C. C. Liu

Development of SiC-based Gas Sensors for Aerospace Applications

Silicon carbide (SiC) based gas sensors have the ability to meet the needs of a range of aerospace applications including leak detection, environmental control, emission monitoring, and fire detection. While each of these applications require that the sensor and associated packaging be tailored for that individual application, they all require sensitive detection. The sensing approach taken to meet these needs is the use of SiC as a semiconductor in a Schottky diode configuration due to the demonstrated high sensitivity of Schottky diode-based sensors. However, Schottky diode structures require good control of the interface between the gas sensitive metal and SiC in order to meet required levels of sensitivity and stability. Two examples of effort to better control the SiC gas sensitive Schottky diode interface will be discussed. First, the use of chrome carbide as a barrier layer between the metal and SiC is discussed. Second, we report the first use of atomically flat SiC to provide an improved SiC semiconductor surface for gas sensor deposition. An example of the demonstration of a SiC gas sensor in an aerospace applications is given. It is concluded that, while significant progress has been made, the development of SiC gas sensor systems is still at a relatively early level of maturity for a number of applications.

Smart sensor systems for human health breath monitoring applications.

Breath analysis techniques offer a potential revolution in health care diagnostics, especially if these techniques can be brought into standard use in the clinic and at home. The advent of microsensors combined with smart sensor system technology enables a new generation of sensor systems with significantly enhanced capabilities and minimal size, weight and power consumption. This paper discusses the microsensor/smart sensor system approach and provides a summary of efforts to migrate this technology into human health breath monitoring applications. First, the basic capability of this approach to measure exhaled breath associated with exercise physiology is demonstrated. Building from this foundation, the development of a system for a portable asthma home health care system is described. A solid-state nitric oxide (NO) sensor for asthma monitoring has been identified, and efforts are underway to miniaturize this NO sensor technology and integrate it into a smart sensor system. It is concluded that base platform microsensor technology combined with smart sensor systems can address the needs of a range of breath monitoring applications and enable new capabilities for healthcare.

INTELLIGENT CHEMICAL SENSOR SYSTEMS FOR IN-SPACE SAFETY APPLICATIONS

Future in-space and lunar operations will require significantly improved monitoring and Integrated System Health Management (ISHM) throughout the mission. In particular, the monitoring of chemical species is an important component of an overall monitoring system for space vehicles and operations. For example, in leak monitoring of propulsion systems during launch, inspace, and on lunar surfaces, detection of low concentrations of hydrogen and other fuels is important to avoid explosive conditions that could harm personnel and damage the vehicle. Dependable vehicle operation also depends on the timely and accurate measurement of these leaks. Thus, the development of a sensor array to determine the concentration of fuels such as hydrogen, hydrocarbons, or hydrazine as well as oxygen is necessary. Work has been on-going to develop an integrated smart leak detection system based on miniaturized sensors to detect hydrogen, hydrocarbons, or hydrazine, and oxygen. The approach is to implement Microelectromechanical Systems (MEMS) based sensors incorporated with signal conditioning electronics, power, data storage, and telemetry enabling intelligent systems. The final sensor system will be self-contained with a surface area comparable to a postage stamp. This paper discusses the development of this “Lick and Stick” leak detection system and it’s application to In-Space Transportation and other Exploration applications.

Smart Sensor Systems

Sensors and sensor systems are vital to our awareness of our surroundings and provide safety, security, and surveillance, as well as enable monitoring of our health and environment. A transformative advance in the field of sensor technology has been the development of “Smart Sensor Systems”. The definition of a Smart Sensor may vary, but typically at a minimum a Smart Sensor is the combination of a sensing element with processing capabilities provided by a microprocessor. That is, Smart Sensors are basic sensing elements with embedded intelligence. The sensor signal is fed to the microprocessor, which processes the data and provides an informative output to an external user. A more expansive view of a Smart Sensor System, which is used in this article, is illustrated in Fig. 19.1: a complete self-contained sensor system that includes the capabilities for logging, processing with a model of sensor response and other data, self-contained power, and an ability to transmit or display informative data to an outside user. The fundamental idea of a smart sensor is that the integration of silicon microprocessors with sensor technology cannot only provide interpretive power and customized outputs, but also significantly improve sensor system performance and capabilities.

Chemical Sensors Based on Metal Oxide Nanostructures

This paper is an overview of sensor development based on metal oxide nanostructures. While nanostructures such as nanorods show significan t potential as enabling materials for chemical sensors, a number of s ignificant technical challenges remain. The major issues addressed in this work revolve around the ability to make workable sensors. This paper discusses efforts to address three technical barriers related t o the application of nanostructures into sensor systems: 1) Improving contact of the nanostructured materials with electrodes in a microse nsor structure; 2) Controling nanostructure crystallinity to allow co ntrol of the detection mechanism; and 3) Widening the range of gases that can be detected by using different nanostructured materials. It is concluded that while this work demonstrates useful tools for furt her development, these are just the beginning steps towards realizati on of repeatable, controlled sensor systems using oxide based nanostr uctures.

