Atsushi Maniwa
Tosoh
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Publication
Featured researches published by Atsushi Maniwa.
220th ECS Meeting | 2011
Kohei Iwanaga; Ken-ichi Tada; Hirokazu Chiba; Toshiki Yamamoto; Atsushi Maniwa; Tadahiro Yotsuya; Noriaki Oshima
Si-TBES (2) and Si-TBAS (4), novel CVD/ALD precursors bearing a diazasilacyclopentene framework, were synthesized. Thermal analyses revealed that both of them are highly volatile, and their decomposition temperatures were lower than those of comparable silicon precursors, Si(OEt)4 (TEOS) and SiH(NMe2)3 (TDMAS). Deposition properties of SiO2 thin films were investigated by a thermal CVD apparatus. The deposition rates of SiO2 thin films using these new precursors were higher than that of TDMAS. Deposition rate dependency on oxygen partial pressure indicates the high reactivity of the diazasilacyclopentene framework towards oxygen contributes to the high growth rates. Details of the SiO2 thin films were evaluated by XPS, AFM, and SIMS. While Si-TBAS can form conformal SiO2 thin films efficiently, Si-TBES can provide a film with low carbon and nitrogen contamination.
Journal of Vacuum Science and Technology | 2015
Atsushi Maniwa; Hirokazu Chiba; Kazuhisa Kawano; Naoyuki Koiso; Hiroyuki Oike; Taishi Furukawa; Ken-ichi Tada
The authors have succeeded in development of a novel Ru precursor, Ru(EtCp)(η5-CH2C(Me)CHC(Me)O) [Rudense], for CVD and atomic layer deposition (ALD) processes under nonoxidative condition. Rudense has sufficient vapor pressure and good thermal stability (decomposition temperature = ca. 230 °C). Ru thin films were grown on Pt, Ru, Si, and SiO2 substrates using Rudense and NH3 as Ru precursor and reactant, respectively. Rudense gave the conformal, low-impurity (<1021 atoms/cc), and low-resistivity (16 μΩ cm) Ru thin films. Moreover, Rudense showed substrate selectivity; therefore, Rudense will be a candidate for area-selective CVD and ALD precursor for Ru capping layers of Cu interconnects.
Archive | 2011
Ken-ichi Tada; Kohei Iwanaga; Toshiki Yamamoto; Atsushi Maniwa
Archive | 2013
Ken-ichi Tada; Toshiki Yamamoto; Hiroyuki Oike; Atsushi Maniwa; Hirokazu Chiba; Kohei Iwanaga; Kazuhisa Kawano
Archive | 2009
Ken-ichi Tada; Toshiki Yamamoto; Hirokazu Chiba; Kohei Iwanaga; Atsushi Maniwa; Tadahiro Yotsuya; Noriaki Oshima
Archive | 2010
Yoichi Chiba; Kohei Iwanaga; Atsushi Maniwa; Kensho Oshima; Ken-ichi Tada; Toshiki Yamamoto; Tadahiro Yotsuya; 洋一 千葉; 賢一 多田; 憲昭 大島; 俊樹 山本; 宏平 岩永; 篤 摩庭; 忠寛 肆矢
Archive | 2010
Yoichi Chiba; Yasushi Furukawa; Kazuhisa Kono; Atsushi Maniwa; Kensho Oshima; Toshiki Yamamoto; 洋一 千葉; 泰志 古川; 憲昭 大島; 俊樹 山本; 篤 摩庭; 和久 河野
Archive | 2018
Atsushi Maniwa; Noriaki Oshima; Kazuhisa Kawano; Taishi Furukawa; Hirokazu Chiba; Toshiki Yamamoto
Archive | 2011
Kohei Iwanaga; Atsushi Maniwa; Ken-ichi Tada; Toshiki Yamamoto; 賢一 多田; 俊樹 山本; 宏平 岩永; 篤 摩庭
Archive | 2011
Ken-ichi Tada; Kohei Iwanaga; Toshiki Yamamoto; Atsushi Maniwa