Atsushi Ban

43.4: A 4-inch Reflective Color TFT-LCD Using a Plastic Substrate

We have developed a reflective type color TFT-LCD using a novel plastic substrate. The display area is 4-inch diagonal with 240×RGB×240 pixels (85ppi). This is the first report of a flat panel display driven by TFT array on a plastic substrate with PDA size and resolution. It shows that our development has stepped near to a mass production of the plastic TFT-LCDs.

Plasma Treatment Effect on the Off Current Characteristics of a-Si TFT

We have investigated the effect of plasma treatment after a back channel etching process of a-Si:H thin film transistors (TFTs). O2, N2 and He plasma treatments were done and compared. It was found that the He plasma treatment was the most effective method to decrease the off leakage current in the lower subthreshold region. The He plasma treatment affects the interface characteristics between the a-Si:H layer and the passivation layer, and obstructs the electron transport near the back channel interface.