Novel processing of NASICON and sodium carbonate/barium carbonate thin and thick films for a CO2 microsensor

The use of chemical microsensors can be advantageous for the monitoring of gas species in efforts to accurately monitor environmental conditions, detect fires, and determine emissions. The microsensor described herein shows promise for use as a carbon dioxide sensor. Carbon dioxide levels are of particular concern for passenger environments, as a chemical signature of a fire, and as a combustion product.This amperometric carbon dioxide microsensor was produced using microfabrication and micromachining techniques. Electron beam evaporation, sputtering, and thick film printing were used for deposition of the chemically active layers of the device—Na3Zr2Si2PO12 (NASICON) and Na2CO3/Ba2CO3. The deposition techniques used to deposit these materials were an important processing advance in this development endeavor. The films were incorporated into an amperometric, limiting current type sensor design with overall dimensions of 1.4 mm × 1.5 mm. The inclusion of this type of sensor in an array of differing sensors offers an advantage of high selectivity to analytes of interest.

A hydrogen leak detection system for aerospace and commercial applications

Leaks on the space shuttle while on the launch pad have generated interest in hydrogen leak monitoring technology. Microfabricated hydrogen sensors are being fabricated at Case Western Reserve University (CWRU) and tested at NASA Lewis Research Center (LeRC). These sensors have been integrated into hardware and software designed by Aerojet. This complete system allows for multipoint leak monitoring designed to provide leak source and magnitude information in real time. The monitoring system processes data from the hydrogen sensors and presents the operator with a visual indication of the leak location and magnitude. Although the leak monitoring system was designed for hydrogen propulsion systems, the possible applications of this monitoring system are wide ranged. This system is in operation in an automotive application which requires high sensitivity to hydrogen.

Miniaturized Amperometric Solid Electrolyte Carbon Dioxide Sensors

A miniaturized electrochemical carbon dioxide (CO2) sensor using Na3Z r2Si2PO12 (NASICON) as a solid electrolyte has been fabricated and de monstrated. Microfabrication techniques were used for sensor fabricat ion to yield a sensing area around 1.0 mm x 1.1 mm. The NASICON solid electrolyte and the Na2CO3/BaCO3 (1:1.7 molar ratio) auxiliary elect rolyte were deposited by sputtering in between and on top of the inte rdigitated finger-shaped platinum electrodes. This structure maximize s the length of the three-phase boundary (electrode, solid electrolyt e, and auxiliary electrolyte), which is critical for gas sensing. The robust CO2 sensor operated up to 600 C in an amperometric mode and a ttempts were made to optimize sensor operating parameters. Concentrat ions of CO2 between 0.02% and 4% were detected and the overall sensor performance was evaluated. Linear response of sensor current output to ln[CO2 concentration] ranging from 0.02% to 1% was achieved.

Microfabricated Hydrogen Sensor Technology for Aerospace and Commercial Applications

Leaks on the Space Shuttle while on the Launch Pad have generated interest in hydrogen leak monitoring technology. An effective leak monitoring system requires reliable hydrogen sensors, hardware, and software to monitor the sensors. The system should process the sensor outputs and provide real-time leak monitoring information to the operator. This paper discusses the progress in developing such a complete leak monitoring system. Advanced microfabricated hydrogen sensors are being fabricated at Case Western Reserve University (CWRU) and tested at NASA Lewis Research Center (LeRC) and Gencorp Aerojet (Aerojet). Changes in the hydrogen concentrations are detected using a PdAg on silicon Schottky diode structure. Sensor temperature control is achieved with a temperature sensor and heater fabricated onto the sensor chip. Results of the characterization of these sensors are presented. These sensors can detect low concentrations of hydrogen in inert environments with high sensitivity and quick response time. Aerojet is developing the hardware and software for a multipoint leak monitoring system designed to provide leak source and magnitude information in real time. The monitoring system processes data from the hydrogen sensors and presents the operator with a visual indication of the leak location and magnitude. Work has commenced on integrating the NASA LeRC-CWRU hydrogen sensors with the Aerojet designed monitoring system. Although the leak monitoring system was designed for hydrogen propulsion systems, the possible applications of this monitoring system are wide ranged. Possible commercialization of the system will also be discussed.

Development of High Temperature Gas Sensor Technology

The measurement of engine emissions is important for their monitoring and control. However, the ability to measure these emissions in-situ is limited. We are developing a family of high temperature gas sensors which are intended to operate in harsh environments such as those in an engine. The development of these sensors is based on progress in two types of technology: 1) The development of SiC-based semiconductor technology. 2) Improvements in micromachining and microfabricarion technology. These technologies are being used to develop point-contact sensors to measure gases which are important in emission control especially hydrogen, hydrocarbons, nitrogen oxides, and oxygen. The purpose of this paper is to discuss the development of this point-contact sensor technology. The detection of each type of gas involves its own challenges in the fields of materials science and fabrication technology. Of particular importance is sensor sensitivity, selectivity, and stability in long-term, high temperature operation. An overview is presented of each sensor type with an evaluation of its stage of development. It is concluded that this technology has significant potential for use in engine applications but further development is necessary.© 1997 ASME