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Brian Saxton Underwood

Applied Materials

Publication

Featured researches published by Brian Saxton Underwood.

Archive | 2012

Doping of dielectric layers

Brian Saxton Underwood; Nitin K. Ingle; Abhijit Basu Mallick

Archive | 2012

Flowable silicon-carbon-nitrogen layers for semiconductor processing

Abhijit Basu Mallick; Nitin K. Ingle; Linlin Wang; Brian Saxton Underwood

Archive | 2012

TREATMENTS FOR DECREASING ETCH RATES AFTER FLOWABLE DEPOSITION OF SILICON-CARBON-AND-NITROGEN-CONTAINING LAYERS

Brian Saxton Underwood; Linlin Wang; Sanjay Kamath; Abhijit Basu Mallick; Nitin K. Ingle

Archive | 2012

LOW COST FLOWABLE DIELECTRIC FILMS

Amit Chatterjee; Abhijit Basu Mallick; Nitin K. Ingle; Brian Saxton Underwood; Kiran V. Thadani; Xiaolin Chen; Abhishek Dube; Jingmei Liang

Archive | 2014

HDD patterning using flowable CVD film

Brian Saxton Underwood; Abhijit Basu Mallick; Nitin K. Ingle; Roman Gouk; Steven Verhaverbeke

Archive | 2013

CHEMICAL LINKERS TO IMPART IMPROVED MECHANICAL STRENGTH TO FLOWABLE FILMS

Brian Saxton Underwood; Abhijit Basu Mallick; Nitin K. Ingle

Archive | 2014

CARBON FILM STRESS RELAXATION

Brian Saxton Underwood; Abhijit Basu Mallick

Archive | 2016

DEPOSITION OF SILICON AND OXYGEN-CONTAINING FILMS WITHOUT AN OXIDIZER

Brian Saxton Underwood; Abhijit Basu Mallick

Archive | 2012

Molecular layer deposition of silicon carbide

Brian Saxton Underwood; Abhijit Basu Mallick; Nitin K. Ingle

Archive | 2017

UV-ASSISTED MATERIAL INJECTION INTO POROUS FILMS

Brian Saxton Underwood; Abhijit Basu Mallick

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