Baozhong Mu

Fabrication of nanoscale patterns in lithium fluoride crystal using a 13.5 nm Schwarzschild objective and a laser produced plasma source

Lithium fluoride (LiF) crystal is a radiation sensitive material widely used as EUV and soft x-ray detector. The LiF-based detector has high resolution, in principle limited by the point defect size, large field of view, and wide dynamic range. Using LiF crystal as an imaging detector, a resolution of 900 nm was achieved by a projection imaging of test meshes with a Schwarzschild objective operating at 13.5 nm. In addition, by imaging of a pinhole illuminated by the plasma, an EUV spot of 1.5 μm diameter in the image plane of the objective was generated, which accomplished direct writing of color centers with resolution of 800 nm. In order to avoid sample damage and contamination due to the influence of huge debris flux produced by the plasma source, a spherical normal-incidence condenser was used to collect EUV radiation. Together with a description of experimental results, the development of the Schwarzschild objective, the influence of condenser on energy density and the alignment of the imaging system are also reported.

Eight-channel Kirkpatrick–Baez microscope for multiframe x-ray imaging diagnostics in laser plasma experiments

Because grazing-incidence Kirkpatrick-Baez (KB) microscopes have better resolution and collection efficiency than pinhole cameras, they have been widely used for x-ray imaging diagnostics of laser inertial confinement fusion. The assembly and adjustment of a multichannel KB microscope must meet stringent requirements for image resolution and reproducible alignment. In the present study, an eight-channel KB microscope was developed for diagnostics by imaging self-emission x-rays with a framing camera at the Shenguang-II Update (SGII-Update) laser facility. A consistent object field of view is ensured in the eight channels using an assembly method based on conical reference cones, which also allow the intervals between the eight images to be tuned to couple with the microstrips of the x-ray framing camera. The eight-channel KB microscope was adjusted via real-time x-ray imaging experiments in the laboratory. This paper describes the details of the eight-channel KB microscope, its optical and multilayer design, the assembly and alignment methods, and results of imaging in the laboratory and at the SGII-Update.

Large-field high-resolution Kirkpatrick–Baez amélioré-Kirkpatrick–Baez mixed microscope for multi-keV time-resolved x-ray imaging diagnostics of laser plasma

Abstract. A large-field high-resolution x-ray microscope was developed for multi-keV time-resolved x-ray imaging diagnostics of laser plasma at the Shenguang-III prototype facility. The microscope consists of Kirkpatrick–Baez amélioré (KBA) bimirrors and a KB single mirror corresponding to the imaging and temporal directions of a streak camera, respectively. KBA bimirrors coated with an Ir single layer were used to obtain high spatial resolutions within the millimeter-range field of view, and a KB mirror coated with Cr/C multilayers was used to obtain a specific spectral resolution around 4.3 keV. This study describes details of the microscope with regard to its optical design, mirror coatings, and assembly method. The experimental imaging results of the grid with 3 to 5 μm spatial resolution are also shown.

A novel lobster-eye imaging system based on Schmidt-type objective for X-ray-backscattering inspection

This paper presents a novel lobster-eye imaging system for X-ray-backscattering inspection. The system was designed by modifying the Schmidt geometry into a treble-lens structure in order to reduce the resolution difference between the vertical and horizontal directions, as indicated by ray-tracing simulations. The lobster-eye X-ray imaging system is capable of operating over a wide range of photon energies up to 100 keV. In addition, the optics of the lobster-eye X-ray imaging system was tested to verify that they meet the requirements. X-ray-backscattering imaging experiments were performed in which T-shaped polymethyl-methacrylate objects were imaged by the lobster-eye X-ray imaging system based on both the double-lens and treble-lens Schmidt objectives. The results show similar resolution of the treble-lens Schmidt objective in both the vertical and horizontal directions. Moreover, imaging experiments were performed using a second treble-lens Schmidt objective with higher resolution. The results show that for a field of view of over 200 mm and with a 500 mm object distance, this lobster-eye X-ray imaging system based on a treble-lens Schmidt objective offers a spatial resolution of approximately 3 mm.

Correction method for the self-absorption effects in fluorescence extended X-ray absorption fine structure on multilayer samples.

A novel correction method for self-absorption effects is proposed for extended X-ray absorption fine structure (EXAFS) detected in the fluorescence mode on multilayer samples. The effects of refraction and multiple reflection at the interfaces are fully considered in this correction method. The correction is performed in k-space before any further data analysis, and it can be applied to single-layer or multilayer samples with flat surfaces and without thickness limit when the model parameters for the samples are known. The validity of this method is verified by the fluorescence EXAFS data collected for a Cr/C multilayer sample measured at different experimental geometries.

