Balaji Raghothamachar

Correlation Between Morphological Defects, Electron Beam Induced Current Imaging, and the Electrical Properties of 4H-SiC Schottky Diodes

Defects in SiC degrade the electrical properties and yield of devices made from this material. This article examines morphological defects in 4H–SiC and defects visible in electron beam-induced current (EBIC) images and their effects on the electrical characteristics of Schottky diodes. Optical Nomarski microscopy and atomic force microscopy were used to observe the morphological defects, which are classified into 26 types based on appearance alone. Forward and reverse current–voltage characteristics were used to extract barrier heights, ideality factors, and breakdown voltages. Barrier heights decrease about linearly with increasing ideality factor, which is explained by discrete patches of low barrier height within the main contact. Barrier height, ideality, and breakdown voltage all degrade with increasing device diameter, suggesting that discrete defects are responsible. Electroluminescence was observed under reverse bias from microplasmas associated with defects containing micropipes. EBIC measurements reveal several types of features corresponding to recombination centers. The density of dark spots observed by EBIC correlates strongly with ideality factor and barrier height. Most morphological defects do not affect the reverse characteristics when no micropipes are present, but lower the barrier height and worsen the ideality factor. However, certain multiple-tailed defects, irregularly shaped defects and triangular defects with 3C inclusions substantially degrade both breakdown voltage and barrier height, and account for most of the bad devices that do not contain micropipes. Micropipes in these wafers are also frequently found to be of Type II, which do not run parallel to the c axis.

Synchrotron white beam topography characterization of physical vapor transport grown AlN and ammonothermal GaN

Structural defects in AlN single crystals grown by the sublimation method and GaN single crystals grown by the ammonothermal method are characterized by synchrotron white-beam X-ray topography in conjunction with optical microscopy. AlN platelets are either of (1120) or (0001) type depending on the growth conditions. Dislocation densities of the order of 10 3 cm -2 or lower are observed in some crystals. X-ray topographs reveal the presence of growth sector boundaries, inclusions, and growth dislocations that indicate slight impurity contamination. The 2H crystal structure of GaN single crystals obtained by the ammonothermal method was verified by Laue X-ray pattern analysis. GaN crystals grown are of the order of 1 mm in size and are either (0001) platelets or [0001] prismatic needles. Generally, prismatic needles are characterized by lower degree of mosaicity than (0001) platelets.

Stacking faults created by the combined deflection of threading dislocations of Burgers vector c and c+a during the physical vapor transport growth of 4H–SiC

Observations have been made, using synchrotron white beam x-ray topography, of stacking faults in 4H–SiC with fault vectors of kind 1/6⟨202¯3⟩. A mechanism has been postulated for their formation which involves overgrowth by a macrostep of the surface outcrop of a c-axis threading screw dislocation, with two c/2-height surface spiral steps, which has several threading dislocations of Burgers vector c+a, with c-height spiral steps, which protrude onto the terrace in between the c/2-risers. Such overgrowth processes deflect the threading dislocations onto the basal plane, enabling them to exit the crystal and thereby providing a mechanism to lower their densities.

Correlated structural and optical characterization of ammonothermally grown bulk GaN

A series of ammonothermally grown bulk GaN crystals containing stacking faults has been characterized using structural [transmission electron microscopy (TEM) and synchrotron white-beam x-ray topography (SWBXT)] and optical [low-temperature photoluminescence (PL)] methods. Strong correlations are found between structural and optical properties. In particular, the occurrence of low-temperature PL peaks observed in the 3.30–3.45 eV range correlates with the observation of basal plane stacking faults by TEM (all of which were bounded by Shockley partial dislocations). In addition, the full width at half-maximum of the neutral donor-bound exciton PL peak correlates with the extent of mosaicity revealed on SWBXT Laue patterns recorded from the same crystals.

Characterization of 100 mm Diameter 4H-Silicon Carbide Crystals with Extremely Low Basal Plane Dislocation Density

Synchrotron White Beam X-ray Topography (SWBXT) studies are presented of basal plane dislocation (BPD) configurations and behavior in a new generation of 100mm diameter, 4H-SiC wafers with extremely low BPD densities (3-4 x 102 cm-2). The conversion of non-screw oriented, glissile BPDs into sessile threading edge dislocations (TEDs) is observed to provide pinning points for the operation of single ended Frank-Read sources. In some regions, once converted TEDs are observed to re-convert back into BPDs in a repetitive process which provides multiple BPD pinning points.

