Bernd Koehler

Detection of buried reference structures by use of atomic force acoustic microscopy

The miniaturization of micro- and nanoelectronic components requires new methods for the inspection of buried inner structures at the nanoscale. We used the atomic force acoustic microscopy technique (AFAM) to image subsurface defects. This technique combines high lateral resolution with the capability to determine local elastic properties of materials near the surface. As the structures buried near the surface change the effective tip-sample contact stiffness it is possible to detect them. For the verification of the detection capabilities of AFAM we fabricated well-defined buried void structures with different geometries and dimensions. Large, thin, plate like structures of silicon nitride with a local filling were our first test samples. Then, sets of nine small, square, thin plates with thicknesses increasing stepwise from 30 to 270 nm were etched in a thinned silicon wafer. The last two samples contained wedge structures of widths varying between 1.6 and 10 μm. Our results showed that it was possible to detect buried void structures at depths between 180 and 900 nm. We also observed that the depths at which the buried defects can be detected by the use of the AFAM method depend on the defect dimensions and geometry, and on the mismatch in the elastic properties of the sample and the defects. The experimental results obtained for the groups of small, thin plates were verified by quantitative analysis via finite element method (FEM) simulations.

Design, technology, and application of integrated piezoresistive scanning thermal microscopy (SThM) microcantilever

In this article we describe a novel piezoresistive cantilever technology The described cantilever can be also applied in the investigations of the thermal surface properties in all Scanning Thermal Microscopy (SThM) techniques. Batch lithography/etch patterning process combined with focused ion beam (FIB) modification allows to manufacture thermally active, resistive tips with a nanometer radius of curvature. This design makes the proposed nanoprobes especially attractive for their application in the measurement of the thermal behavior of micro- and nanoelectronic devices. Developed microcantilever is equipped with piezoresistive deflection sensor. The proposed architecture of the cantilever probe enables easy its easy integration with micro- and nanomanipulators and scanning electron microscopes.In order to approach very precisely the microcantilever near to the location to be characterized, it is mounted on a compact nanomanipulator based on a novel mobile technology. This technology allows very stable positioning, with a nanometric resolution over several centimeters which is for example useful for large samples investigations. Moreover, thanks to the vacuum-compatibility, the experiments can be carried out inside scanning electron microscopes.

Numerical Modeling of Elastic Wave Propagation in Random Particulate Composites

Elastic wave propagation in a random particulate composite is a very complex phenomenon. In such a material, the application of ultrasonic nondestructive testing methods is difficult due to the multiple scattering processes, the strong backscattering from the aggregates, the frequency dependent attenuation and dispersion of the coherent wave fields and the mode conversions between pressure, shear and Rayleigh waves. Therefore, the interpretation of the received signals is complicated and the signal to noise ratio is low. In order to improve the applicability of pulse-echo and impact-echo testing methods and to optimize inverse reconstruction techniques, it is necessary to study the process of wave propagation systematically.

Where x-ray imaging fails - delamination, crack, and micro-pore detection using ultrasonic reflection tomography in a scanning acoustic microscope

In recent years x-ray imaging techniques have dramatically expanded their range of applications. However, there are still specific problems where x-ray techniques fail due to fundamental physical reasons. These “no-go” applications can be divided into three main categories, (i) applications in which the x-ray absorption is too large, so that no significant transmission signal can be detected (e.g. pores in high density materials like tungsten carbide), (ii) applications in which the die gap of a planar delamination or a micro-crack is so much smaller than the transmitted thickness that no significant change in X-ray transmission can be observed (e.g. micro-cracks with nanometer die gaps), (iii) applications in which the absorption contrast between adjacent materials is too small to be detected (e.g. silicon chip/mold compound combinations). Most of the above mentioned applications can be successfully treated by using high-frequency scanning acoustic microscopy (SAM). These ultrasonic microscopes are typically working in the frequency range between 10 and 400 MHz and are using differences in acoustic impedance for imaging purposes.

