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Dive into the research topics where Benjamin M. Johnston is active.

Publication


Featured researches published by Benjamin M. Johnston.


Archive | 2009

Laser scribing platform and hybrid writing strategy

Sriram Krishnaswami; Shinichi Kurita; Bassam Shamoun; Benjamin M. Johnston; John M. White; Jiafa Fan; Inchen Huang; Antoine P. Manens; Wei-Sheng Lei; Wei-Yung Hsu


Archive | 2009

Laser-scribing platform

Sriram Krishnaswami; Shinichi Kurita; Bassam Shamoun; Benjamin M. Johnston; John M. White; Jiafa Fan; Inchen Huang


Archive | 2007

Prober for electronic device testing on large area substrates

Sriram Krishnaswami; Matthias Brunner; William Beaton; Yong Liu; Benjamin M. Johnston; Hung T. Nguyen; Ludwig Ledl; Ralf Schmid


Archive | 2012

Cvd mask alignment for oled processing

Ikuo Mori; Shinichi Kurita; Chang-Tsung Lin; Benjamin M. Johnston; Beom Soo Kim


Archive | 2006

In-line electron beam test system

Fayez E. Abboud; Sriram Krishnaswami; Benjamin M. Johnston; Hung T. Nguyen; Matthias Brunner; Ralf Schmid; John M. White; Shinichi Kurita; James Craig Hunter


Archive | 2007

Mini-prober for tft-lcd testing

Benjamin M. Johnston; Sriram Krishnaswami; Hung T. Nguyen; Matthias Brunner; Yong Liu


Archive | 2012

Gas delivery and distribution for uniform process in linear-type large-area plasma reactor

John M. White; Suhail Anwar; Jozef Kudela; Carl A. Sorensen; Tae Kyung Won; Seon-Mee Cho; Soo Young Choi; Beom Soo Park; Benjamin M. Johnston


Archive | 2013

Aluminum coated or ceramic parts for substrate drive system

Shinichi Kurita; Benjamin M. Johnston


Archive | 2005

Substrate support with integrated prober drive

Benjamin M. Johnston; Fayez E. Abboud; Hung T. Nguyen


Archive | 2017

ENVIRONMENTAL CONTROL OF SYSTEMS FOR PHOTOLITHOGRAPHY PROCESS

Benjamin M. Johnston; John M. White; Thomas Laidig

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