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Blake Koelmel

Applied Materials

Publication

Featured researches published by Blake Koelmel.

Archive | 2008

Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber

Blake Koelmel; Alexander N. Lerner; Joseph M. Ranish; Kedarnath Sangam; Khurshed Sorabji

Archive | 2011

Transparent reflector plate for rapid thermal processing chamber

Blake Koelmel; Aaron Muir Hunter; Alexander N. Lerner

Archive | 2009

Apparatus including heating source reflective filter for pyrometry

Joseph M. Ranish; Aaron Muir Hunter; Blake Koelmel

Archive | 2010

Non-contact substrate processing

Blake Koelmel; Nyi O. Myo

Archive | 2009

Rapid thermal processing chamber with micro-positioning system

Khurshed Sorabji; Joseph M. Ranish; Wolfgang Aderhold; Aaron Muir Hunter; Blake Koelmel; Alexander N. Lerner; Nir Merry

Archive | 2009

Apparatus and Method for Improved Control of Heating and Cooling of Substrates

Blake Koelmel; Norman L. Tam; Joseph M. Ranish

Archive | 2012

Apparatus and method of aligning and positioning a cold substrate on a hot surface

Blake Koelmel; Abhilash J. Mayur; Kai Ma; Alexander N. Lerner

Archive | 2010

Millisecond annealing (DSA) edge protection

Blake Koelmel; Robert C. Mcintosh; David Larmagnac; Alexander N. Lerner; Abhilash J. Mayur; Joseph Yudovsky

Archive | 2009

High temperature vacuum chuck assembly

Alexander N. Lerner; Blake Koelmel; Mehran Behdjat

Archive | 2009

METHOD AND APPARATUS FOR DETECTING THE SUBSTRATE TEMPERATURE IN A LASER ANNEAL SYSTEM

Blake Koelmel; Abhilash J. Mayur

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