Asiya E. Turgambaeva

Chemical Vapor Deposition of Iron, Iron Carbides, and Iron Nitride Films from Amidinate Precursors

Iron bis(N,N-diisopropylacetamidinate) [Fe2(µ-iPr-MeAMD)2(2-iPr-MeAMD)2] and iron bis(N,N-di-tert-butylacetamidinate) [Fe(tBu-MeAMD)2] were used as precursors for the metallorganic chemical vapor deposition (MOCVD) of iron-containing compounds including pure iron, iron carbides, Fe3C and Fe4C, and iron nitrides Fe4C. Their decomposition mechanism involves hydrogen migration followed by dissociation of the Fe–N bond and the release of free hydrogenated ligand (HL) and radicals. Surface intermediates are either released or decomposed on the surface providing Fe–N or Fe–C bonds. MOCVD experiments were run at 10 Torr, in the temperature ranges of 350–450°C with Fe2(µ−iPr-MeAMD)2(2-iPr-MeAMD)2 and 280–350°C with Fe(tBu-MeAMD)2. Films prepared from Fe2(µ−iPr-MeAMD)2(2-iPr-MeAMD)2 contain Fe, Fe3C, and Fe4C. Those prepared from Fe(tBu-MeAMD)2 contain Fe, Fe3C, and also Fe4C or Fe4N, depending on the temperature and hydrogen to precursor ratio (H/P) in the input gas. The room-temperature coercive field of films processed from Fe(tBu-MeAMD)2 is 3 times higher than that of the high temperature processed Fe4N films.

Volatile Pd–Pb and Cu–Pb heterometallic complexes: structure, properties, and trans -to- cis isomerization under cocrystallization of Pd and Cu β-diketonates with Pb hexafluoroacetylacetonate

Preparation of volatile heterometallic precursors is a significant step on the way to advanced multicomponent materials. Study of molecular transformations in solution upon precursor synthesis is of importance to optimize the preparation of the stable solid product of desired composition. Two new volatile heterobimetallic complexes, cis-PdL2*Pb(hfa)2 and cis-CuL2*Pb(hfa)2, were obtained (L = 2-methoxy-2,6,6-trimethylheptane-3,5-dionate, hfa = 1,1,1,5,5,5-hexafluoropentane-2,4-dionate) under cocrystallization of trans-bis-beta-diketonates of Pd(II) and Cu(II) with Pb(hfa)2 from organic solvents. Crystals of these compounds are built of discrete bimetallic molecules where transition metal complex isomerized from trans-to-cis form. Complexation followed by isomerization was studied by solution NMR. The bimetallic molecular species were formed early in solution. Enthalpy and activation energy of isomerization were estimated to be 49 and 93 kJ mol−1, respectively. A new synthesis technique of Pd(II) beta-diketonates which is distinguished by simplicity and selectivity as well as the crystal structure of trans-PdL2 is described. Volatility of all obtained compounds was confirmed by thermogravimetric analysis and fractional sublimation in vacuum; Pd-containing heterobimetallic complex appeared to be more volatile than both the initial monometallic complexes and Cu-containing complex.

Iron amidinates as precursors for the MOCVD of iron-containing thin films

Alain N. Gleizes, Vladislav Krisyuk, Lyacine Aloui, Asiya Turgambaeva, Bartosz Sarapata, Nathalie Prud’Homme, Francois Senocq, Diane Samelor, Anna Zielinska-Lipiec, Frederic Dumestre and Constantin Vahlas 1 CIRIMAT, ENSIACET, 118 Route de Narbonne, 31077 Toulouse cedex 4, France. E-mail: constantin.vahlas@ensiacet.fr, phone: +33 562 885 670, fax: +33 562 885 600 2 Nikolaev Institute of Inorganic Chemistry SB RAS ; Ave. Lavrentiev, 3, Novosibirsk, 630090, Russia. E-mail: vladislav.krisyuk@ensiacet.fr 3 AGH University of Science and Technology (AGHUST), Al. Mickiewicza 30, PL-30 059 Krakow, Poland. E-mail : sarapata@agh.edu.pl 4 NanoMePS ; Departement de Genie Physique, INSA, 135 Avenue de Rangueil, 31077 Toulouse Cedex 4, France. E-mail : contact@nanomeps.fr

Mass Spectrometry as a Tool to Study MOCVD Process

Mass spectrometry as a tool study CVD process. Application of two mass spectrometric (MS) techniques to study chemical vapour deposition from organometallic precursors is described. CpCuPEt3 (Cp = η5-C5H5, Et =C2H5) was used as a model precursor in this work.

Volatile dimethylgold(III) complex with di-iso-butyldithiophosphinate ligand: synthesis, structure, and thermal behavior in condensed and gas phase

Synthesis and molecular structure of air stable, low-melting dimethylgold(III) complex with dithiophosphinate (CH3)2AuS2PiBu2 (iBu=CH2CH(CH3)2), its thermal properties, and the features as precursor for the metal–organic chemical vapor deposition of gold films are reported. Thermal behavior of the compound in the condensed and gas phase was studied by thermogravimetric analysis and mass spectrometry. Pathways of heterogeneous thermolysis of the compound to elemental gold are discussed. It was found that α-P–H elimination followed by coupling of two alkenyl groups from the coordinated ligand is one of the main thermolysis pathways in condensed and gas phase.