Baek-Kyun Jeon

49.1: Fabrication of 23” PVA LCD Panel by Laser Ablation Process of ITO

We fabricated the world first 23” PVA LCD panel of which transparent electrode (ITO) was patterned by “laser ablation process”. Generally photo process is used to pattern the transparent electrode. To simplify this photo process we tried to develop laser ablation process to pattern the ITO. Current photo process is composed of 6 steps such as Coating the Photoresist, Baking, Exposure, Development, Etching, and Stripping. But we succeeded in simplifying this process by the laser ablation process. From this experiment, we could identify the possibility of laser ablation process which can be used on the patterning process of transparent electrodes.