Low Defect Density Bulk AlN Substrates for High Performance Electronics and Optoelectronics

Using the physical vapor transport (PVT) method, single crystal boules of AlN have been grown and wafers sliced from them have been characterized by synchrotron white beam X-ray topography (SWBXT) in conjunction with optical microscopy. X-ray topographs reveal that the wafers contain dislocations that are inhomogeneously distributed with densities varying from as low as 0 cm-2 to as high as 104 cm-2. Two types of dislocations have been identified: basal plane dislocations and threading dislocations, both having Burgers vectors of type 1/3<112-0> indicating that their origin is likely due to post-growth deformation. In some cases, the dislocations are arranged in low angle grain boundaries. However, large areas of the wafers are nearly dislocation-free and section X-ray topographs of these regions reveal the high crystalline perfection.

The Nucleation and Propagation of Threading Dislocations with c-Component of Burgers Vector in PVT-Grown 4H-SiC

Studies of threading dislocations with Burgers vector of c+a have been carried out using synchrotron white beam X-ray topography. The nucleation and propagation of pairs of opposite sign threading c+a dislocations is observed. Overgrowth of inclusions by growth steps leads to lattice closure failure and the stresses associated with this can be relaxed by the nucleation of opposite sign pairs of dislocations with Burgers vector c+a. Once these dislocations are nucleated they propagate along the c-axis growth direction, or can be deflected onto the basal plane by overgrowth of macrosteps. For the c+a dislocations, partial deflection can occasionally occur, e.g. the a-component deflects onto basal plane while the c-component continuously propagates along the growth direction. One factor controlling the details of these deflection processes is suggested to be related to the ratio between the height of the overgrowing macrostep and that of the surface spiral hillock associated with the threading growth dislocations with c-component of Burgers vector.

Basal plane dislocation multiplication via the Hopping Frank-Read source mechanism in 4H-SiC

Synchrotron white beam x-ray topography (SWBXT) observations are reported of single-ended Frank-Read sources in 4H-SiC. These result from inter-conversion between basal plane dislocations (BPDs) and threading edge dislocations (TEDs) brought about by step interactions on the growth interface resulting in a dislocation comprising several glissile BPD segments on parallel basal planes interconnected by relatively sessile TED segments. Under stress, the BPD segments become pinned by the TED segments producing single ended Frank-Read sources. Since the BPDs appear to “hop” between basal planes, this apparently dominant multiplication mechanism for BPDs in 4H-SiC is referred to as the “Hopping” Frank-Read source mechanism.

Basal Plane Dislocation Multiplication via the Hopping Frank-Read Source Mechanism and Observations of Prismatic Glide in 4H-SiC

In this paper, we report on the synchrotron white beam topographic (SWBXT) observation of “hopping” Frank-Read sources in 4H-SiC. A detailed mechanism for this process is presented which involves threading edge dislocations experiencing a double deflection process involving overgrowth by a macrostep (MP) followed by impingement of that macrostep against a step moving in the opposite direction. These processes enable the single-ended Frank-Read sources created by the pinning of the deflected basal plane dislocation segments at the less mobile threading edge dislocation segments to “hop” from one slip plane to other parallel slip planes. We also report on the nucleation of 1/3< >{ } prismatic dislocation half-loops at the hollow cores of micropipes and their glide under thermal shear stress.

Crucible Selection in AlN Bulk Crystal Growth

Growth of AlN bulk single crystals by sublimation of AlN powder was carried out in a resistively heated reactor at temperatures up to 2300°C. A variety of crucible materials, such as BN, W, Ta, Re, ZrO 2 , TaN, and TaC, were evaluated. Our studies have shown that the morphology of crystals grown by spontaneous nucleation strongly depends on the growth temperature and contamination in the reactor. Crucible selection had a profound effect on contamination in the crystal growth environment, thus influencing nucleation, coalescence, and crystal morphology. Spontaneously grown single crystals up to 15 mm in size were characterized by x-ray diffraction (XRD), x-ray topography (XRT), glow discharge mass spectrometry (GDMS), and secondary ion mass spectrometry (SIMS). Average dislocation densities were on the order of 10 3 cm −3 , with extended areas virtually dislocation-free, while high-resolution XRD showed rocking curves as narrow as 7 arcsec.