Brian J. Ree

Structural reliability evaluation of low-k nanoporous dielectric interlayers integrated into microelectronic devices

As integrated microelectronic circuit device dimensions continue to shrink, low dielectric constant (low-k) interlayer dielectrics are required for minimizing RC signal delay, capacitive coupling noise, and power consumption. The implementation of low-k materials in an interconnected structure, however, is known to be a very difficult task because of many criteria imposed by the structural functionality and the integration process. Here, we report structural reliability evaluation for the integration of low-k nanoporous organosillicate dielectrics into a multilayer structure, involving capping, chemical mechanical polishing (CMP), post-CMP cleaning, and thermal annealing processes. We have successfully investigated the structural reliability of the low-k dielectric layer subjected to such harsh processes using synchrotron grazing incidence X-ray scattering and reflectivity (GIXS and XR) analyses. This study additionally demonstrated that synchrotron GIXS and XR techniques are very powerful tools for providing valuable, accurate insight into the nanopore structure in low-k dielectric thin layers and the structural changes with the integration process conditions.

Self-Assembled Aptamer Nanoconstruct: A Highly Effective Molecule-Capturing Platform Having Therapeutic Applications

Although the aptamer is a promising tool for binding and controlling the activity of a specific target molecule, its relatively low stability and capturing efficiency are major obstacles for its direct use in therapeutic applications. Herein, a 3D molecular capture system named the “constructed aptamer (CA)” is reported, which is formulated by the self‐assembly of the human vascular endothelial growth factor (hVEGF) aptamer block and Y‐shaped DNA blocks. The serum stability and target capturing efficiency exhibited by the CA are greater than that observed with the oligomeric aptamer and randomly amplified aptamer. In addition, successful intracellular uptake is observed by confocal laser scanning microscopy using fluorescence labeled CA. Finally, an enhanced antitumor effect is demonstrated in vivo, owing to the efficient inhibition of angiogenesis. Overall, the designed CA has great potential as a therapeutic platform for capturing a specific disease‐related molecule such as VEGF.

CHAPTER 5:Nonconjugated Polymers with Electroactive Chromophore Pendants

Recently, polymers have attracted significant attention because their dimensions can easily be miniaturized and their properties can easily be tailored through chemical synthesis, which are critical advantages over inorganic silicon- and metal-oxide-based materials for memory device applications. In this chapter, the recent development of nonconjugated polymers with electroactive chromophore pendants is reviewed. Their memory mode and performance are discussed with insights into their switching mechanisms. Many p-type polymers have been reported in the literature whereas n-type polymers are rare. Thus, there is a need to put more effort into developing high performance n-type memory polymers. In addition, it is noted that understanding the detailed relationships between chemical and morphological structures, electrical memory mode, and performance remains an urgent challenge to the progress of developing higher memory performance polymers.