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Dive into the research topics where Catherine Vartuli is active.

Publication


Featured researches published by Catherine Vartuli.


Archive | 2002

Semiconductor manufacturing using modular substrates

Michael Antonell; Erik Cho Houge; Nitin Patel; Larry E. Plew; Catherine Vartuli


Archive | 1999

Method of monitoring a patterned transfer process using line width metrology

Thomas Evans Adams; Thomas S Frederick; Scott Jessen; John M. McIntosh; Catherine Vartuli


Archive | 2002

Calibration standard for high resolution electron microscopy

Erik Cho Houge; Catherine Vartuli; John M. McIntosh; Fred Anthony Stevie


Archive | 2000

Monitoring system for determining progress in a fabrication activity

Erik Cho Houge; Isik C. Kizilyalli; John M. McIntosh; Fred Anthony Stevie; Catherine Vartuli


Archive | 1999

Scanning electron microscope/energy dispersive spectroscopy sample preparation method and sample produced thereby

Jeffrey B. Bindell; Frederick A. Stevie; Catherine Vartuli


Archive | 1998

Apparatus for holding and aligning a scanning electron microscope sample

Michael A. Ackeret; Jeffry B. Bindell; Charles E. Bryson; Larry E. Plew; Catherine Vartuli; Xiao-Zhong Wu


Archive | 2001

Method for detecting defects in a material and a system for accomplishing the same

Erik Cho Houge; Catherine Vartuli; Mike Antonell; Pam Cavanagh; Hui Ma


Archive | 2001

Method and apparatus for minimizing semiconductor wafer contamination

Michael Antonell; Erik Cho Houge; Catherine Vartuli; Jennifer Juszczak


Archive | 2001

Method of determining a crystallographic quality of a material located on a substrate

Erik Cho Houge; John Martin Mcintosh; Fred A. Stevie; Catherine Vartuli


Archive | 2000

Mass spectrometer particle counter

Erik Cho Houge; John M. McIntosh; Fred Anthony Stevie; Steven Barry Valle; Catherine Vartuli

Collaboration


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Fred A. Stevie

North Carolina State University

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Frederick A. Stevie

North Carolina State University

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