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Barry Gregerson

Entegris

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Publication

Featured researches published by Barry Gregerson.

Archive | 1995

300 mm microenvironment pod with door on side

Barry Gregerson; Brian Wiseman; Gary Gallagher

Archive | 2002

Wafer container washing apparatus

David L. Halbmaier; Barry Gregerson

Archive | 2003

Wafer container cushion system

Gregory W. Bores; Michael C. Zabka; Barry Gregerson

Archive | 2006

Reticle pod with isolation system

Barry Gregerson; David L. Halbmaier; Stephen Sumner; Brian Wiseman; Anthony Mathius Tieben; Justin Strike

Archive | 1995

Shipping and transport cassette with kinematic coupling

Kelly Peterson; Brian Wiseman; Gary Gallagher; Barry Gregerson

Archive | 2006

Substrate container with pressure equalization

Barry Gregerson; David L. Halbmaier; Stephen Sumner; Brian Wiseman; Anthony Mathius Tieben; Justin Strike

Archive | 2007

Magnetic seal for wafer containers

Barry Gregerson

Archive | 2009

Methods and apparatuses for large diameter wafer handling

Barry Gregerson; Michael S. Adams; Jason Todd Steffens

Archive | 2011

Wafer container with door guide and seal

Barry Gregerson; Matthew A. Fuller; Michael S. Adams

Archive | 2014

METHODS AND APPARATUS FOR LARGE DIAMETER WAFER HANDLING

Barry Gregerson; Michael S. Adams; Jason Todd Steffens

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Brian Wiseman

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Gary Gallagher

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Jason Todd Steffens

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Michael S. Adams

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Matthew A. Fuller

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David L. Halbmaier

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Anthony Mathius Tieben

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Justin Strike

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Russ V. Raschke

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Stephen Sumner

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