B. Salem

Surface recombination velocity measurements of efficiently passivated gold-catalyzed silicon nanowires by a new optical method.

The past decade has seen the explosion of experimental results on nanowires grown by catalyzed mechanisms. However, few are known on their electronic properties especially the influence of surfaces and catalysts. We demonstrate by an optical method how a curious electron-hole thermodynamic phase can help to characterize volume and surface recombination rates of silicon nanowires (SiNWs). By studying the electron-hole liquid dynamics as a function of the spatial confinement, we directly measured these two key parameters. We measured a surface recombination velocity of passivated SiNWs of 20 cm s(-1), 100 times lower than previous values reported. Furthermore, the volume recombination rate of gold-catalyzed SiNWs is found to be similar to that of a high-quality three-dimensional silicon crystal; the influence of the catalyst is negligible. These results advance the knowledge of SiNW surface passivation and provide essential guidance to the development of efficient nanowire-based devices.

Effect of HCl on the doping and shape control of silicon nanowires

The introduction of hydrogen chloride during the in situ doping of silicon nanowires (SiNWs) grown using the vapor-liquid-solid (VLS) mechanism was investigated. Compared with non-chlorinated atmospheres, the use of HCl with dopant gases considerably improves the surface morphology of the SiNWs, leading to extremely smooth surfaces and a greatly reduced tapering. Variations in the wire diameter are massively reduced for boron doping, and cannot be measured at 600 °C for phosphorous over several tens of micrometers. This remarkable feature is accompanied by a frozen gold migration from the catalyst, with no noticeable levels of gold clusters observed using scanning electron microscopy. A detailed study of the apparent resistivity of the NWs reveals that the dopant incorporation is effective for both types of doping. A graph linking the apparent resistivity to the dopant to silane dilution ratio is built for both types of doping and discussed in the frame of the previous results.

Silicon nanowires: Diameter dependence of growth rate and delay in growth

We grew Si nanowires by chemical vapor deposition, via the vapor liquid solid growth, using silane as gaseous precursor and gold as catalyst. The results show that the nanowire length depends on their diameter. For nanowires with diameter under 100 nm, the length increases when diameter increases, because of an increase in the growth velocity. For the thicker diameter (d>100 nm), length decreases when diameter increases, due to an apparent incubation time which is all the higher as the diameter is high. We propose a semiempirical model combining Gibbs–Thomson effect and incubation time, which shows good agreement with the experimental data.

An improved AFM cross-sectional method for piezoelectric nanostructures properties investigation: application to GaN nanowires

We present an improved atomic force microscopy (AFM) method to study the piezoelectric properties of nanostructures. An AFM tip is used to deform a free-standing piezoelectric nanowire. The deflection of the nanowire induces an electric potential via the piezoelectric effect, which is measured by the AFM coating tip. During the manipulation, the applied force, the forcing location and the nanowires deflection are precisely known and under strict control. We show the measurements carried out on intrinsic GaN and n-doped GaN-AlN-GaN nanowires by using our method. The measured electric potential, as high as 200 mV for n-doped GaN-AlN-GaN nanowire and 150 mV for intrinsic GaN nanowire, have been obtained, these values are higher than theoretical calculations. Our investigation method is exceptionally useful to thoroughly examine and completely understand the piezoelectric phenomena of nanostructures. Our experimental observations intuitively reveal the great potential of piezoelectric nanostructures for converting mechanical energy into electricity. The piezoelectric properties of nanostructures, which are demonstrated in detail in this paper, represent a promising approach to fabricating cost-effective nano-generators and highly sensitive self-powered NEMS sensors.

High-performance silicon nanowire field-effect transistor with silicided contacts

Undoped silicon nanowire (Si NW) field-effect transistors (FETs) with a back-gate configuration have been fabricated and characterized. A thick (200 nm) Si3N4 layer was used as a gate insulator and a p++ silicon substrate as a back gate. Si NWs have been grown by the chemical vapour deposition method using the vapour–liquid–solid mechanism and gold as a catalyst. Metallic contacts have been deposited using Ni/Al (80 nm/120 nm) and characterized before and after an optimized annealing step at 400 °C, which resulted in a great decrease in the contact resistance due to the newly formed nickel silicide/Si interface at source and drain. These optimized devices show a good hole mobility of around 200 cm2 V−1 s−1, in the same range as the bulk material, with a good ON current density of about 28 kA cm−2. Finally, hysteretic behaviour of NW channel conductance is discussed to explain the importance of NW surface passivation.

Composition-dependent interfacial abruptness in Au-catalyzed Si(1-x)Ge(x)/Si/Si(1-x)Ge(x) nanowire heterostructures.

