Chang Ching-Yu | Researchain

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Publication

Featured researches published by Chang Ching-Yu.

Archive | 2014

APPARATUS AND METHOD FOR DEVELOPING PROCESS

Chang Ching-Yu

Archive | 2014

APPARATUS AND METHOD FOR RESIST COATING AND DEVELOPING

Chang Ching-Yu

Archive | 2007

Method for forming a lithograohy pattern

Chang Ching-Yu; Lin Chin-Hsiang; Lin Burn-Jeng

Archive | 2007

Optical proximity correction photomasks

Chang Ching-Yu

Archive | 2007

LIQUID IMMERSION LITHOGRAPHY METHOD AND SYSTEM

Chang Ching-Yu; Lin Chin-Hsiang

Archive | 2007

Apparatus and methods for immersion

Chang Ching-Yu; Lin Chin-Hsiang

Archive | 2017

METHOD OF PRIMING PHOTORESIST BEFORE APPLICATION OF A SHRINK MATERIAL IN A LITHOGRAPHY PROCESS

Lai Wei-Han; Chang Ching-Yu

Archive | 2017

VERFAHREN FÜR DIE IMMERSIONSLITHOGRAPHIE

Chang Ching-Yu; Lin Chin-Hsiang

Archive | 2017

Post Development Treatment Method

Wang Siao-Shan; Chang Ching-Yu

Archive | 2017

Extreme utraviolet photoresist

Lai Wei-Han; Chang Ching-Yu; Wang Chien-Wei

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Collaboration

Dive into the Chang Ching-Yu's collaboration.

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Lin Chin-Hsiang

TSMC

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Liu Chen-Yu

TSMC

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Cheng Ya-Ling

TSMC

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Lai Wei-Han

TSMC

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Wang Chien-Wei

TSMC

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Weng Ming-Huei

TSMC

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Zi An-Ren

TSMC

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Chen Chien-Chih

TSMC

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Chen Chun-Kuang

TSMC

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Wu Chen-Hau

TSMC

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