the path to commercially viable MWP systems.

On-chip CMOS compatible reconfigurable optical delay line with seperate carrier tuning for microwave photonic signal processing.

We report, for the first time, an integrated photonic signal processor consisting of a reconfigurable optical delay line (ODL) with a separate carrier tuning (SCT) unit and an optical sideband filter on a single CMOS compatible photonic chip. The processing functionalities are carried out with optical ring resonators as building blocks. We show that the integrated approach together with the use of SCT technique allows the implementation of a wideband, fully-tunable ODL with reduced complexity. To highlight the functionalities of the processor, we demonstrate a reconfigurable microwave photonic filter where the ODL has been configured in a bandwidth over 1 GHz.

Box-Shaped Dielectric Waveguides: A New Concept in Integrated Optics?

A novel class of optical waveguides with a box-shaped cross section consisting of a low-index inner material surrounded by a thin high-index coating layer is presented. This original multilayered structure widens the traditional concept of index contrast for dielectric waveguides toward a more general concept of effective index contrast, which can be artificially tailored over a continuous range by properly choosing the thickness of the outer high-index layers. An electromagnetic analysis is reported, which shows that the transverse electric and transverse magnetic modes are spatially confined in different regions of the cross section and exhibit an almost 90°C rotational symmetry. Such unusual field distribution is demonstrated to open the way to new intriguing properties with respect to conventional waveguides. Design criteria are provided into details, which mainly focus on the polarization dependence of the waveguide on geometrical parameters. The possibility of achieving single-mode waveguides with either zero or high birefringence is discussed, and the bending capabilities are compared to conventional waveguides. The feasibility of the proposed waveguide is demonstrated by the realization of prototypal samples that are fabricated by using the emerging CMOS- compatible Si3N4-SiO2 TriPleX technology. An exhaustive experimental characterization is reported, which shows propagation loss as low as state-of-the-art low-index-contrast waveguides (< 0.1 dB/cm) together with enhanced flexibility in the optimization of polarization sensitivity and confirms the high potentialities of the proposed waveguides for large-scale integrated optics.

Low-loss, high-index-contrast Si3N4/SiO2 optical waveguides for optical delay lines in microwave photonics signal processing

We report the design and characterization of Si₃N₄/SiO₂ optical waveguides which are specifically developed for optical delay lines in microwave photonics (MWP) signal processing applications. The waveguide structure consists of a stack of two Si₃N₄ stripes and SiO₂ as an intermediate layer. Characterization of the waveguide propagation loss was performed in race track-shaped optical ring resonators (ORRs) with a free-spectral range of 20 GHz and a bending radius varied from 50 μm to 125 μm. A waveguide propagation loss as low as 0.095 dB/cm was measured in the ORRs with bend radii ≥ 70 μm. Using the waveguide technology two types of RF-modulated optical sideband filters with high sideband suppression and small transition band consisting of an Mach-Zehnder interferometer and ORRs are also demonstrated. These results demonstrate the potential of the waveguide technology to be applied to construct compact on-chip MWP signal processors.

Novel Ring Resonator-Based Integrated Photonic Beamformer for Broadband Phased Array Receive Antennas—Part II: Experimental Prototype

An experimental prototype is presented that illustrates the implementation aspects and feasibility of the novel ring resonator-based optical beamformer concept that has been developed and analyzed in Part I of this paper . This concept can be used for seamless control of the reception angle in broadband wireless receivers employing a large phased array antenna (PAA). The design, fabrication, and characterization of a dedicated chip are described, in which an 8 × 1 optical beamforming network, an optical sideband filter for single-sideband suppressed carrier modulation, and a carrier re-insertion coupler for balanced optical detection are integrated. The chip was designed for satellite television reception using a broadband PAA, and was realized in a low-loss, CMOS-compatible optical waveguide technology. Tuning is performed thermo-optically, with a switching time of 1 ms. Group delay response and power response measurements show the correct operation of the OBFN and OSBF, respectively. Measurements on a complete beamformer prototype (including the electro-optical and opto-electrical conversions) demonstrate an optical sideband suppression of 25 dB, RF-to-RF delay generation up to 0.63 ns with a phase accuracy better than ¿/10 radians, and coherent combining of four RF input signals, all in a frequency range of 1-2 GHz.

A photonic chip based frequency discriminator for a high performance microwave photonic link

We report a high performance phase modulation direct detection microwave photonic link employing a photonic chip as a frequency discriminator. The photonic chip consists of five optical ring resonators (ORRs) which are fully programmable using thermo-optical tuning. In this discriminator a drop-port response of an ORR is cascaded with a through response of another ORR to yield a linear phase modulation (PM) to intensity modulation (IM) conversion. The balanced photonic link employing the PM to IM conversion exhibits high second-order and third-order input intercept points of + 46 dBm and + 36 dBm, respectively, which are simultaneously achieved at one bias point.

TriPleX: a versatile dielectric photonic platform

Abstract Photonic applications based on planar waveguide technology impose stringent requirements on properties such as optical propagation losses, light coupling to optical fibers, integration density, as well as on reliability and reproducibility. The latter is correlated to a high level of control of the refractive index and waveguide geometry. In this paper, we review a versatile dielectric waveguide platform, called TriPleX, which is based on alternating silicon nitride and silicon dioxide films. Fabrication with CMOS-compatible equipment based on low-pressure chemical vapor deposition enables the realization of stable material compositions being a prerequisite to the control of waveguide properties and modal shape. The transparency window of both materials allows for the realization of low-loss waveguides over a wide wavelength range (400 nm–2.35 μm). Propagation losses as low as 5×10-4 dB/cm are reported. Three basic geometries (box shell, double stripe, and filled box) can be distinguished. A specific tapering technology is developed for on-chip, low-loss (<0.1 dB) spotsize convertors, allowing for combining efficient fiber to chip coupling with high-contrast waveguides required for increased functional complexity as well as for hybrid integration with other photonic platforms such as InP and SOI. The functionality of the TriPleX platform is captured by verified basic building blocks. The corresponding library and associated design kit is available for multi-project wafer (MPW) runs. Several applications of this platform technology in communications, biomedicine, sensing, as well as a few special fields of photonics are treated in more detail.

Si3N4 ring resonator-based microwave photonic notch filter with an ultrahigh peak rejection

We report a simple technique in microwave photonic (MWP) signal processing that allows the use of an optical filter with a shallow notch to exhibit a microwave notch filter with anomalously high rejection level. We implement this technique using a low-loss, tunable Si₃N₄ optical ring resonator as the optical filter, and achieved an MWP notch filter with an ultra-high peak rejection > 60 dB, a tunable high resolution bandwidth of 247-840 MHz, and notch frequency tuning of 2-8 GHz. To our knowledge, this is a record combined peak rejection and resolution for an integrated MWP filter.