Nanomaterials produced by laser ablation techniques. Part I: Synthesis and passivation of nanoparticles

We have formed nanoparticles of Si, C, Ti, and Fe by pulsed laser ablation and have explored the feasibility of passivating these particles during the synthesis process in order to minimize particle coarsening. Passivation was done by forming the nanoparticles in an Ar/N2 background, which allowed the formation of a thin nitride layer on the nanoparticle surface. In this paper we describe the synthesis procedure for synthesizing and passivating the nanoparticles. The characterization results indicate the nanoparticle synthesis in N2 does not significantly affect agglomeration.

Numerical time-domain simulation of wave propagation and scattering in acoustic microscopy for subsurface defect characterization

A numerical model of an acoustic microscope based on the elastodynamic finite integration technique (EFIT) is presented. It allows time-domain simulations of elastic wave propagation in both, fluids and solids, and includes focusing of the incident wave field as well as scattering at defects and the fluid-solid interface taking mode converted echoes and leaky Rayleigh waves into account. The simulations can be performed for different frequencies and materials and can be used for the continuous and time-resolved mode as well as for transmission and reflection microscopy. The simulation results can be represented by time-domain signals and wave front snapshots. The formation of V(r,z) curves is also possible. In the present paper the simulations are applied to the problem of vertical cracks and spherical inclusions in a solid substrate as well as for subsurface characterization of thin coatings.

Third Order Elastic Constants and Rayleigh Wave Dispersion of Shot Peened Aero-Engine Materials

Aero-engine components exposed to high mechanical stresses are made of high-strength alloys and additionally, they are surface treated by shot peening. This process introduces compressive residual stress into the material making it less sensitive to stress corrosion cracking and fatigue and therefore benefits the components performance and lifetime. Moreover cold work is induced in an amount depending on the peening parameters. To approximate the remaining lifetime, a quantitative, non-destructive method for stress assessment is required. It was shown that surface treatment of such alloys can be characterized by broadband Rayleigh wave dispersion measurements. However, the relative contributions of residual stress and cold work, respectively, remained an open point. This paper presents the determination of third order elastic constants (TOEC) for IN718 and Ti6246, providing, together with a model for the inversion of dispersion data, a quantitative access to the acoustoelastic effect. Finally, some measurements of differently treated samples are given.

Nanomaterials produced by laser ablation techniques. Part II: High spatially resolved nondestructive characterization of nanostructures

We studied nanoparticles by several high resolution microscopic methods as scanning electron microscopy (SEM), transmission electron microscopy (TEM) and scanning probe techniques especially atomic force microscopy (AFM) in contact and non-contact mode. While AFM in non-contact mode gives reliable information for 100 nm range nanoparticles it fails for smaller particles, showing lack of reproducibility. TEM and SEM prove to be reliable. By SEM imaging the agglomeration behavior and the structure of agglomerates are discussed in detail.

Application of photo and particle acoustic methods

Several work performed at the Fraunhofer Institute IZFP Dresden on photo and particle acoustic methods is presented. It includes both, modeling activities by an explicit numerical method (CEFIT) and experimental work. The given examples of applied excitations are photons (Laser acoustics) and electrons (Scanning Electron Acoustic Microscopy, SEAM). Both, time resolved measurements by pulse excitation as well as monofrequent measurements by periodic excitation together with signal recovery (lock-in technique) are discussed.

Extraction of Depth Profiles of Third Order Elastic Constants in Cracked Media

Elastic constants of components are usually determined by tensile tests in combination with ultrasonic experiments. However, these properties may change due to e.g. mechanical treatments or service conditions during their lifetime. Knowledge of the actual material parameters is key to the determination of quantities like residual stresses present in the medium. In this work the acoustic nonlinearity parameter (ANP) for surface acoustic waves is examined through the derivation of an evolution equation for the amplitude of the second harmonic. Given a certain depth profile of the third-order elastic constants, the dependence of the ANP with respect to the input frequency is determined and on the basis of these results, an appropriate inversion method is developed. This method is intended for the extraction of the depth dependence of the third-order elastic constants of the material from second-harmonic generation and guided wave mixing experiments, assuming that the change in the linear Rayleigh wave veloci...