As MOSFETs are scaled down, power dissipation remains the most challenging bottleneck for nanoelectronic devices. To circumvent this challenge, alternative devices such as tunnel field effect transistors are potential candidates, where the carriers are injected by a much less energetically costly quantum band to band tunneling mechanism. In this context, axial nanowire heterointerfaces with well-controlled interfacial abruptness offer an ideal structure. We demonstrate here the effect of tuning the Ge concentration in a Si1-xGex part of the nanowire on the Si/Si1-xGex and Si1-xGex/Si interfacial abruptness in axial Si-Si1-xGex nanowire heterostructures grown by the Au-catalyzed vapor-liquid-solid method. The two heterointerfaces are always asymmetric irrespective of the Ge concentration or nanowire diameter. For a fixed diameter, the value of interface abruptness decreases with increasing the Ge content for the Si/Si1-xGex interface but shows no strong Ge dependence at the Si1-xGex/Si interface where it features a linear correlation with the nanowire diameter. To rationalize these findings, a kinetic model for the layer-by-layer growth of nanowire heterostructures from a ternary Au-Ge-Si alloy is established that predicts a discrepancy in Ge concentration in the layer and the catalyst droplet. The Ge concentration in each layer is predicted to be dependent on the composition of the preceding layer. The most abrupt heterointerface (∼5 nm) is achieved by growing Si1-xGex with x = 0.85 on Si in a 25 nm diameter nanowire.

Controlled growth of SiGe nanowires by addition of HCl in the gas phase

Growth of Si, Ge, and, thus, SiGe nanowires (NWs) by catalyzed chemical vapor deposition proceeds at different process conditions, preventing easy realization of axial multijunctions interesting for device realization. In this paper, we propose a common process to obtain both Si, Ge, and alloyed NWs simply by adding HCl in the gas phase. It is demonstrated that addition of HCl during the growth improves the structural quality of the SiGe NWs, avoids the tapering of NWs by decreasing the uncatalyzed growth, increases the Ge fraction of the SiGe alloy NWs, and decreases the growth rate. A qualitative model based on the experimental results is proposed to explain the role of HCl during the growth. This model can be more generally applied to explain the tendency observed in the literature concerning the growth of SiGe alloyed NWs without HCl. It is based on a competition between adsorption, decomposition, and incorporation of Si and Ge in the catalyst. This competition is mainly regulated by the gas phase com...

Vertically integrated silicon-germanium nanowire field-effect transistor

We demonstrate in this paper the possibility to vertically integrate SiGe nanowires in order to use them as vertical channel for field-effect transistors (FETs). We report a threshold voltage close to 3.9 V, an ION/IOFF ratio of 104. The subthreshold slope was estimated to be around 0.9 V/decade and explained by a high traps density at the nanowire core/oxide shell interface with an estimated density of interface traps Dit ∼ 1.2 × 1013 cm−2 eV−1. Comparisons are made with both vertical Si and horizontal SiGe FETs performances.

Growth and characterization of gold catalyzed SiGe nanowires and alternative metal-catalyzed Si nanowires

The growth of semiconductor (SC) nanowires (NW) by CVD using Au-catalyzed VLS process has been widely studied over the past few years. Among others SC, it is possible to grow pure Si or SiGe NW thanks to these techniques. Nevertheless, Au could deteriorate the electric properties of SC and the use of other metal catalysts will be mandatory if NW are to be designed for innovating electronic. First, this articles focus will be on SiGe NWs growth using Au catalyst. The authors managed to grow SiGe NW between 350 and 400°C. Ge concentration (x) in Si1-xGexNW has been successfully varied by modifying the gas flow ratio: R = GeH4/(SiH4 + GeH4). Characterization (by Raman spectroscopy and XRD) revealed concentrations varying from 0.2 to 0.46 on NW grown at 375°C, with R varying from 0.05 to 0.15. Second, the results of Si NW growths by CVD using alternatives catalysts such as platinum-, palladium- and nickel-silicides are presented. This study, carried out on a LPCVD furnace, aimed at defining Si NW growth conditions when using such catalysts. Since the growth temperatures investigated are lower than the eutectic temperatures of these Si-metal alloys, VSS growth is expected and observed. Different temperatures and HCl flow rates have been tested with the aim of minimizing 2D growth which induces an important tapering of the NW. Finally, mechanical characterization of single NW has been carried out using an AFM method developed at the LTM. It consists in measuring the deflection of an AFM tip while performing approach-retract curves at various positions along the length of a cantilevered NW. This approach allows the measurement of as-grown single NWs Young modulus and spring constant, and alleviates uncertainties inherent in single point measurement.

Control of the interfacial abruptness of Au-catalyzed Si-Si1−xGex heterostructured nanowires grown by vapor–liquid–solid

Axial Si-Si1−xGex heterostructured nanowires were grown by Au-catalyzed vapor–liquid–solid method. In this work, the authors examine the changes in growth parameters on the interfacial-abruptness of Si-Si1−xGex heterointerfaces in nanowires. The authors have investigated the effect of temperature drop, pressure change, and growth stop on the droplet stability which in turn modifies nanowire morphology and interfacial abruptness. The authors found that Si/Si1−xGex heterointerface is relatively sharp while Si1−xGex/Si is much broader. They demonstrate that a short growth stop is a good way to minimize reservoir effect resulting in small interfacial abruptness value. Our observations reveal that Si/Si1−xGex interfacial abruptness is 20 ± 5 nm irrespective of the nanowire diameter while interfacial abruptness for Si1−xGex/Si is linearly dependent on nanowire diameter.