B. Grančič

Studies of YBa2Cu3O6+x degradation and surface conductivity properties by Scanning Spreading Resistance Microscopy

Local surface conductivity properties and surface degradation of c-axis oriented YBa2Cu3O6+x (YBCO) thin films were studied by Scanning Spreading Resistance Microscopy (SSRM). For the surface degradation studies, the YBCO surface was cleaned by ion beam etching and the SSRM surface conductivity map has been subsequently repeatedly measured over several hours in air and pure nitrogen. Average surface conductivity of the scanned area was gradually decreasing over time in both cases, faster in air. This was explained by oxygen out-diffusion in both cases and chemical reactions with water vapor in air. The obtained surface conductivity images also revealed its high inhomogenity on micrometer and nanometer scale with numerous regions of highly enhanced conductivity compared to the surroundings. Furthermore, it has been shown that the size of these conductive regions considerably depends on the applied voltage. We propose that such inhomogeneous surface conductivity is most likely caused by varying thickness of degraded YBCO surface layer as well as varying oxygen concentration (x parameter) within this layer, what was confirmed by scanning Auger electron microscopy (SAM). In our opinion the presented findings might be important for analysis of current–voltage and differential characteristics measured on classical planar junctions on YBCO as well as other perovskites.

Structure of Hydrogen Gas Sensing TiO2 Thin Films Prepared by Sol-Gel Method and their Comparison with Magnetron Sputtered Films

TiO2 thin films with a thickness of about 150 nm were deposited by spin coating method on sapphire substrate from a sol-gel system. The hydrogen sensing properties of TiO2 films annealed at various temperatures were studied and correlated with their structure, optical and electrical properties. The annealing temperatures in the range of 600 800 °C lead to anatase films with a roughness in the range of 0.6 0.9 nm. Their sensitivity towards hydrogen is low. The thin films annealed at temperatures in the range 900 1000 °C consist of rutile phase and their roughness increased to 11.7 13.5 nm. They showed good hydrogen sensitivity with optimal operating temperature 200 250 °C. The structure and sensing properties of the prepared films are compared with those synthesized with magnetron sputtering. The maximum of sensitivity was measured on the thin films with diameter of the grains about 100 nm in both cases, i.e. on thin films prepared by sol-gel method as well as on thin films prepared by magnetron sputtering. The maximum sensitivity correlates with the diameter of the grains and dont depend on the allotropy of the titanium dioxide anatase or rutile.

Metal oxide gas sensors on the nanoscale

Low cost, low power and highly sensitive gas sensors operating at room temperature are very important devices for controlled hydrogen gas production and storage. One of the disadvantages of chemosensors is their high operating temperature (usually 200 – 400 °C), which excludes such type of sensors from usage in explosive environment. In this report, a new concept of gas chemosensors operating at room temperature based on TiO2 thin films is discussed. Integration of such sensor is fully compatible with sub-100 nm semiconductor technology and could be transferred directly from labor to commercial sphere.

Properties of Metal Oxide Gas Sensors with Electrodes Placed below the Sensing Layer

In this work, we investigate the influence of position of electrodes on the sensitivity of hydrogen gas sensors based on TiO2 thin films. We have prepared two types of sensors with platinum comb-like electrodes deposited on top and under the TiO2 layer. Response of these sensors to hydrogen gas in the concentration range of 0 10 000 ppm at temperature of 350 °C has been studied. The sensors with electrodes placed under the TiO2 layer showed two orders of magnitude lower sensitivity for 10 000 ppm compared to sensors with electrodes on top of the layer, but it was considerably increased when thickness of the TiO2 layer was lowered. This gives a possibility to improve the sensitivity of gas sensors in which the electrodes must be placed below the sensing layer for their protection from harsh environment.

Influence of structural disorder on the optical properties of non-stoichiometric Cu6Ps5I-based thin films

Cu6PS5I-based thin films were deposited onto silicate glass substrates by magnetron sputtering. Chemical composition of the thin films was determined by energy-dispersive X-ray spectroscopy. With increasing Cu content, a red shift of the exponential absorption edge energy position as well as a decrease of the Urbach energy are observed. Optical transmission spectra of Cu8.05P0.68S3.54I0.73 thin film were investigated in the temperature interval 77–300 K; the temperature behaviour of the optical absorption spectra and the refractive index dispersion was studied. Temperature dependences of the energy position of the absorption edge, the Urbach energy, and the refractive index of the Cu8.05P0.68S3.54I0.73 thin film were analysed. The influence of structural disorder on the optical properties of the Cu6PS5Ibased thin films is discussed.

Simple patterning method of sub-micro- and nanometer structures for gas sensor

In this study, a simple patterning method of submicrometer structures is proposed for gas sensor development. Comb-like electrodes patterned in thin Pt layer were proposed to measure gas sensor electrical conductivity. Negative resist SU-8 was used as a masking layer for ion etching of electrodes in 35 nm Pt layer on sapphire substrate. This method was applied for the patterning of the comb-like structures with submicrometre dimensions for gas sensor conductivity measurements.

Structure and Epitaxial Behavior of Rutile TiO2 Thin Films Prepared by DC Magnetron Sputtering and Ex-Situ Annealing

Titanium dioxide gas sensors are typically employing metastable anatase nanocrystalline phase. Operation at high temperature can thus negatively affect their long term stability. Employment of rutile phase with strong texture and larger grain size may ensure better reliability and longer lifetime. Therefore in this work we study the possibility to utilize stable rutile phase thin films prepared at relatively low temperature on c-cut sapphire substrates. Technological conditions have been chosen in order to obtain highly oriented titanium dioxide rutile thin films using reactive DC magnetron sputtering on unheated substrates. Subsequent ex-situ annealing in temperature range from 500°C to 800°C leads to increase of crystallite size and improvement of in-plane preferential orientation. Surface topography has been characterized by atomic force microscopy. Structure, texture and the strain evolution has been investigated using x-ray diffraction measurements. All investigated thin films showed epitaxial relationship with respect to the substrate: rutile-TiO2(100)[00 || Al2O3(0001)[10. Sensitivity of such rutile films to hydrogen has been measured and compared with our previous results on anatase thin films.

P2.0.5 Studies of Hydrogen Gas Sensing Properties of Anatase TiO2 Thin Films Prepared by Magnetron Sputtering

Titanium dioxide thin films were deposited on sapphire substrates by reactive dc magnetron sputtering method. The prepared thin films were then annealed in air at various temperatures (600 – 800 °C) to achieve crystalline thin films having anatase phase. The comb-like Pt electrodes, with a distance of 10 μm, were prepared on the top of the films to measure the electrical and gas sensing properties. The films prepared in this work showed high electrical response for various concentrations of H2/air, ranging from 20 to 10 000 ppm. The response was tested in the working/operating temperature range 150 – 350 °C and it was observed that these thin films are the most sensitive at temperatures below 200°C.