Carol R. Jones

Laser chemical vapor deposition of copper

The first laser‐induced deposition of copper has been demonstrated using a volatile copper coordination complex. The technique is characterized by reasonable rates and by the high quality of copper produced.

Laser chemical vapor deposition of gold

High quality gold spots and lines have been deposited from gaseous dimethyl (2, 4‐pentanedionato) gold (III) using a focused argon ion laser. Growth rates of 1 μm/s at power densities of 4×105 W/cm2 were obtained. Resistivity, threshold writing power densities, and deposition rates were measured and their relationship to the physical and chemical properties of the gaseous complex are explored.

Beyond predictable workflows: enhancing productivity in artful business processes

Until now, the greatest productivity gains in business processes have been achieved by formalizing the processes into computer-managed workflows. However, many processes have not yielded to this approach, and in its stead, users have depended on ad hoc collaboration tools, such as e-mail and instant messaging, to coordinate their work. While undeniably useful, these tools are disconnected from process methods and can become overloaded and unproductive. Through use cases, we show that many business people are, of necessity, integrators of information technology (IT), but receive inadequate support from centralized IT. We maintain that productivity will be increased by better enabling users to select and integrate IT services as their needs evolve, promoting a shift that we call the democratization of process. With the organizing principles of activity-centric computing and the arrival of valuable online services and decentralized methods for integrating them into existing applications, such a shift is now becoming technically feasible-a goal that enterprises should pursue.

Photochemical generation and deposition of copper from a gas phase precursor

The photochemical generation and deposition of copper metal from a volatile copper coordination complex are described. Pulsed and cw ultraviolet light sources were used to induce deposition. The chemical compositions of the films are compared for all methods.

Laser chemical vapor deposition of gold: Part II

The laser‐induced pyrolytic deposition (LCVD) of high purity gold metal is discussed. The effects of laser flux and cell temperature are examined for the deposition process. Rates of deposition, resistivities, and deposit quality are highlighted.

Projection printing of gold micropatterns by photochemical decomposition

Gold micropatterns have been generated by the laser photolysis of dimethylgold (III) acetylacetonate, Me2Au(acac), in the vapor phase. Linewidths as fine as 2 μm were readily obtained utilizing a simple optical projection system comprised of a 4× projection lens, a lithographic photomask, and the UV output from an excimer laser. The single‐step, dry process for selectively producing metal patterns is highlighted.