Carl Larouche

128 x 128 pixel uncooled bolometric FPA for IR detection and imaging

An uncooled IR camera making use of a 128 X 128 pixel bolometric FPA is presented. The reconfigurable bolometric focal plane array consist of 50 micrometer X 50 micrometer pixels and simple on-chip CMOS readout electronics which can be operated in random access, independent row and column clocking, and self-scanning modes. Depending on the selected pixel format and frame rate, the FPAs NETD varies from 0.52 degrees Celsius down to 0.10 degrees Celsius. The modular IR camera is software configured and provides RS170A analog video and 12-bit TTL format digital outputs.

Commercial and custom 160x120, 256x1, and 512x3 pixel bolometric FPAs

INO has been active in microbolometer and FPA technology development since the early 1990s. Microbolometer detectors based on VO2 films with TCR above 3% are typically fabricated. VOx films with TCR above 2% have been developed for applications where FPA temperature is not stabilized. INO is continuing its development of high fill factor pixels with sizes down to 25 micrometers and new macro- and micro-packaging technology. All fabrication is done on six inch wafers in INOs newly expanded clean room facility. INO currently offers as standard products 256x1 and 160x120 pixel FPAs with 52 micrometers pixel pitch. Both arrays have simple, robust, and versatile CMOS readout integrated circuits (ROICs) that may be accessed in self-scanning or random access mode, and reference detectors for on-chip coarse offset and temperature drift compensation. Single frame NETDs (f/1, 300 K, 8-12 micrometers ) are on the order of 150 - 250 mK and may be reduced by frame averaging. Prototyping boards have been developed for both arrays, and the 160x120 FPA has been integrated in a number of thermal cameras and instruments. In collaboration with its clients, INO has developed several FPAs for specific space and terrestrial applications. Custom ROICs fabricated in several different CMOS processes from multiple foundries have been used. A 512x3 pixel microbolometer FPA with 39 micrometers pitch is being developed for the European Space Agency. The array is designed for multi-spectral pushbroom imaging applications and features a novel ROIC with very low 1/f noise, pixel by pixel offset and drift compensation, variable integration time, and digital output. Its single frame NETD (f/1, 300 K, 8-12 micrometers ) is nominally 80 mK.

Flexible micromirror linear array for high-resolution projection display

The visual displays of contemporary military flight simulators lack adequate definition to represent scenes in basic fast-jet fighter tasks. For example, air-to-air and air-to-ground targets are not projected with sufficient contrast and resolution for a pilot to perceive aspect, aspect rate and object detail at real world slant ranges. Simulator display geometries require the development of ultra-high resolution projectors with greater than 20 megapixel resolution at 60 Hz frame rate. A new micromirror device has been developed to address this requirement; it is able to modulate light intensity in an analog fashion with switching times shorter than 5 μs. When combined with a scanner, a microlaser and Schlieren optics, a linear array of these flexible micromirrors can display images composed of thousands of lines at a frame rate of 60 Hz. The approach selected for light modulation and the micromirror fabrication process flow are reviewed. Static and dynamic performances of these electrostatic MOEMS are described. Preliminary results following the integration of the described modulator into a projector prototype are reported. Developments toward a fully addressable 2000 × 1 flexible micromirror array are presented. The specifications and design of the CMOS circuit required to control this micromirror array are described. Packaging issues related to these large arrays are discussed.

Miniature VO2-based bolometric detectors for high-resolution uncooled FPAs

Prototypes of VO2-based bolometric detectors with lateral dimensions of 25 X 25, 30 X 30, 35 X 35, 40 X 40 and finally 50 X 50 micrometers2 and fill factors approaching 90% are presented. These detectors are grouped in hardwired linear arrays as large as 512 X 1 pixels. Under DC biasing, the fabricated detectors, even the smallest ones, exhibit responsivities from 48,000 to 120,000 VW-1, detectivities in the range of 1.5 X 108 cm Hz1/2W-1 and response times in the range of 5 ms. These new bolometric detector structures contain hidden-legs placed completely underneath the bolometer platform. Results of simulations of the mechanical, optical and electrical properties of these new detector structures are presented. A complete detector fabrication process flow is described.

256 x 1 and 256 x 40 pixel bolometer arrays for space and industrial applications

Three types of uncooled IR bolometric detector arrays equipped with 256 X 1 and 256 X 40 VO2 thermistor pixels and on-chip readout electronics are presented. These reconfigurable arrays consist of 50 micrometer X 50 micrometer pixels and CMOS readout electronics that can be operated either in random access mode or in self-scanning mode. Depending on the operational conditions, the NETD of the arrays can be as low as 20 mK.

