Berthold Michelt | Researchain

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Berthold Michelt is active.

Explore More

Publication

Featured researches published by Berthold Michelt.

Archive | 2012

TEST DEVICE FOR TESTING A BONDING LAYER BETWEEN WAFER-SHAPED SAMPLES AND TEST PROCESS FOR TESTING THE BONDING LAYER

Martin Schönleber; Berthold Michelt

Archive | 2005

Calibration of a surface measurement system

Berthold Michelt; Matthias Kunkel

Archive | 2015

OPTICAL MEASURING METHOD AND MEASURING DEVICE HAVING A MEASURING HEAD FOR CAPTURING A SURFACE TOPOGRAPHY BY CALIBRATING THE ORIENTATION OF THE MEASURING HEAD

Martin Schönleber; Berthold Michelt; Matthias Kunkel

Archive | 2011

Monitoring apparatus and method for in-situ measurement of wafer thicknesses for monitoring the thinning of semiconductor wafers and thinning apparatus comprising a wet etching apparatus and a monitoring apparatus

Claus Dusemund; Martin Schoenleber; Berthold Michelt; Christoph Dietz

Archive | 2011

Monitoring device and method for in situ measuring wafer thicknesses for monitoring a thinning of semiconductor wafers and thinning device comprising a wet etching unit and a monitoring device

Claus Dusemund; Martin Schönleber; Berthold Michelt; Christoph Dietz

Archive | 2012

Prüfverfahren zum Prüfen einer Verbindungsschicht zwischen waferförmigen Proben

Martin Schönleber; Berthold Michelt

Archive | 2012

Optisches Messverfahren und optische Messvorrichtung zum Erfassen einer Oberflächentopographie

Martin Schönleber; Berthold Michelt; Matthias Kunkel

Archive | 2011

Überwachungsvorrichtung und Verfahren für ein in-situ Messen von Waferdicken zum Überwachen eines Dünnens von Halbleiterwafern sowie Dünnungsvorrichtung mit einer Nassätzeinrichtung und einer Überwachungsvorrichtung

Christoph Dietz; Claus Dusemund; Berthold Michelt; Martin Schönleber

Archive | 2014

Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object

Berthold Michelt; Matthias Kunkel

Archive | 2007

Device and method for the contactless measurement of at least one curved surface

Berthold Michelt; Matthias Kunkel; Christoph Dietz

Explore More

Collaboration

Dive into the Berthold Michelt's collaboration.

Explore More

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot

Dive into the research topics where Berthold Michelt is active.

Publication

Featured researches published by Berthold Michelt.

TEST DEVICE FOR TESTING A BONDING LAYER BETWEEN WAFER-SHAPED SAMPLES AND TEST PROCESS FOR TESTING THE BONDING LAYER

Calibration of a surface measurement system

OPTICAL MEASURING METHOD AND MEASURING DEVICE HAVING A MEASURING HEAD FOR CAPTURING A SURFACE TOPOGRAPHY BY CALIBRATING THE ORIENTATION OF THE MEASURING HEAD

Monitoring apparatus and method for in-situ measurement of wafer thicknesses for monitoring the thinning of semiconductor wafers and thinning apparatus comprising a wet etching apparatus and a monitoring apparatus

Monitoring device and method for in situ measuring wafer thicknesses for monitoring a thinning of semiconductor wafers and thinning device comprising a wet etching unit and a monitoring device

Prüfverfahren zum Prüfen einer Verbindungsschicht zwischen waferförmigen Proben

Optisches Messverfahren und optische Messvorrichtung zum Erfassen einer Oberflächentopographie

Überwachungsvorrichtung und Verfahren für ein in-situ Messen von Waferdicken zum Überwachen eines Dünnens von Halbleiterwafern sowie Dünnungsvorrichtung mit einer Nassätzeinrichtung und einer Überwachungsvorrichtung

Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object

Device and method for the contactless measurement of at least one curved surface

Collaboration

Dive into the Berthold Michelt's collaboration.