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Bernard Diem

French Alternative Energies and Atomic Energy Commission

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Publication

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Design, test, and microfabrication of MEMS and MOEMS. Conference | 1999

Examples of MEMS technologies resulting in industrial transfers

Jean-Sebastian Danel; Michel Borel; Marie-Therese Delaye; Bernard Diem; Hubert Grange; Patrice Rey; Sylvie Viollet-Bosson

We present here three technological processes developed by LETI which have resulted in successful industrial transfers for MEMS.

Sensors and Actuators A-physical | 1995

SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators

Bernard Diem; P. Rey; S. Renard; S. Viollet Bosson; H. Bono; F. Michel; M.T. Delaye; G. Delapierre

Archive | 1997

Manufacturing process of strain gauge sensor using the piezoresistive effect

Bernard Diem; Sylvie Viollet-Bosson; Patricia Touret

Archive | 2001

Micro-machined mechanical structure and device incorporating the structure

Elisabeth Orsier; Bernard Diem; Hélène Wehbe-Alause; Olivier Lefort

Archive | 1989

Active matrix color display screen without crossing of address line conductors and command column conductors

Bernard Diem; Thierry Leroux

Archive | 2009

HETEROGENEOUS SUBSTRATE INCLUDING A SACRIFICIAL LAYER, AND A METHOD OF FABRICATING IT

François Perruchot; Bernard Diem; Vincent Larrey; L. Clavelier; Emmanuel Defay

Archive | 2009

METHOD OF FABRICATING A MEMS/NEMS ELECTROMECHANICAL COMPONENT

François Perruchot; Bernard Diem; Vincent Larrey; Laurent Clavelier; Emmanuel Defay

Archive | 2005

MEMS device and method of fabrication

Gary G Li; Bishnu P. Gogoi; Hemant D. Desai; Jonathan Hale Hammond; Bernard Diem

Archive | 2010

CAVITY CLOSURE PROCESS FOR AT LEAST ONE MICROELECTRONIC DEVICE

Gilles Delapierre; Bernard Diem; François Perruchot

Archive | 2009

Method of fabricating an electromechanical device including at least one active element

François Perruchot; Bernard Diem; Vincent Larrey; L. Clavelier; Emmanuel Defay

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Bishnu P. Gogoi

Freescale Semiconductor

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Gary G Li

Freescale Semiconductor

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Hemant D. Desai

Freescale Semiconductor

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Jonathan Hale Hammond

Freescale Semiconductor

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