C. Calaza

Silicon nanowire arrays as thermoelectric material for a power microgenerator

A novel design of a silicon-based thermoelectric power microgenerator is presented in this work. Arrays of silicon nanowires, working as thermoelectric material, have been integrated in planar uni-leg thermocouple microstructures to convert waste heat into electrical energy. Homogeneous, uniformly dense, well-oriented and size-controlled arrays of silicon nanowires have been grown by chemical vapor deposition using the vapor–liquid–solid mechanism. Compatibility issues between the nanowire growth method and microfabrication techniques, such as electrical contact patterning, are discussed. Electrical measurements of the nanowire array electrical conductivity and the Seebeck voltage induced by a controlled thermal gradient or under harvesting operation mode have been carried out to demonstrate the feasibility of the microdevice. A resistance of 240 Ω at room temperature was measured for an array of silicon nanowires 10 µm -long, generating a Seebeck voltage of 80 mV under an imposed thermal gradient of 450 °C, whereas only 4.5 mV were generated under a harvesting operation mode. From the results presented, a Seebeck coefficient of about 150–190 µV K−1 was estimated, which corresponds to typical values for bulk silicon.

Towards a full integration of vertically aligned silicon nanowires in MEMS using silane as a precursor

Silicon nanowires present outstanding properties for electronics, energy, and environmental monitoring applications. However, their integration into microelectromechanical systems (MEMS) is a major issue so far due to low compatibility with mainstream technology, which complicates patterning and controlled morphology. This work addresses the growth of 〈111〉 aligned silicon nanowire arrays fully integrated into standard MEMS processing by means of the chemical vapor deposition-vapor liquid solid method (CVD-VLS) using silane as a precursor. A reinterpretation of the galvanic displacement method is presented for selectively depositing gold nanoparticles of controlled size and shape. Moreover, a comprehensive analysis of the effects of synthesis temperature and pressure on the growth rate and alignment of nanowires is presented for the most common silicon precursor, i.e., silane. Compared with previously reported protocols, the redefined galvanic displacement together with a silane-based CVD-VLS growth methodology provides a more standard and low-temperature (<650 °C) synthesis scheme and a compatible route to reliably grow Si nanowires in MEMS for advanced applications.

Improved Thermal Behavior of Multiple Linked Arrays of Silicon Nanowires Integrated into Planar Thermoelectric Microgenerators

Low-dimensional structures have been shown to be promising candidates for enhancing the thermoelectric properties of semiconductors, paving the way for integration of thermoelectric generators into silicon microtechnology. With this aim, dense arrays of well-oriented and size-controlled silicon nanowires (Si NWs) obtained by the chemical vapor deposition (CVD)-vapor–liquid–solid (VLS) mechanism have been implemented into microfabricated structures to develop planar unileg thermoelectric microgenerators (μTEGs). Different low-thermal-mass suspended structures have been designed and microfabricated on silicon-on-insulator (SOI) substrates to operate as microthermoelements using p-type Si NW arrays as the thermoelectric material. To obtain nanowire arrays with effective lengths larger than normally attained by the VLS technique, structures composed of multiple ordered arrays consecutively bridged by transversal microspacers have been fabricated. The successive linkage of multiple Si NW arrays enabled the development of larger temperature differences while preserving good electrical contact. This gives rise to small internal thermoelement resistances, enhancing the performance of the devices as energy harvesters.

Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators

Micro and nanotechnologies are called to play a key role in the fabrication of small and low cost sensors with excellent performance enabling new continuous monitoring scenarios and distributed intelligence paradigms (Internet of Things, Trillion Sensors). Harvesting devices providing energy autonomy to those large numbers of microsensors will be essential. In those scenarios where waste heat sources are present, thermoelectricity will be the obvious choice. However, miniaturization of state of the art thermoelectric modules is not easy with the current technologies used for their fabrication. Micro and nanotechnologies offer an interesting alternative considering that silicon in nanowire form is a material with a promising thermoelectric figure of merit. This paper presents two approaches for the integration of large numbers of silicon nanowires in a cost-effective and practical way using only micromachining and thin-film processes compatible with silicon technologies. Both approaches lead to automated physical and electrical integration of medium-high density stacked arrays of crystalline or polycrystalline silicon nanowires with arbitrary length (tens to hundreds microns) and diameters below 100 nm.

Modelling a P-FAIMS with multiphysics FEM

A micro Planar high-Field Asymmetric waveform Ion Mobility Spectrometer (P-FAIMS) operating at ambient pressure and temperature has been simulated using COMSOL Multiphysics software. P-FAIMS is based on ion gas-phase separation due to the dependence of ion mobility with electric field. Ions are selected by a DC voltage characteristic of each ion kind. Physics of ion behaviour in high electric fields conditions is well known but not the chemistry behind ion reactions and kinetics. The aim of this work is the modelling of different kind of ions in a P-FAIMS having account of the main factors involved in their movement in the drift tube. Simulations of vapour phase ions of three compounds have been studied for different values of drift electric field amplitude to gas number density (E/N) ratio: protonated water clusters H+(H2O)n and

Optical monitoring of wine alcoholic fermentation using a non-specific NDIR microarray

{{\rm O}_{2}^{-}({\rm H}_{2}{\rm O})_{n}}

Optimization of power output in planar thermoelectric microgenerators based on Si nanowires

ions obtained in air, and a chemical warfare agent simulant DMMPH+ that emulates gas sarin. Ions were selected due to simulation needs of experimental data of the main quantities involved in the definition of ions mobilities. Results show that simulations of ions behaviour in a P-FAIMS are possible with COMSOL Multiphysics software and that the time and intensity at which ions are detected are in good agreement with experimental data from literature.

SiNERGY, a project on energy harvesting and microstorage empowered by Silicon technologies

Simulation of the optical response for a tuneable Fabry-Perot interferometer fabricated using silicon MOEMS (micro-opto-electromechanical system) technology is presented. This device, which is intended to be part of an NDIR (nondispersive infrared) system, is composed of two dielectric parallel mirrors; the upper mirror is a suspended structure, electrostatically actuated, that allows tuning of the length of the resonant cavity, and therefore selection of the wavelength region corresponding to a particular absorption band. As the final spectrum of the device is directly related to the planarity of the upper mirror, once validated with measurements in small areas of the surface of the device, the optical model is used to predict the response of the whole area of the interferometer. This allows us to estimate the effect of the planarity of the device on the resulting spectra.