Arnold Steinman

Test methodologies for detecting ESD events in automated processing equipment

ESD events cause device damage and equipment malfunctions in automated processing equipment. This paper surveys the problems caused by static charge in automated processing equipment. It looks at a number of test methods that detect those charges and the ESD events that occur in this equipment. It also provides examples of using these techniques to solve factory problems.

CPM study: Discharge time and offset voltage, their relationship to plate geometry

Air ionizers are used during the fabrication and assembly of very small components and sub assemblies that are static sensitive. The plate of a standard charged plate monitor (CPM) is relatively large in comparison. Questions have arisen about the relevancy of CPM test results with respect to very small components. The Ionization Committee of the ESD Association performed tests to investigate this relationship.

Manufacturing changes air ionization technology

Manufacturing has brought increased semiconductor device functionality through smaller geometries, larger wafer sizes, and faster operating speeds, as well as increased disk drive storage density and display sizes. To produce these advanced technologies the use of air ionization for static control has changed. This paper explores new ionization requirements and methods.

Increasing yields with in-tool ionization

Smaller feature dimensions of semiconductor devices mean that “killer particle” sizes are also smaller. Static charge affects process yields by increased attraction of these smaller particles to critical product surfaces. This paper describes a study that establishes the affect of charge neutralization in reducing Particles per Wafer Pass (PWP). Cost of ownership analysis shows the positive results on yield and return on investment (ROI).

Static Control Technology Preserves Ancient Egyptian Artifacts

Ancient Egyptian artifacts were deteriorating due to the long term effects of their storage in plastic. Attempts to remove the artifacts caused additional damage. The problem was diagnosed to be due to static charge, and a method was developed to safely remove the artifacts. Due to the insulating materials involved, air ionization was used to eliminate the static charge problem.

Apparatus for Measuring Ultrafine Particle Emissions from Air Ionization Equipment

Recent work has established that electrostatically charged surfaces can increase particle deposition rates. This increase in particle deposition can become especially critical in cleanrooms. Air ionization is one technique that can effectively neutralize surface charges on products in cleanrooms. However, a few papers have suggested that some corona discharge air ionization equipment may release particles. A need exists for a test method to measure and characterize the emission of particles from air ionization equipment.