Benjawan Kjornrattanawanich

Experimental comparison of extreme-ultraviolet multilayers for solar physics

We compare the reflectance and stability of multilayers comprising either Si/Mo, Si/Mo2C, Si/B4C, Si/C, or Si/SiC bilayers, designed for use as extreme-ultraviolet (EUV) reflective coatings. The films were deposited by using magnetron sputtering and characterized by both x-ray and EUV reflectometry. We find that the new Si/SiC multilayer offers the greatest spectral selectivity at the longer wavelengths, as well as the greatest thermal stability. We also describe the optimization of multilayers designed for the Solar-B EIS instrument. Finally, we compare experimental reflectance data with calculations and conclude that currently available optical constants cannot be used to adequately model the performance of many of these multilayers.

Efficiency of a grazing-incidence off-plane grating in the soft-x-ray region.

Efficiency measurements of a grazing-incidence diffraction grating in the off-plane mount were performed using polarized synchrotron radiation. The grating had 5000 grooves/mm, an effective blaze angle of 14 degrees, and was gold coated. The efficiencies in the two polarization orientations (TM and TE) were measured in the 1.5-5.0 nm wavelength range and were compared with the efficiencies calculated using the PCGrate-SX code. The TM and TE efficiencies differ, offering the possibility of performing unique science studies of astrophysical, solar, and laboratory sources by exploiting the polarization sensitivity of the off-plane grating.

EUV multilayers for solar physics

We present an overview of currently available EUV multilayer coatings that can be used for the construction of solar physics instrumentation utilizing normal-incidence optics. We describe the performance of a variety of Si-based multilayers, including Si/B4C and new Si/SiC films that provide improved performance in the wavelength range from 25 n 35 nm, as well as traditional Si/Mo multilayers, including broad-band coatings recently developed for the Solar-B/EIS instrument. We also outline prospects for operation at both longer and shorter EUV wavelengths, and also the potential of ultra-short-period multilayers that work near normal incidence in the soft X-ray region.

High fidelity blazed grating replication using nanoimprint lithography

We report progress in using nanoimprint lithography to fabricate high fidelity blazed diffraction gratings. Anisotropically etched silicon gratings with 200nm period and 7.5° blaze angle were successfully replicated onto 100mm diameter wafers with subnanometer roughness and excellent profile conformity. Out-of-plane distortion induced by residual stress from polymer films was also analyzed and found to be extremely low. The replicated blazed gratings were tested and demonstrated high x-ray diffraction efficiencies. This process was developed for fabricating blazed diffraction gratings for the NASA Constellation-X x-ray telescope.

Highly sensitive visible-blind extreme ultraviolet Ni/4H-SiC Schottky photodiodes with large detection area

Ni/4H-SiC Schottky photodiodes of 5 mm x 5 mm area have been fabricated and characterized. The photodiodes show less than 0.1 pA dark current at -4 V and an ideality factor of 1.06. A quantum efficiency (QE) between 3 and 400 nm has been calibrated and compared with Si photodiodes optimized for extreme ultraviolet (EUV) detection. In the EUV region, the QE of SiC detectors increases from 0.14 electrons/photon at 120 nm to 30 electrons/photon at 3 nm. The mean energy of electron-hole pair generation of 4H-SiC estimated from the spectral QE is found to be 7.9 eV.

Response of a SiC Photodiode to Extreme Ultraviolet through Visible Radiation

The responsivity of a type 6H-SiC photodiode in the 1.5-400 nm wavelength range was measured using synchrotron radiation. The responsivity was 0.20 A/W at 270 nm and was less than 0.10 A/W in the extreme ultraviolet (EUV) region. The responsivity was calculated using a proven optical model that accounted for the reflection and absorption of the incident radiation and the variation of the charge collection efficiency (CCE) with depth into the device. The CCE was determined from the responsivity measured in the 200-400 nm wavelength range. By use of this CCE and the effective pair creation energy (7.2 eV) determined from x-ray absorption measurements, the EUV responsivity was accurately modeled with no free parameters. The measured visible-light sensitivity, although low compared with that of a silicon photodiode, was surprisingly high for this wide bandgap semiconductor.

Normal-incidence efficiencies of multilayer-coated laminar gratings for the Extreme-Ultraviolet Imaging Spectrometer on the Solar-B mission

The normal-incidence efficiencies of two laminar gratings and the reflectances of two parabolic mirrors with matching multilayer coatings were measured by monochromatic synchrotron radiation and were compared with modeling calculations. These optics were developed for the Extreme-Ultraviolet Imaging Spectrometer to be launched on the Japanese Solar-B mission. Each optic has two sectors coated with Mo/Si multilayers that reflect the 17-21-nm and 25-29-nm wave bands at normal incidence. The measured peak grating efficiencies are in the 8%-12% range and are in good agreement with efficiency calculations that account for the effects of groove profile and the microroughness as determined by atomic force microscopy.

Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory

We present experimental results on the development and testing of the extreme ultraviolet (EUV) reflective multilayer coatings that will be used in the Atmospheric Imaging Assembly (AIA) instrument. The AIA, comprising four normal incidence telescopes, is one of three instruments aboard the Solar Dynamics Observatory mission, part of NASAs Living with a Star program, currently scheduled for launch in 2008. Seven different multilayer coatings will be used, covering the wavelength region from 93.9 to 335.4 Å.

Optical constants determination of neodymium and gadolinium in the 3-nm to 100-nm wavelength range

The optical constants (n, k) of the wavelength-dependent index of refraction N = n+ik = 1-δ+ik of Nd (Neodymium) and Gd (Gadolinium) are determined in the wavelength range of 3 nm to 100 nm by the transmittance method using synchrotron radiation. Nd and Gd films with thicknesses ranging from 5 nm to 180 nm were fabricated on Si photodiodes (which served as the coating substrates as well as the detectors) and capped with Si layers to protect these reactive rare earth elements from oxidation. The imaginary part (k) obtained directly from the transmittance measurement is used in the derivation of the real part (δ) of the complex index of refraction N through the Kramers- Kronig integral. The measured optical constants are used in the design of currently developed Nd- and Gd-based multilayers for solar imaging applications. Our results on Nd and Gd optical constants and the reflectance of some Nd- and Gd-based multilayers are presented.

SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging

Narrowband SiC/Tb and Si/Tb multilayers are fabricated with as much as a 23% normal-incidence reflectance near a 60 nm wavelength and spectral bandpass (FWHM) values of 9.4 and 6.5 nm, respectively. The structural properties of the films are investigated using extreme ultraviolet and x-ray reflectometry and transmission electron microscopy. Thermal stability is investigated in films annealed to as high as 300 degrees C. Because of their superior thermal stability, relatively high reflectance, and narrower spectral bandpass, Si/Tb multilayers are identified as optimal candidates for solar physics imaging applications, where the peak response can be tuned to important emission lines such as O v near 63.0 nm and Mg x near 61.0 nm. We describe our experimental procedures and results, discuss the implications of our findings, and outline prospects for improved performance.