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Chang-Sheng Lee

TSMC

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Publication

Featured researches published by Chang-Sheng Lee.

Archive | 2015

SEMICONDUCTOR STRUCTURE WITH METAL GATE AND MANUFACURING METHOD THEREOF

Chung-Liang Cheng; Yen-Yu Chen; Wei-Jen Chen; Chang-Sheng Lee; Wei Zhang

Archive | 2014

PLANARIZATION METHOD, METHOD FOR POLISHING WAFER, AND CMP SYSTEM

Chung-Liang Cheng; Yen-Yu Chen; Chang-Sheng Lee; Wei Zhang

Archive | 2013

Apparatus and System for Preventing Backside Peeling Defects on Semiconductor Wafers

Yen-Yu Chen; Wei-Jen Chen; Yi-Chen Chiang; Tsang-Yang Liu; Chang-Sheng Lee; Wei-Chen Liao; Wei Zhang

Archive | 2013

Apparatus and method for chemical mechanical polishing

Chung-Liang Cheng; Yen-Yu Chen; Chang-Sheng Lee; Wei Zhang

Archive | 2013

Process kit of physical vapor deposition chamber and fabricating method thereof

Shih-Wei Bih; Wei-Jen Chen; Yen-Yu Chen; Hsien-Chieh Hsiao; Chang-Sheng Lee; Wei-Chen Liao; Wei Zhang

Archive | 2016

Solid precursor delivery system

Chung-Liang Cheng; Chien-Hao Tseng; Yen-Yu Chen; Ching-Chia Wu; Chang-Sheng Lee; Wei Zhang

Archive | 2016

CHEMICAL-MECHANICAL PLANARIZATION SYSTEM

Chung-Liang Cheng; Yen-Yu Chen; Chang-Sheng Lee; Wei Zhang

Archive | 2015

METHOD FOR CONTROLLING SEMICONDUCTOR DEPOSITION OPERATION

Chung-Liang Cheng; Sheng-wei Yeh; Chia-hsi Wang; Wei-Jen Chen; Yen-Yu Chen; Chang-Sheng Lee; Wei Zhang

Archive | 2013

Composition and method for chemical mechanical polishing

Chung-Liang Cheng; Yen-Yu Chen; Chang-Sheng Lee; Wei Zhang

Archive | 2013

Mechanisms for monitoring impurity in high-K dielectric film

Wei-Jen Chen; Yen-Yu Chen; Chang-Sheng Lee; Wei Zhang

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Collaboration

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Wei Zhang

TSMC

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Yen-Yu Chen

TSMC

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Chung-Liang Cheng

TSMC

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Wei-Jen Chen

TSMC

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Chien-Hao Tseng

TSMC

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Ching-Chia Wu

TSMC

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Wei-Chen Liao

TSMC

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Chia-hsi Wang

TSMC

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Hsien-Chieh Hsiao

TSMC

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Sheng-wei Yeh

TSMC

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