The EarthCARE broadband radiometer detectors

The Broadband Radiometer (BBR) is an instrument being developed for the ESA EarthCARE satellite. The BBR instrument objective is to provide top-of-atmosphere (TOA) radiance measurements in two spectral channels, and over three along-track directions. The instrument has three fixed telescopes (one for each view) each containing a broadband detector. Each detector consists of an uncooled 30-pixel linear focal plane array (FPA) coated with gold black in order to ensure uniform spectral responsivity from 0.2 μm to 50 μm. The FPA is hybridized with a readout integrated circuit (ROIC) and a proximity electronics circuit-card assembly (CCA) packaged in an aluminum base plate with cover. This paper provides a technical description of the detector design and operation. Performance data at the FPA pixel level as well as unit-level test results on early prototypes of the detectors are also presented.

Deposition and characterization of gold black coatings for thermal infrared detectors

High absorptivity and low thermal mass are two important requirements for coatings applied to thermal infrared detectors. Gold black coatings are very good candidates to ensure these characteristics in the broadband infrared spectral range. A specific deposition system was designed and built at INO in order to provide gold-black coatings for different broadband detection applications including the broadband radiometer (BBR) instrument for the European Space Agency (ESA) EarthCARE satellite. A parametric study targeting uniform optical absorptance within the spectral range from 0.2 μm to 50 μm was conducted. Specular reflectance lower than 10% was obtained for extended wavelength range up to 100 μm. The coating thickness ranges typically between 20 μm and 35 μm, with uniformity of about ± 3 μm over a sample surface of 10x10 mm2. The deposit density was typically ~0.3% of the bulk density of gold. To singulate the blackened infrared detector pixels, a laser micromachining process was developed. The setup exhibits a 1μm positioning accuracy and allows for ablation of 3 μm to 12 μm wide channels through the gold-black thickness, while preserving the pixel and gold-black deposit integrity.

CMOS-compatible spot-size converter for optical fiber to sub-μm silicon waveguide coupling with low-loss low-wavelength dependence and high tolerance to misalignment

One of the biggest challenges of silicon photonics is the efficient coupling of light between the sub-micron SiP waveguides and a standard optical fiber (SMF-28). We recently proposed a novel approach based on a spot-size converter (SSC) that fulfills this need. The SSC integrates a tapered silicon waveguide and a superimposed structure made of a plurality of rods of high index material, disposed in an array-like configuration and embedded in a cladding of lower index material. This superimposed structure defines a waveguide designed to provide an efficient adiabatic transfer, through evanescent coupling, to a 220 nm thick Si waveguide tapered down to a narrow tip on one side, while providing a large mode overlap to the optical fiber on the other side. An initial demonstration was made using a SSC fabricated with post-processing steps. Great coupling to a SMF-28 fiber with a loss of 0.6 dB was obtained for TEpolarized light at 1550 nm with minimum wavelength dependence. In this paper, SSCs designed for operation at 1310 and 1550 nm for TE/TM polarizations and entirely fabricated in a CMOS fab are presented.

MEMS-based flexible reflective analog modulators (FRAM) for projection displays: a technology review and scale-down study

A MEMS based technology for projection display is reviewed. This technology relies on mechanically flexible and reflective microbridges made of aluminum alloy. A linear array of such micromirrors is combined with illumination and Schlieren optics to produce a pixels line. Each microbridge in the array is individually controlled using electrostatic actuation to adjust the pixels intensities. Results of the simulation, fabrication and characterization of these microdevices are presented. Activation voltages below 250 V with response times below 10 μs were obtained for 25 μm × 25 μm micromirrors. With appropriate actuation voltage waveforms, response times of 5 μs and less are achievable. A damage threshold of the mirrors above 8 kW/cm2 has been evaluated. Development of the technology has produced projector engines demonstrating this light modulation principle. The most recent of these engines is DVI compatible and displays VGA video streams at 60 Hz. Recently applications have emerged that impose more stringent requirements on the dimensions of the MEMS array and associated optical system. This triggered a scale down study to evaluate the minimum micromirror size achievable, the impact of this reduced size on the damage threshold and the achievable minimum size of the associated optical system. Preliminary results of this scale down study are reported. FRAM with active surface as small as 5 μm × 5 μm have been investigated. Simulations have shown that such micromirrors could be activated with 107 V to achieve f-number of 1.25. The damage threshold has been estimated for various FRAM sizes. Finally, design of a conceptual miniaturized projector based on 1000×1 array of 5 μm × 5 μm micromirrors is presented. The volume of this projector concept is about 12 cm3.

Development of a DVI-Compatible VGA Projector Engine Based on Flexible Reflective Analog Modulators

The development of a Digital Video Interface (DVI) - compatible VGA projector engine based on Flexible Reflective Analog Modulator (FRAM) is reported. The FRAM technology development began a few years ago in response to a need for a new projection technology allowing the achievement of ultrahigh resolution for high fidelity simulations. This technology relies on simple micromirrors produced using typical Micro Opto Electro Mechanical System (MOEMS) manufacturing processes. It has the advantages of offering a simple fabrication process (three masking layers), a quick response time (5 µs) and to be wavelength insensitive over large spectral ranges. Additionally, the light modulation with these microdevices does not require the achievement of a very high quality optically flat state of the micromirrors which is typically difficult to obtain yet necessary for other MOEMS modulation technologies.