Study of X-ray Kirkpatrick-Baez imaging with single layer

The X-ray Kirkpatrick-Baez (KB) imaging experiment with single layer is implemented. Based on the astigmatism aberration and residual geometric aberration of a single mirror, a KB system with 16X mean magnification and approximately 0.45\circ razing incidence angle is designed. The mirrors are deposited with an Ir layer of 20-nm thickness. Au grids backlit by X-ray tube of 8 keV are imaged via the KB system on scintillator charge-coupled device (CCD). In the \pm80 \mum field, resolutions of less than 5 \mum are measured. The result is in good agreement with the simulated imaging.

Development of high resolution dual-energy KBA microscope with large field of view for RT-instability diagnostics at SG-III facility

High resolution X-ray diagnosis is a significant method for obtaining ablation-front and trajectory measurements targeting Rayleigh-Taylor (RT)-instability growth in initial confinement fusion (ICF) experiments. In this paper, a novel Kirkpatrick-Baez-type structure, as a kind of essential X-ray micro-imaging apparatus, has been developed that realizes a large field of view (FOV) and images with high resolution and energy response. Zoned multilayer coating technology is applied to the Kirkpatrick-Baez mirrors to transmit two specific quasi-monochromatic light through the same mirror and enables a compact dual-channel structure. This microscope has been assembled in the laboratory and later implemented at the Chinese SG-III laser facility. The characterization results show that this imaging system can achieve a good spatial resolution of 5 µm in a large FOV of 500 µm, while maintaining a strong monochromatic performance with bandwidth of 0.5 keV at 2.5 keV and 4.3 keV respectively.

A novel extreme ultraviolet four channels normal incidence imaging system for plasma diagnostics of Z-pinch facility

A novel EUV four channels normal incidence imaging system for plasma diagnostics of Z-pinch facility was presented in this paper, which consists of four concave mirrors and one convex mirror used for focusing an object onto four different positions with about 30 μm resolution on the same image plane. In addition, this imaging system can work at the energies of 50 eV, 95 eV, 150 eV, and broadband of 50-100 eV by using different multilayer films deposited on the concave and convex mirrors. This instrument, combined with framing camera, can achieve the power of two-dimensional spatial and temporal resolution, as well as the ability to imaging the plasma at the specific temperature. In the paper, the four channels microscope centering at multi-energies was developed.

Nanoscale patterns made by using a 13.5-nm Schwarzschild objective and a laser produced plasma source

Lithium fluoride (LiF) crystal is a very promising candidate as nanometer resolution EUV and soft X-ray detector. Compared with other EUV and soft X-ray detectors, charge coupled device and photographic films, LiF crystal has high resolution, large field of view and wide dynamic range. In this paper, using LiF crystal as EUV detector and a Schwarzschild objective (SO) working at 13.5nm as projection optics, mesh images with 4.2 μm, 1.2 μm and 800 nm line width and pinhole patterns with ~1.5μm diameter are acquired in projection imaging mode and direct writing mode, respectively. Fluorescence intensity profiles of images show that the resolution of mesh image is 900 nm, and the one of pinhole image is 800 nm. In the experiments, a spherical condense mirror based on normal incidence type is used to eliminate the damage and contamination on the masks (mesh and pinhole) caused by the laser plasma, and the energy density is not decreased compared with that the masks are close to the plasma. The development of the SO, the alignment of the objective and the imaging experiments are also reported.

Angle alignment method for soft x-ray using double-periodic multilayer

A double-periodic multilayer method was proposed to test KBA system of 4.75keV using 8keV source. Alignment of angle is the key for most of grazing incidence systems in x-ray range. But for soft x-ray, strong absorption makes the alignment have to be operated in vacuum, which is difficult enough. A double-periodic multilayer was used to experiment at 8keV in air replacing 4.75keV in vacuum. This multilayer includes two parts, the top and the bottom. The top is W/B4C multilayer with four bilayers and 6.93nm periods. The bottom is W/B4C multilayer with 10 bilayers and 3.95nm periods. For 8keV energy, x-ray will penetrate through the top and reflected by the bottom. While for 4.75keV, x-ray will be reflected by the top directly. The full width of half maximum is 0.1° at 8keV and 0.3° at 4.75keV, so it is accurate enough for 4.75keV to experiment at 8keV, which was also verified by the 1-D KBA experiment. This double-periodic multilayer provides a valid solution for alignment in soft x-ray range.