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Berndt Warm

Carl Zeiss AG

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Archive | 2009

Illumination optics for euv microlithography and illumination system and projection exposure apparatus comprising an illumination optics of this type

Damian Fiolka; Berndt Warm; Christian Steigerwald; Martin Endres; Ralf Stützle; Jens Ossmann; Ralf Scharnweber; Markus Hauf; Udo Dinger; Severin Waldis; Marc Kirch; Joachim Hartjes

Archive | 2008

Method for producing facet mirrors and projection exposure apparatus

Berndt Warm; Sigfried Rennon; Udo Dinger; Juergen Baier; Stefan Burkart; Christos Kourouklis; Hin Yiu Anthony Chung; Stefan Wiesner; Hartmut Enkisch; Guenther Dengel

Archive | 2009

Illuminating optic for euv microlithography

Guenther Dengel; Gero Wittich; Udo Dinger; Ralf Stuetzle; Martin Endres; Jens Ossmann; Berndt Warm

Archive | 2007

ILLUMINATION OPTICS FOR PROJECTION MICROLITHOGRAPHY

Berndt Warm; Guenther Dengel

Archive | 2010

Illumination optics for EUV microlithography and related system and apparatus

Damian Fiolka; Berndt Warm; Christian Steigerwald; Martin Endres; Ralf Stuetzle; Jens Ossmann; Ralf Scharnweber; Markus Hauf; Udo Dinger; Severin Waldis; Marc Kirch; Joachim Hartjes

Archive | 2011

ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY

Guenther Dengel; Gero Wittich; Udo Dinger; Ralf Stuetzle; Martin Endres; Jens Ossmann; Berndt Warm

Archive | 2009

Beleuchtungsoptik für die EUV-Mikrolithografie sowie Beleuchtungssystem und Projektionsbelichtungsanlage mit einer derartigen Beleuchtungsoptik

Damian Fiolka; Berndt Warm; Christian Steigerwald; Martin Endres; Ralf Stützle; Jens Ossmann; Ralf Scharnweber

Archive | 2007

MICROLITHOGRAPHY ILLUMINATION SYSTEMS, COMPONENTS AND METHODS

Berndt Warm; Guenther Dengel

Archive | 2010

Optical element with at least one electrically conductive region, and illumination system with the optical element

Dirk Heinrich Ehm; Berndt Warm

Archive | 2007

Illumination lens for an EUV projection microlithography, projection exposure apparatus and method for manufacturing microstructured component

Berndt Warm; Günther Dengel

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