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Carlton Grant Willson

IBM

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Publication

Featured researches published by Carlton Grant Willson.

Archive | 1982

Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone

Hiroshi Ito; Carlton Grant Willson; Jean M. J. Fréchet

Archive | 1984

Radiation sensitive and oxygen plasma developable resist

Hiroshi Ito; Scott A. MacDonald; Robert D. Miller; Carlton Grant Willson

Archive | 1986

Positive tone oxygen plasma developable photoresist

Jean M. J. Fréchet; Hiroshi Ito; Scott A. MacDonald; Carlton Grant Willson

Archive | 1987

Method of creating patterned multilayer films for use in production of semiconductor circuits and systems

George Joseph Hefferon; Hiroshi Ito; Scott A. MacDonald; Carlton Grant Willson

Archive | 1986

Top imaged resists

Robert D. Allen; Kaolin N. Chiong; Ming-Fea Chow; Scott A. MacDonald; Jer-Ming Yang; Carlton Grant Willson

Archive | 1988

Thermally stable photoresists with high sensitivity

William R. Brunsvold; Ming-Fea Chow; Willard Earl Conley; Dale Murray Crockatt; Jean M.J. Fréchet; George Joseph Hefferon; Hiroshi Ito; Nancy Ellen Iwamoto; Carlton Grant Willson

Archive | 1982

Positive resist compositions

Nicholas J. Clecak; Dennis R. McKean; Robert D. Miller; Terry Cady Tompkins; R. J. Twieg; Carlton Grant Willson

Archive | 1983

High resolution optical lithography method and apparatus having excimer laser light source and stimulated Raman shifting

Kantilal Jain; Carlton Grant Willson

Archive | 1994

Photoresist composition with photosensitive base generator

James F. Cameron; Jean M. J. Fréchet; Man-Kit Leung; Claus-Peter Niesert; Scott A. MacDonald; Carlton Grant Willson

Archive | 1987

Process for making self-aligning thin film transistors

William D. Hinsberg; Webster Eugene Howard; Carlton Grant Willson

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Scott A. MacDonald

IBM

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Hiroshi Ito

IBM

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Nicholas J. Clecak

IBM

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Robert D. Miller

IBM

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Jean M.J. Fréchet

University of Ottawa

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Ming-Fea Chow

IBM

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Dennis R. McKean

IBM

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Willard Earl Conley

IBM

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Robert D. Allen

IBM

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Barbara Dianne Grant

IBM

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