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Asai Satoru

Fujitsu

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Publication

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Archive | 2006

APPARATUS AND METHOD FOR CORRECTING MASK PATTERN, AND APPARATUS AND METHOD FOR EXPOSURE CORRECTION

Yao Teruyoshi; Asai Satoru; Osawa Moriyoshi; Hoshino Hiromi; Ogino Kozo; Morishita Kazumasa

Archive | 2004

Pattern dimension correction device and method, photo mask, and test photo mask

Osawa Morimi; Yao Teruyoshi; Arimoto Hiroshi; Asai Satoru

Archive | 1991

OPTICAL MASK FOR PROJECTION EXPOSING DEVICE

Hairi Isamu; Asai Satoru

Archive | 2004

PHOTOMASK, METHOD FOR DESIGNING THE SAME AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE BY USING THE SAME

Yao Teruyoshi; Asai Satoru

Archive | 1990

PHOTOMASK AND METHOD FOR CORRECTING DEFECT IN THE SAME

Hairi Isamu; Nunokawa Mitsuji; Asai Satoru

Archive | 1998

PHASE SIFT MASK AND ITS PRODUCTION

Ishiwatari Naoyuki; Asai Satoru; Kobayashi Takema; Hairi Isamu

Archive | 2005

Method of preparing photomask pattern data, photomask produced by using that photomask pattern data, and method of producing semiconductor device using that photomask

Osawa Morimi; Minami Takayoshi; Asai Satoru

Archive | 2004

Pattern size correction apparatus, pattern size correction method and photomask

Osawa Morimi; Yao Teruyoshi; Arimoto Hiroshi; Asai Satoru

Archive | 1998

AN OPTIMIZATION METHOD FOR A LIGHT SOURCE PROFILE

Naruki Tanae; Nakagawa Kenji; Taguchi Masao; Tanaka Miroyuki; Asai Satoru; Hanyu Isamu

Archive | 1995

EXPOSURE MASK AND PRODUCTION THEREOF

Hairi Isamu; Asai Satoru

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Nunokawa Mitsuji

Fujitsu

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Osawa Morimi

Fujitsu

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Hanyu Isamu

Fujitsu

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Minami Takayoshi

Fujitsu

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